Angular speed sensor for detecting angular speed
First Claim
Patent Images
1. An angular velocity sensor comprising:
- a package;
an angular velocity sensor element disposed in the package and having a vibration plane;
a seat that supports the angular velocity sensor element to ensure a vibrating space of the angular velocity sensor element; and
a vibration-proof member that suspends the seat in an internal space of the package, whereinthe vibration-proof member includes;
a connection portion to the package; and
a suspension portion located between the connection portion and a connection portion to the seat, and a height of a barycentric position of the suspension portion is matched with a height of a barycentric position of a composite body including the angular velocity sensor element, the seat, and connection portion to the seat in the vibration-proof member;
wherein the suspension portion has a step-shaped structure including a first surface and a second surface, the first surface disposed parallel to the vibration plane of the angular velocity sensor and the second surface disposed orthogonal to the vibration plane of the angular velocity sensor; and
wherein the height of the barycentric position of the suspension portion and the height of the barycentric position of the composite body are matched based on the vibration lane in a driving vibration of the angular velocity sensor element.
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Abstract
A placing member is configured to be supported from an outside by a terminal electrically connected to a terminal electrode, and an X-axis-direction extended portion, a Y-axis-direction extended portion, and a Z-axis-direction extended portion are provided in the terminal. This configuration provides an angular velocity sensor, in which a problem such that Y-axis-direction and Z-axis-direction vibrations applied from the outside cannot be damped is eliminated, and all the vibrations in three axis directions can be damped.
10 Citations
7 Claims
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1. An angular velocity sensor comprising:
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a package; an angular velocity sensor element disposed in the package and having a vibration plane; a seat that supports the angular velocity sensor element to ensure a vibrating space of the angular velocity sensor element; and a vibration-proof member that suspends the seat in an internal space of the package, wherein the vibration-proof member includes; a connection portion to the package; and a suspension portion located between the connection portion and a connection portion to the seat, and a height of a barycentric position of the suspension portion is matched with a height of a barycentric position of a composite body including the angular velocity sensor element, the seat, and connection portion to the seat in the vibration-proof member; wherein the suspension portion has a step-shaped structure including a first surface and a second surface, the first surface disposed parallel to the vibration plane of the angular velocity sensor and the second surface disposed orthogonal to the vibration plane of the angular velocity sensor; and wherein the height of the barycentric position of the suspension portion and the height of the barycentric position of the composite body are matched based on the vibration lane in a driving vibration of the angular velocity sensor element. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification
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Current AssigneePanasonic Intellectual Property Management Co., Ltd. (Panasonic Holdings Corporation)
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Original AssigneePanasonic Intellectual Property Management Co., Ltd. (Panasonic Holdings Corporation)
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InventorsUchida, Takashi, Yamazaki, Toshio, Mitani, Tomohiro
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Primary Examiner(s)CHAPMAN JR, JOHN E
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Application NumberUS13/579,346Publication NumberTime in Patent Office1,623 DaysField of Search735/041.2US Class Current1/1CPC Class CodesB81B 2201/0242 GyroscopesB81B 7/0016 Protection against shocks o...G01C 19/5607 using vibrating tuning fork...G01C 19/5628 Manufacturing; Trimming; Mo...G01C 19/574 the devices having two sens...G01C 19/5769 Manufacturing; Mounting; Ho...H01L 2224/48091 ArchedH01L 2924/00014 the subject-matter covered ...H01L 2924/16195 Flat cap [not enclosing an ...
