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Multilayered liquid capacitive micro inclinometer

  • US 9,086,276 B2
  • Filed: 09/27/2013
  • Issued: 07/21/2015
  • Est. Priority Date: 09/27/2012
  • Status: Active Grant
First Claim
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1. A liquid capacitive micro inclinometer, comprising:

  • at least two pairs of differential electrodes, each pair having electrodes positioned in the same plane;

    at least one common electrode, with a part thereof positioned in said same plane;

    a sealed chamber enclosing said differential electrodes and said common electrode; and

    immersing liquid filled in said sealed chamber.

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