Vacuum valve
First Claim
1. A vacuum valve comprising:
- a valve housing with first and second valve openings, which have parallel axes and are each enclosed by a valve seat,a first and a second valve plate, which are adjustable between an open position, in which the valve plates are free from the respective valve openings, an intermediate position, in which the valve plates cover over the respective valve openings, but are raised up from the respective valve seats, and a closed position, in which the valve plates abut against the respective valve seats,a carrying unit, which carries the valve plates and which has drive elements which adjust the first and second valve plates between the intermediate position and the closed position and each of the drive elements comprises a cylinder, having at least one cylinder space, and at least one piston, which is arranged in the cylinder space and has a piston rod, which is connected to the respective one of the valve plates, the carrying unit further includes at least a first and a second carrier rod, to which the cylinders of the drive elements are rigidly connected, the cylinders each span an interspace located between the first and second carrier rods, which are arranged on opposite sides laterally alongside the piston rods of the drive elements.
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Accused Products
Abstract
A vacuum valve includes a valve housing with first and second valve openings, which have parallel axes, a first and a second valve plate, adjustable between an open position, an intermediate position and a closed position, and a carrying unit, which carries the valve plates between the intermediate position, in which the valve plates cover over the respective valve openings, but are raised up from the valve seat, and the closed position, and each include a cylinder, having at least one cylinder space, and at least one piston, arranged in the cylinder space and has a piston rod, connected to one of the valve plates. The carrying unit has at least first and second carrier rods, to which the cylinders of the drive elements are connected. The cylinders each span an interspace located between the carrier rods, arranged on opposite sides laterally alongside the piston rods of the drive elements.
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Citations
15 Claims
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1. A vacuum valve comprising:
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a valve housing with first and second valve openings, which have parallel axes and are each enclosed by a valve seat, a first and a second valve plate, which are adjustable between an open position, in which the valve plates are free from the respective valve openings, an intermediate position, in which the valve plates cover over the respective valve openings, but are raised up from the respective valve seats, and a closed position, in which the valve plates abut against the respective valve seats, a carrying unit, which carries the valve plates and which has drive elements which adjust the first and second valve plates between the intermediate position and the closed position and each of the drive elements comprises a cylinder, having at least one cylinder space, and at least one piston, which is arranged in the cylinder space and has a piston rod, which is connected to the respective one of the valve plates, the carrying unit further includes at least a first and a second carrier rod, to which the cylinders of the drive elements are rigidly connected, the cylinders each span an interspace located between the first and second carrier rods, which are arranged on opposite sides laterally alongside the piston rods of the drive elements. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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Specification