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MEMS device with improved spring system

  • US 9,097,524 B2
  • Filed: 01/30/2012
  • Issued: 08/04/2015
  • Est. Priority Date: 09/11/2009
  • Status: Active Grant
First Claim
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1. A gyroscope that detects angular velocity comprising:

  • a first structure including a first proof mass wherein the first proof mass oscillates in a driving direction, wherein a Coriolis force acts on the first proof mass in a sensing direction that is orthogonal to the driving direction when the gyroscope is rotated with an angular velocity about an input axis orthogonal to the driving and sensing directions;

    a spring system compliant in a first direction of motion, coupled to the first structure, the spring system comprising a first flexible element;

    a rigid element coupled to the first flexible element; and

    a second flexible element coupled to the rigid element, wherein the first flexible element and the second flexible element, each has a longitudinal axis parallel to the first direction of motion, wherein the first structure and spring system are disposed substantially in a plane;

    wherein when a force is applied to the spring system, the first and second flexible elements deflect and the rigid element rotates; and

    a transducer responsive to the Coriolis force acting on the first proof mass.

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