System and method for compensating instability in an autofocus system

• US 9,097,851 B2
• Filed: 02/18/2014
• Issued: 08/04/2015
• Est. Priority Date: 03/31/2009
• Status: Active Grant

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Goodwin, Eric Peter, Smith, Daniel Gene, Sogard, Michael
• Primary Examiner(s): LEE, JOHN R
• Application Number:
  US14/182,504
• Publication Number:
  US 20140233011A1
• Time in Patent Office: 532 Days
• Field of Search: 250/201.2, 250/201.4, 250/546, 250/559.38, 250/559.29, 356/614, 356/498, 356/500, 359/629, 359/698, 355/53, 355/55, 355/56, 355/508, 355/509
• US Class Current: 1/1
• CPC Class Codes: G01B 11/02 for measuring length, width or thickness G01B11/08 takes precedence
• CPC Class Codes: G02B 27/40 Optical focusing aids
• CPC Class Codes: G02B 7/28 Systems for automatic generation of focusing signals

Abstract

An autofocus system and method designed to account for instabilities in the system, e.g. due to instabilities of system components (e.g. vibrating mirrors, optics, etc) and/or environmental effects such as refractive index changes of air due to temperature, atmospheric pressure, or humidity gradients, is provided. An autofocus beam is split into a reference beam component (the split off reference channel) and a measurement beam component, by a beam splitting optic located a predetermined distance from (and in predetermined orientation relative to) the substrate, to create a first space between the beam splitting optic and the substrate. A reflector is provided that is spaced from the beam splitting optic by the predetermined distance, to create a second space between the reflector and the beam splitting optic. The measurement beam component is directed at the substrate and a reflected measurement beam component through the first space between the substrate and the beam splitting optic, while the reference beam component is directed at the reflector and a reflected reference beam component is directed from the reflector through the second space between the beam splitting optic and the reflector. The reflected reference and measurement beam components are returned to the beam splitting optic, and emerge substantially collinear from the beam splitting optic. The reference and measurement beam components are then detected, and provide information that enables compensation for changes in the z position of the substrate that are due to instabilities in the autofocus system components and/or environmental factors.

Claims

1. A method for compensating instability in an optical autofocus system, which optical autofocus system uses light directed at and reflected from a substrate to determine changes in a height position of the substrate, the method comprising:

a. deflecting a reference beam component of said light by a beam-deflecting optic located a predetermined distance from the substrate to form a deflected reference beam, said predetermined distance defining a first space;

b. providing a reflector, spaced from the beam-deflecting optic by said predetermined distance, to define a second space between the reflector and the beam-deflecting optic;

c. directing a measurement beam component of said light at the substrate to form a reflected measurement beam that is directed from the substrate through the first space between the substrate and the beam-deflecting optic, while directing the deflected reference beam at the reflector to form a reflected reference beam that is directed from the reflector through the second space;

d. returning the reflected reference beam and the reflected measurement beam such that the reference beam and the reflected measurement beam emerge substantially collinearly from the beam-deflecting optic;

e. detecting the reflected reference beam and the reflected measurement beam and producing from said beams information enabling compensation for changes in the height position of the substrate, said changes defined by instabilities in at least one of the optical autofocus system and environmental factors; and

f. propagating the deflected reference beam formed by the beam-deflecting optic and the reflected reference beam formed by the reflector along a first plane, which first plane crosses a second plane, said second plane defined by the measurement beam component incident onto the substrate and the reflected measurement beam formed at the substrate.

2. The method of claim 1, wherein the providing a reflector includes providing a reflector, position and orientation of which relative to the beam-deflecting optic are maintained substantially fixed.

3. The method of claim 1, wherein the optical autofocus system is of the slit detection type,

wherein light reflected from the substrate is passed through a slit before impinging on a slit detector, and

wherein said detecting the reflected reference beam and the reflected measurement beam comprises directing the reflected reference beam and the reflected measurement beam through a beam splitter disposed between the slit and detectors that respectively correspond to the reflected reference beam and the reflected measurement beam.

4. The method of claim 1, wherein the substrate is moveable in a first direction and said providing a reflector includes providing the reflector that has a reflective surface in a plane oriented substantially transversely to the first direction.

5. The method of claim 1, wherein the substrate is moveable in a first direction and said providing a reflector includes providing the reflector that has a reflective surface in a plane oriented substantially parallel to the first direction.

6. The method of claim 5, wherein said deflecting a reference beam includes deflecting a reference bean with the beam-deflecting optic that comprises a pair of adjacent 30-60-90 degree prisms with respective sides that are adjacent to and offset from each other in a direction transverse to the first direction.

7. The method of claim 1, wherein the first and second spaces between the substrate and the beam-deflecting optic and between the reflector and the beam-deflecting optic are non-common, and further comprising adjusting for index differences in said non-common first and second spaces.

8. The method of claim 7, wherein said adjusting for index differences comprises directing a dedicated air supply to the non-common first and second spaces.

9. The method of claim 1, wherein the first and second spaces are non-common, and further comprising adjusting for index gradients in said non-common first and second spaces.

10. The method of claim 9,

wherein the optical autofocus system is of a slit detection type,

wherein light reflected from the substrate is passed through a slit before impinging on a slit detector,

wherein the reference and measurement beams are detected by means of respective detection slits, and

wherein said adjusting for index gradients in said non-common first and second spaces includes changing orientations of respective detection slits of said system.

11. The method of claim 10, further including adjusting for changes in index gradients with time in said non-common first and second spaces.

12. The method of claim 11, wherein said adjusting for changes in index gradients with time comprises adjusting sizes of the respective detection slits for the reflected measurement beam and the reflected reference beam.

13. The method of claim 1, further including adjusting for changes in index gradients with time in the first and second spaces, said first and second spaces being non-common.

14. The method of claim 13,

wherein the optical autofocus system is of a slit detection type,

wherein light reflected from the substrate is passed through a slit before impinging on a slit detector, and

wherein said adjusting for changes in index gradients with time includes adjusting sizes of respective detection slits of said system for the reflected measurement and reference beams.

15. An optical autofocus system that uses light directed at and reflected from a substrate to determine changes in a height position of the substrate, said system comprising:

a beam-deflecting optic located at a predetermined distance from the substrate, said predetermined distance creating a first space between the beam-deflecting optic and the substrate;

a reflector spaced from the beam-deflecting optic by the predetermined distance and creating a second space between the beam-deflecting optic and the reflector,

wherein the beam-deflecting optic is configured to deflect a reference beam component of said light to the reflector to form a deflected reference beam, propagating towards the reflector such that

a) the deflected reference beam and a reflected reference beam, formed in reflection of said deflected reference beam from the reflector, propagate along a first plane, and wherein

b) a measurement beam component of said light incident at the substrate and a reflected measurement beam, formed in reflection of said measurement beam component from the substrate propagate along a second plane,

said second plane intersecting the first plane;

detectors that respectively detect light from the reflected reference beam and the reflected measurement beam;

and

a processing device configured to generate, from so detected light, data based on which said system is configured to compensate for changes in the height position of the substrate, said changes defined by instabilities in at least one of system components and environmental factors.

16. The optical autofocus system of claim 15, wherein position and orientation of the reflector relative to the beam-deflecting optic are maintained substantially fixed.

17. The optical autofocus system of claim 15,

wherein the optical autofocus system is of a slit detection type configured such that light reflected from the substrate is passed through a slit before impinging on said detectors, and

further comprising a beam splitter positioned between the split and said detectors.

18. The optical autofocus system of claim 15, wherein the substrate is moveable in a first direction and the reflector has a reflective surface in a plane oriented substantially transversely to the first direction.

19. The optical autofocus system of claim 15, wherein the substrate is moveable in a first direction and the reflector has a reflective surface in a plane oriented substantially parallel to the first direction.

20. The optical autofocus system of claim 19, wherein the beam-deflecting optic comprises a pair of adjacent 30-60-90 degree prisms with respective sides that are adjacent to and offset from each other in a direction transverse to the first direction.

21. The optical autofocus system of claim 15, wherein the first and second spaces are non-common, and further including one or more fluid conduits provided for directing a dedicated air supply to said non-common first and second spaces to minimize index differences in said non-common first and second spaces.

22. The optical autofocus system of claim 21,

wherein the optical autofocus system is of a slit detection type configured to pass light reflected from the substrate through a slit before impinging said light on a detector from said detectors,

wherein detection slits are oriented such as to reduce sensitivity to index gradients in the non-common first and second air spaces.

23. The optical autofocus system of claim 22, wherein sizes of the detection slits are adjustable to compensate for changes in the index gradients with time in the non-common first and second spaces.

24. The optical autofocus system of claim 15,

wherein the optical autofocus system is of a slit detection type,

wherein the first and second air spaces are non-common,

said system configured to pass light reflected from the substrate through a slit before impinging said light on a detector from said detectors,

and further comprising detection slits respectively corresponding to the measurement and reference beams, sizes of said detection slits being adjustable to compensate for changes in index gradients with time in the non-common first and second spaces.