Method and system for high speed height control of a substrate surface within a wafer inspection system

• US 9,097,645 B2
• Filed: 08/19/2014
• Issued: 08/04/2015
• Est. Priority Date: 08/23/2013
• Status: Active Grant

• Current Assignee: KLA-Tencor Corporation (KLA Corporation)
• Original Assignee: KLA-Tencor Corporation (KLA Corporation)
• Inventors: Cai, Zhongping, Xiong, Jingyi
• Primary Examiner(s): NGUYEN, SANG H
• Application Number:
  US14/463,225
• Publication Number:
  US 20150055141A1
• Time in Patent Office: 350 Days
• Field of Search: 356614-625, 3562371-2375
• US Class Current: 1/1
• CPC Class Codes: G01B 11/14 for measuring distance or clearance between spaced objects or spaced apertures G01B11/26 takes precedence; rangefinders G01C3/00
• CPC Class Codes: G01N 2021/135 Sample holder displaceable
• CPC Class Codes: G01N 21/01 Arrangements or apparatus for facilitating the optical investigation
• CPC Class Codes: G01N 21/13 Moving of cuvettes or solid samples to or from the investigating station handling materials for automatic analysis G01N35/00
• CPC Class Codes: G01N 21/9501 Semiconductor wafers manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10
• CPC Class Codes: H01L 21/67288 Monitoring of warpage, curvature, damage, defects or the like

Abstract

High speed height control of a surface of a substrate within a wafer inspection system includes positioning a substrate on a substrate stage of a dynamically adjustable substrate stage assembly, actuating the substrate perpendicular to the surface of the substrate, measuring a height error value of the surface of the substrate at a position of inspection of the surface, measuring a displacement value perpendicular to the surface of the substrate at the location of the substrate stage assembly, generating a displacement target from the height error value and the displacement value, and adjusting an actuation state of the actuator using the measured height error value and the generated displacement target in order to maintain the substrate surface at an imaging plane of a detector of the inspection system or a focus of illumination of the inspection system.

Claims

1. A system for high speed height control of a surface of the substrate within a wafer inspection system comprising:

a dynamically actuatable substrate stage assembly including a substrate stage for securing a substrate;

an actuator configured to actuate the substrate along a direction substantially perpendicular to the surface of the substrate;

a height error detection system configured to measure height error of a surface of the substrate at a position of inspection of the surface;

a displacement sensor operably coupled to the substrate stage assembly and configured to measure a displacement substantially perpendicular to the surface of the substrate at the location of the substrate stage assembly;

a feedback control system communicatively coupled to the height error detection system and the actuator, wherein the feedback control system is configured to;

receive one or more height error measurements from the height error detection system; and

responsive to the measured one or more height error measurements, adjust an actuation state of the actuator in order to maintain the substrate surface substantially at an imaging plane of a detector of the inspection system or a focus of illumination of the inspection system; and

a feed forward control system communicatively coupled to the height error detection system and the actuator, wherein the feed forward control system is configured to;

receive one or more displacement measurements from the displacement sensor;

responsive to one or more displacement values from the one or more displacements measurements with the one or more height error values from the one or more height error measurements, generate one or more displacement targets; and

actuate the actuator using at least one of the one or more displacement targets in order to maintain the substrate surface substantially at an imaging plane of a detector of the inspection system or a focus of illumination of the inspection system.

2. The system of claim 1, wherein the substrate comprises:

a semiconductor wafer.

3. The system of claim 1, wherein the substrate stage assembly comprises:

a substrate stage platform; and

a substrate chuck configured to secure the substrate.

4. The system of claim 1, wherein the height error detection system comprises:

a light source configured to generate a light beam;

an optical sub-system configured to direct the light beam onto the surface of the substrate at substantially the position of inspection of the inspection system; and

a height error sensor configured to detect a position of the light beam reflected from the surface of the substrate, wherein a height error controller is configured to determine a height error value of the surface of the substrate based on the measured position of the light beam at the sensor and a height target.

5. The system of claim 4, wherein the light source comprises:

at least one of a narrowband light source and a broadband light source.

6. The system of claim 4, wherein the height error sensor comprises:

one or more optical bicell sensors.

7. The system of claim 4, wherein the height error controller comprises:

one or more processors; and

one or more memory for storing the height target of a position of the light beam reflected from the surface of the substrate and a set of program instructions, the program instructions configured to determine a height error value of the surface of the substrate based on the measured position of the light beam at the sensor and a height target.

8. The system of claim 1, wherein the actuator further comprises:

a voice coil driven actuator.

9. The system of claim 1, wherein the displacement sensor further comprises:

one or more Eddy current sensors.

10. The system of claim 1, wherein the feedback control system configured to adjust an actuation state of the actuator is further configured to:

adjust an actuation state of the actuator in order to control the at least one of the one or more height errors of the substrate surface at the position of inspection.

11. The system of claim 1, wherein the feed forward control system configured to combine the one or more displacements with the one or more height errors to generate one or more displacement targets is further configured to:

add the one or more displacements with the one or more height errors to generate one or more displacement targets.

12. The system of claim 1, wherein the inspection system comprises:

at least one of a brightfield inspection system and a darkfield inspection system.

13. A method for high speed height control of a surface of the substrate within a wafer inspection system comprising:

positioning a substrate on a substrate stage of a dynamically adjustable substrate stage assembly;

actuating the substrate along a direction substantially perpendicular to the surface of the substrate;

measuring one or more height error values of the surface of the substrate at a position of inspection of the surface using a height error detection system;

measuring one or more displacement values substantially perpendicular to the surface of the substrate at the location of the substrate stage assembly using a displacement sensor;

generating one or more displacement targets from the one or more height error values and one or more displacement values;

adjusting an actuation state of the actuator using the measured one or more height error values in order to maintain the substrate surface substantially at an imaging plane of a detector of the inspection system or a focus of illumination of the inspection system; and

adjusting an actuation state of the actuator using the generated one or more displacement targets in order to maintain the substrate surface substantially at an imaging plane of a detector of the inspection system or a focus of illumination of the inspection system.

14. A system for high speed height control of a surface of the substrate within a wafer inspection system comprising:

a dynamically actuatable substrate stage assembly including a substrate stage for securing a substrate;

an actuator configured to actuate the substrate along a direction substantially perpendicular to the surface of the substrate;

a height error detection system configured to measure height error of a surface of the substrate at a position of inspection of the surface;

a displacement sensor operably coupled to the substrate stage assembly and configured to measure a displacement substantially perpendicular to the surface of the substrate at the location of the substrate stage assembly;

a feedback control system communicatively coupled to the height error detection system and the actuator, wherein the feedback control system is configured to;

receive one or more height error measurements from the height error detection system; and

responsive to the measured one or more height error measurements, adjust an actuation state of the actuator in order to maintain the substrate surface substantially at an imaging plane of a detector of the inspection system or a focus of illumination of the inspection system;

a feed forward control system communicatively coupled to the height error detection system and the actuator, wherein the feed forward control system is configured to;

receive one or more displacement measurements from the displacement sensor;

responsive to one or more displacement values from the one or more displacements measurements with the one or more height error values from the one or more height error measurements, generate one or more displacement targets; and

actuate the actuator using at least one of the one or more displacement targets in order to maintain the substrate surface substantially at an imaging plane of a detector of the inspection system or a focus of illumination of the inspection system; and

a track unit communicatively coupled to the feed forward system and configured to acquire a displacement target from one or more previous displacement target measurements, wherein the acquired displacement target is used as the feed forward target in order to reduce an effective phase delay of the feed forward control system.

15. The system of claim 14, wherein the substrate comprises:

a semiconductor wafer.

16. The system of claim 14, wherein the substrate stage assembly comprises:

a substrate stage platform; and

a substrate chuck configured to secure the substrate.

17. The system of claim 14, wherein the height error detection system comprises:

a light source configured to generate a light beam;

an optical sub-system configured to direct the light beam onto the surface of the substrate at substantially the position of inspection of the inspection system; and

a height error sensor configured to detect a position of the light beam reflected from the surface of the substrate, wherein a height error controller is configured to determine a height error value of the surface of the substrate based on the measured position of the light beam at the sensor and a height target.

18. The system of claim 17, wherein the light source comprises:

at least one of a narrowband light source and a broadband light source.

19. The system of claim 17, wherein the height error sensor comprises:

one or more optical bicell sensors.

20. The system of claim 17, wherein the height error controller comprises:

one or more processors; and

one or more memory for storing the height target of a position of the light beam reflected from the surface of the substrate and a set of program instructions, wherein the program instructions are configured to determine a height error value of the surface of the substrate based on the measured position of the light beam at the sensor and a height target.

21. The system of claim 14, wherein the actuator further comprises:

a voice coil driven actuator.

22. The system of claim 14, wherein the Z stage displacement sensor further comprises:

one or more Eddy current sensors.

23. The system of claim 14, wherein the track unit comprises:

one or more processors; and

one or more memory for maintaining a set of program instructions, wherein the program instructions are configured to cause the one or more processors to;

acquire one or more previous displacement targets, the acquired one or more previous displacement targets being stored in the one or more memory; and

feed forward the acquired one or more previous displacement targets to control the actuator in order to reduce the effective phase delay of the feed forward.

24. The system of claim 14, wherein the feedback control system configured to adjust an actuation state of the actuator is further configured to:

adjust an actuation state of the actuator in order to control the at least one of the one or more height errors of the substrate surface at the position of inspection.

25. The system of claim 14, wherein the feed forward control system configured to combine the one or more displacements with the one or more height errors to generate one or more displacement targets is further configured to:

add the one or more displacements with the one or more height errors to generate one or more displacement targets.

26. The system of claim 14, wherein the inspection system comprises:

at least one of a brightfield inspection system and a darkfield inspection system.

27. A method for high speed height control of a surface of the substrate within a wafer inspection system comprising:

positioning a substrate on a substrate stage of a dynamically adjustable substrate stage assembly;

actuating the substrate along a direction substantially perpendicular to the surface of the substrate;

measuring one or more height error values of the surface of the substrate at a position of inspection of the surface using a height error detection system;

measuring one or more displacement values substantially perpendicular to the surface of the substrate at the location of the substrate stage assembly using a displacement sensor;

generating one or more displacement targets from the one or more displacement targets of the one or more previous tracks;

adjusting an actuation state of the actuator using the measured one or more height error values in order to maintain the substrate surface substantially at an imaging plane of a detector of the inspection system or a focus of illumination of the inspection system; and

adjusting an actuation state of the actuator using the generated one or more displacement targets in order to maintain the substrate surface substantially at an imaging plane of a detector of the inspection system or a focus of illumination of the inspection system.