Micro-electro-mechanical-system (MEMS) driver
First Claim
Patent Images
1. A driver for a micro-electro-mechanical-system (MEMS) device, the driver comprising:
- a first input configured to receive a first command signal including an oscillatory command signal;
a second input configured to receive a second command signal including a bias command signal;
an amplifier configured to receive a high voltage supply, the amplifier configured to provide, to the MEMS device, a closed-loop output signal responsive to both the first command signal and the second command signal in a first state, and to provide an open loop output signal configured to substantially span a voltage range of the high voltage supply in a second state;
a first gain block electrically connected to the first input; and
a second gain block electrically connected to the second input,wherein gain provided to the first command signal by the first gain block is independent of gain provided to the second command signal by the second gain block.
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Abstract
In an example, a driver for a micro-electro-mechanical-system (MEMS) device can include a first input configured to receive a first command signal including an oscillatory command signal, a second input configured to receive a second command signal including a bias command signal, and an amplifier configured to receive a high voltage supply, to provide, to the MEMS device, a closed-loop output signal responsive to both the first command signal and the second command signal in a first state, and to provide an open loop output signal configured to substantially span a voltage range of the high voltage supply in a second state.
201 Citations
23 Claims
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1. A driver for a micro-electro-mechanical-system (MEMS) device, the driver comprising:
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a first input configured to receive a first command signal including an oscillatory command signal; a second input configured to receive a second command signal including a bias command signal; an amplifier configured to receive a high voltage supply, the amplifier configured to provide, to the MEMS device, a closed-loop output signal responsive to both the first command signal and the second command signal in a first state, and to provide an open loop output signal configured to substantially span a voltage range of the high voltage supply in a second state; a first gain block electrically connected to the first input; and a second gain block electrically connected to the second input, wherein gain provided to the first command signal by the first gain block is independent of gain provided to the second command signal by the second gain block. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method comprising:
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generating a first command signal that includes an oscillatory command signal; generating a second command signal that includes a bias command signal; providing, at an output of the driver when the driver is in a first state, a closed-loop output signal responsive to both the first command signal and the second command signal; providing, at the output of the driver when the driver is in a second state, an open loop output signal configured to substantially span a voltage range of a high voltage supply of the driver; and providing gain to the first command signal that is independent of gain provided to the second command signal. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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16. A system comprising:
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a MEMS device; and a driver configured to provide an output signal to the MEMS device, wherein the driver includes; a first input configured to receive a first command signal including an oscillatory command signal; a second input configured to receive a second command signal including a bias command signal; an amplifier configured to receive a high voltage supply, the amplifier configured to provide, to the MEMS device, a closed-loop output signal responsive to both the first command signal and the second command signal in a first state, and to provide an open loop output signal configured to substantially span a voltage range of the high voltage supply in a second state; a first gain block electrically connected to the first input; and a second gain block electrically connected to the second input, wherein gain provided to the first command signal by the first gain block is independent of gain provided to the second command signal by the second gain block. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23)
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Specification