Electromechanical systems device with protrusions to provide additional stable states

• US 9,096,419 B2
• Filed: 10/01/2012
• Issued: 08/04/2015
• Est. Priority Date: 10/01/2012
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Chan, Edward Keat Leem, Reines, Isak Clark, Wen, Bing, Lee, Chong Uk
• Primary Examiner(s): Amini, Javid A
• Application Number:
  US13/632,959
• Publication Number:
  US 20140092110A1
• Time in Patent Office: 1,037 Days
• Field of Search: 345/501
• US Class Current: 1/1
• CPC Class Codes: B81B 2201/047 Optical MEMS not provided for in B81B2201/042 - B81B2201/045
• CPC Class Codes: B81B 2203/0109 Bridges
• CPC Class Codes: B81B 2203/0163 Spring holders
• CPC Class Codes: B81B 3/0051 For defining the movement, i.e. structures that guide or limit the movement of an element mechanical arrangements for preventing or damping vibration or shock H01H3/60
• CPC Class Codes: B81B 3/007 For controlling stiffness, e.g. ribs
• CPC Class Codes: H01F 2007/1822 using a capacitor to produce a boost voltage
• CPC Class Codes: Y10T 29/49155 Manufacturing circuit on or in base

Abstract

This disclosure provides systems, methods, and apparatus for an electromechanical systems (EMS) device with one or more protrusions connected to a surface of the EMS device. In one aspect, the EMS device includes a substrate, a stationary electrode over the substrate, and a movable electrode over the stationary electrode. The movable electrode is configured to move to three or more positions across a gap by electrostatic actuation between the movable electrode and the stationary electrode. When the protrusions contact any surface of the EMS device at one of the positions across the gap, the protrusions change the stiffness of the EMS device. At least one of the surfaces in contact with the one or more protrusions is non-rigid. In some implementations, the protrusions have a height greater than about 20 nm.

Claims

1. An electromechanical systems (EMS) device, comprising:

a substrate;

a stationary electrode over the substrate;

a movable electrode over the stationary electrode and configured to move to three or more positions across a gap by electrostatic actuation between the movable electrode and the stationary electrode;

a plurality of tethers symmetrically disposed around the edges of the movable electrode; and

a plurality of protrusions connected to and protruding from a first surface of the EMS device, the plurality of protrusions rotationally symmetric about a center of the movable electrode, wherein the movable electrode is configured to continue moving closer towards the stationary electrode when any of the protrusions makes contact with a second surface of the EMS device opposite the first surface during actuation, wherein the first surface includes one of;

a surface of the substrate facing the movable electrode, a surface of the movable electrode facing the substrate, and a surface of the plurality of tethers facing the substrate,

wherein at least one of the first surface and the second surface of the EMS device is non-rigid.

2. The EMS device of claim 1, further comprising a plurality of posts over the substrate, wherein the movable electrode is connected to the plurality of posts by the plurality of tethers.

3. The EMS device of claim 1, wherein the movable electrode includes a reflective layer having a rigid surface and the plurality of tethers includes a plurality of hinges each having a non-rigid surface.

4. The EMS device of claim 1, wherein each of the protrusions is connected to the surface of the movable electrode facing the stationary electrode.

5. The EMS device of claim 1, wherein each of the protrusions is connected to the surface of the substrate facing the movable electrode.

6. The EMS device of claim 1, wherein each of the protrusions is connected to the surface of the tethers facing the substrate.

7. The EMS device of claim 1, wherein the EMS device is part of an optical device.

8. The EMS device of claim 7, wherein the EMS device is part of an analog interferometric modulator (AIMOD).

9. The EMS device of claim 8, wherein the three or more positions across the gap correspond to different visible wavelengths in each of the positions, wherein one of the positions across the gap is defined at least in part by the height of at least one of the protrusions.

10. The EMS device of claim 8, wherein the plurality of protrusions define a plurality of positions across the gap corresponding to a stable color range when at least one of the protrusions makes contact with the second surface of the EMS device during actuation.

11. The EMS device of claim 1, wherein each of the protrusions has a height greater than about 20 nm.

12. The EMS device of claim 11, wherein each of the protrusions has a height between about 100 nm and about 200 nm.

13. The EMS device of claim 1, wherein each of the protrusions has a different height.

14. The EMS device of claim 1, further comprising a top electrode over the movable electrode, wherein the movable electrode is configured to move across an upper gap by electrostatic actuation between the movable electrode and the top electrode.

15. The EMS device of claim 1, wherein the EMS device forms a display, the display including:

a processor that is configured to communicate with the display, the processor being configured to process image data; and

a memory device that is configured to communicate with the processor.

16. The EMS device of claim 15, further comprising:

a driver circuit configured to send at least one signal to the display; and

a controller configured to send at least a portion of the image data to the driver circuit.

17. The EMS device of claim 15, further comprising:

an image source module configured to send the image data to the processor, wherein the image source module comprises at least one of a receiver, transceiver, and transmitter.

18. The EMS device of claim 15, further comprising:

an input device configured to receive input data and to communicate the input data to the processor.

19. An electromechanical systems (EMS) device, comprising:

a substrate;

a stationary electrode over the substrate;

a movable electrode over the stationary electrode and configured to move to three or more positions across a gap by electrostatic actuation between the movable electrode and the stationary electrode;

means for supporting the movable electrode over the substrate;

means for tethering the movable electrode to the supporting means and symmetrically disposed around the edges of the movable electrode; and

means for protruding from a first surface of the EMS device, the protruding means being rotationally symmetric about a center of the movable electrode, wherein the movable electrode is configured to continue moving closer towards the stationary electrode when the protruding means makes contact with a second surface of the EMS device opposite the first surface during actuation, wherein the first surface includes one of;

a surface of the substrate facing the movable electrode, a surface of the movable electrode facing the substrate, and a surface of the tethering means facing the substrate,

wherein at least one of the first surface and the second surface of the EMS device is non-rigid.

20. The EMS device of claim 19, wherein the protruding means is connected to the surface of the movable electrode facing the stationary electrode.

21. The EMS device of claim 19, wherein the protruding means is connected to the surface of the substrate facing the movable electrode.

22. The EMS device of claim 19, wherein the protruding means is connected to the surface of the tethering means facing the substrate.

23. The EMS device of claim 19, wherein the protruding means has a height greater than about 20 nm.

24. A method of manufacturing an electromechanical systems (EMS) device, comprising:

providing a substrate;

forming a stationary electrode over the substrate;

forming a movable electrode over the stationary electrode, wherein the movable electrode is configured to move to three or more positions across a gap by electrostatic actuation between the movable electrode and the stationary electrode;

forming a plurality of tethers symmetrically disposed around the edges of the movable electrode; and

forming a plurality of protrusions connected to and protruding from a first surface of the EMS device, the plurality of protrusions rotationally symmetric about a center of the movable electrode, wherein the movable electrode is configured to continue moving closer towards the stationary electrode when any of the protrusions makes contact with a second surface of the EMS device opposite the first surface during actuation, wherein the first surface includes one of;

a surface of the substrate facing the movable electrode, a surface of the movable electrode facing the substrate, and a surface of the plurality of tethers facing the substrate,

wherein at least one of the first surface and the second surface of the EMS device is non-rigid.

25. The method of claim 24, wherein each of the protrusions is connected to the surface of the movable electrode facing the stationary electrode.

26. The method of claim 24, wherein each of the protrusions is connected to the surface of the substrate facing the movable electrode.

27. The method of claim 24, wherein each of the protrusions has a height greater than about 20 nm.