Conductive bus structure for interferometric modulator array

• US 9,086,564 B2
• Filed: 03/04/2013
• Issued: 07/21/2015
• Est. Priority Date: 09/27/2004
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Chui, Clarence, Sampsell, Jeffrey B.
• Primary Examiner(s): Nguyen, Kevin M
• Application Number:
  US13/784,491
• Publication Number:
  US 20140063588A1
• Time in Patent Office: 869 Days
• Field of Search: 345/85, 345/108, 345/87, 359/295, 349/148, 349/152
• US Class Current: 1/1
• CPC Class Codes: B81B 3/0086 Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G09G 3/3466 based on interferometric effect
• CPC Class Codes: Y10T 29/49117 Conductor or circuit manufacturing

Abstract

Embodiments of an interferometric modulator are disclosed having various enhancements and features including a conductive bus. In certain embodiments, the interferometric modulator has a first conductive layer suspended over a second electrode layer. In certain embodiments, a second conductive layer is provided over the first conductive layer. One of the first and/or second conductive buses may further connect to the first electrode layer and/or the second electrode layer. Other disclosed features can be incorporated into embodiments of the interferometric modulator to improve response time, power consumption, and image resolution.

Claims

1. A display apparatus, comprising:

a substrate;

a plurality of movable elements;

a first electrode layer over the substrate, the first electrode layer including a plurality of first electrodes each having a first electrical resistance;

a second electrode layer over the substrate, the second electrode layer including a plurality of second electrodes each having a second electrical resistance; and

a conductive bus layer having a third electrical resistance lower than the first electrical resistance or the second electrical resistance, at least a portion of the conductive bus layer electrically coupled to at least one of the first electrode layer and the second electrode layer.

2. The display apparatus of claim 1, wherein the plurality of first electrodes are arranged in rows.

3. The display apparatus of claim 1, wherein the plurality of second electrodes are arranged in columns.

4. The display apparatus of claim 1, wherein the at least a portion of the conductive bus layer is electrically coupled to the first electrode layer.

5. The display apparatus of claim 4, further comprising a row driver electrically connected to the conductive bus layer.

6. The display apparatus of claim 1, wherein the at least a portion of the conductive bus layer is electrically coupled to the second electrode layer.

7. The display apparatus of claim 6, further comprising a column driver electrically connected to the conductive bus layer.

8. The display apparatus of claim 1, wherein the conductive bus layer includes a first conductive bus layer electrically coupled to the first electrode layer and a second conductive bus layer electrically coupled to the second electrode layer.

9. The display apparatus of claim 1, wherein the conductive bus layer includes a conductive metal.

10. The display apparatus of claim 9, wherein the conductive metal is aluminum (Al) or chromium (Cr).

11. The display apparatus of claim 1, wherein the conductive bus layer has a width between about 4 microns and about 10 microns when measured in a direction substantially normal to a surface of the substrate.

12. The display apparatus of claim 1, wherein the plurality of first electrodes are arranged in rows, wherein the plurality of second electrodes are arranged in columns, and wherein the rows and the columns are arranged substantially perpendicular to each other in an array.

13. The display apparatus of claim 1, wherein each of the plurality of movable elements are capable of moving independently of each other.

14. The display apparatus of claim 1, wherein the substrate is transparent.

15. The display apparatus of claim 1, further comprising a circuit electrically connected to the conductive bus layer.

16. The display apparatus of claim 1, wherein the first electrode layer or the second electrode layer includes indium-tin-oxide (ITO) or a conductive dielectric material.

17. The display apparatus of claim 16, wherein the conductive dielectric material is silicon oxide.

18. The display apparatus of claim 1, further comprising:

a display;

a processor capable of communicating with said display, the processor capable of processing image data; and

a memory device capable of communicating with said processor.

19. A display device, comprising:

a plurality of structures, each structure including;

first electrode layers arranged in rows and having both a first electrical resistance and a first electrical conductance, and

second electrode layers arranged in columns and having both a second electrical resistance and a second electrical conductance; and

a conductive bus layer interconnecting the plurality of structures, at least a portion of the conductive bus layer electrically coupled to the first electrode layers or the second electrode layers,

wherein the conductive bus layer has a third electrical resistance lower than the first electrical resistance or the second electrical resistance,

wherein each of the plurality of structures further includes a movable element, and

wherein each of the plurality of movable elements are capable of moving independently of each other.

20. The display device of claim 19, wherein the conductive bus layer has a third electrical conductance greater than the first electrical conductance or the second electrical conductance.

21. The display device of claim 19, wherein the conductive bus layer includes a conductive metal.

22. The display device of claim 21, wherein the conductive metal is aluminum (Al) or chromium (Cr).

23. The display device of claim 19, further comprising a circuit electrically connected to the conductive bus.

24. The display device of claim 19, wherein each of the first electrode layers or each of the second electrode layers include indium-tin-oxide (ITO) or a conductive dielectric material.

25. The display device of claim 24, wherein the conductive dielectric material is silicon oxide.