Multilayered liquid capacitive micro inclinometer
First Claim
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1. A liquid capacitive micro inclinometer, comprising:
- at least two pairs of differential electrodes, each pair having electrodes positioned in the same plane;
at least one common electrode, with a part thereof positioned in said same plane;
a sealed chamber enclosing said differential electrodes and said common electrode; and
immersing liquid filled in said sealed chamber.
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Abstract
The present invention relates to a liquid multilayer capacitive micro inclinometer, comprising at least two pairs of differential electrodes, each pair positioned in a same plane; at least one common electrode with a portion positioned in the plane of each pair of differential electrodes. The differential electrodes and the common electrode are provided in a sealed chamber, in which an immersing liquid is filled. The shape of the differential electrodes forms a sector of a circular plane. The inclinometer may further integrate a reading circuit. The present invention also discloses preparation method for the invented inclinometer.
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Citations
31 Claims
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1. A liquid capacitive micro inclinometer, comprising:
- at least two pairs of differential electrodes, each pair having electrodes positioned in the same plane;
at least one common electrode, with a part thereof positioned in said same plane;
a sealed chamber enclosing said differential electrodes and said common electrode; and
immersing liquid filled in said sealed chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
- at least two pairs of differential electrodes, each pair having electrodes positioned in the same plane;
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15. A method for preparation of liquid capacitive micro inclinometers, comprising the steps of:
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preparing a first substrate; forming on the first substrate a stack of a plurality of metal layers and a plurality of dielectric layers;
said stack comprising a pattern including at least two pairs of differential electrodes and at least one common electrode, wherein shape of the differential electrodes forms part of a circular plane and wherein electrodes belonging to a pair are in similar shape and have substantially the same area;releasing the at least two differential electrodes and the at least one common electrode; preparing a second substrate; forming a material layer on the second substrate; forming a recess in the material layer; adding immersing liquid in the recess; flipping the first substrate on the second substrate, so that the differential electrodes and the common electrode are positioned in a space defined by the recess; and combining the first substrate and the second substrate. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
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Specification