Micromechanical component and method for manufacturing a micromechanical component
First Claim
Patent Images
1. A micromechanical component, comprising:
- a substrate;
a seismic weight joined to the substrate at a first suspension mount;
at least one first electrode for measuring a motion of the seismic weight in a first direction, the first electrode being joined to the substrate at a second suspension mount; and
at least one second electrode for measuring a motion of the seismic weight in a second direction different from the first direction, the second electrode being joined to the substrate at a third suspension mount;
wherein the first electrode is set apart from the second suspension mount and mechanically connected to the second suspension mount with the aid of a support arm; and
wherein a distance between the first electrode and the second suspension mount is greater than a distance between the first suspension mount and the second suspension mount.
1 Assignment
0 Petitions
Accused Products
Abstract
A micromechanical component includes: a substrate; a seismic weight joined to the substrate at a first suspension mount; at least one first electrode for measuring a motion of the seismic weight in a first direction, the first electrode being joined to the substrate at a second suspension mount; and at least one second electrode for measuring a motion of the seismic weight in a second direction different from the first direction, the second electrode being joined to the substrate at a third suspension mount. The first electrode is mechanically connected to the second suspension mount with the aid of a support arm and set apart from the second suspension mount.
-
Citations
11 Claims
-
1. A micromechanical component, comprising:
-
a substrate; a seismic weight joined to the substrate at a first suspension mount; at least one first electrode for measuring a motion of the seismic weight in a first direction, the first electrode being joined to the substrate at a second suspension mount; and at least one second electrode for measuring a motion of the seismic weight in a second direction different from the first direction, the second electrode being joined to the substrate at a third suspension mount; wherein the first electrode is set apart from the second suspension mount and mechanically connected to the second suspension mount with the aid of a support arm; and wherein a distance between the first electrode and the second suspension mount is greater than a distance between the first suspension mount and the second suspension mount. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
-
-
11. A method for manufacturing a micromechanical component, comprising:
-
producing a seismic weight on a substrate, the seismic weight being joined to the substrate by a first suspension mount; producing at least one first electrode for measuring a motion of the seismic weight in a first direction, the first electrode being joined to the substrate at a second suspension mount; and producing at least one second electrode for measuring a motion of the seismic weight in a second direction different from the first direction, the second electrode being joined to the substrate at a third suspension mount; wherein the first electrode is mechanically connected to the second suspension mount by a support arm, so that the first electrode is set apart from the second suspension mount; and wherein a distance between the first electrode and the second suspension mount is greater than a distance between the first suspension mount and the second suspension mount.
-
Specification