MEMS optical device
First Claim
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1. A MEMS optical device, comprising:
- an optical element mounted on a support structure by a resilient structure, the resilient structure comprising a serpentine structure connected between the optical element and the support structure, the resilient structure permitting movement along an axis that is perpendicular to a plane defined by the support structure and resisting movement in any direction perpendicular to the axis;
an electrostatic combdrive actuator having a first part mounted on the support structure, and a second part mounted on the optical element, the first part and the second part providing an actuating force to the optical element to move the optical element along the axis in a constant orientation relative to the plane.
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Abstract
A micro-electro-mechanical-system (MEMS) micromirror array has an array of micromirrors on a support structure. Each micromirror is pivotally attached to the support structure by a resilient structure. The resilient structure defines a pivot axis. There is an array of electrostatic actuators for pivotally driving the array of micromirrors about the pivot axis. Each electrostatic actuator comprises a first part carried by the support structure, and a second part carried by the corresponding micromirror. An electrostatic sink is mounted to the support structure that shields at least one micromirror from spurious electrostatic actuation.
101 Citations
23 Claims
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1. A MEMS optical device, comprising:
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an optical element mounted on a support structure by a resilient structure, the resilient structure comprising a serpentine structure connected between the optical element and the support structure, the resilient structure permitting movement along an axis that is perpendicular to a plane defined by the support structure and resisting movement in any direction perpendicular to the axis; an electrostatic combdrive actuator having a first part mounted on the support structure, and a second part mounted on the optical element, the first part and the second part providing an actuating force to the optical element to move the optical element along the axis in a constant orientation relative to the plane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A MEMS optical device, comprising:
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an optical element mounted on a support structure by a resilient structure, the resilient structure comprising a serpentine structure connected between the optical element and the support structure, the resilient structure permitting movement along an axis that is perpendicular to a plane defined by the support structure and resisting movement in any direction perpendicular to the axis, the optical element maintaining a constant orientation relative to the plane during movement along the axis, and wherein the optical element is optically reflective. - View Dependent Claims (14, 15, 16, 17)
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18. A MEMS optical device, comprising:
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an optically transmissive element mounted on a support structure by a resilient structure, the resilient structure permitting movement along an axis that is perpendicular to the support structure and resisting movement in any direction perpendicular to the axis; an electrostatic combdrive actuator having a first part mounted on the support structure, and a second part mounted on the optically transmissive element, the first part and the second part providing an actuating force to the optical element to move the optically transmissive element along the axis. - View Dependent Claims (19, 20)
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21. A MEMS optical device, comprising:
an optical element mounted on a support structure by a plurality of resilient structures, the resilient structures being spaced circularly symmetrically about the optical element, each resilient structure comprising a serpentine structure connected between the optical element and the support structure, the resilient structures permitting movement along an axis that is perpendicular to a plane defined by the support structure and resisting movement in any direction perpendicular to the axis, the optical element maintaining a constant orientation relative to the plane during movement along the axis. - View Dependent Claims (22, 23)
Specification