Optical deflector including narrow piezoelectric sensor element between torsion bar and piezoelectric actuator
First Claim
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1. An optical deflector comprising:
- a mirror;
a first support frame surrounding said mirror;
a first torsion bar arranged along a first axis of said mirror, a first end of said first torsion bar being coupled to an outer circumference of said mirror;
a pair of first piezoelectric actuators arranged between said first support frame and said first torsion bar; and
a first piezoelectric sensor inserted between said first torsion bar and one of said first piezoelectric actuators,wherein said first piezoelectric sensor includes at least one first piezoelectric sensor element having a width smaller than two-fifths of a width of the one of said first piezoelectric actuators and being arranged at a wide portion within two-fifths of said width from an inner end of the one of said first piezoelectric actuators, andwherein said first piezoelectric sensor element is directly adjacent to said first torsion bar.
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Abstract
In an optical deflector including a mirror, a support frame surrounding the mirror, at least one torsion bar arranged along an axis of the mirror having an end coupled to an outer circumference of the mirror, a pair of piezoelectric actuators arranged between the support frame and the torsion bar, and a piezoelectric sensor inserted between the torsion bar and one of the piezoelectric actuators, the piezoelectric sensor includes at least one piezoelectric sensor element having a width being smaller than two-fifths of a width of the one of the piezoelectric actuators and being arranged at a wide portion within two-fifths of the width from an inner end of the one of the piezoelectric actuators.
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Citations
18 Claims
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1. An optical deflector comprising:
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a mirror; a first support frame surrounding said mirror; a first torsion bar arranged along a first axis of said mirror, a first end of said first torsion bar being coupled to an outer circumference of said mirror; a pair of first piezoelectric actuators arranged between said first support frame and said first torsion bar; and a first piezoelectric sensor inserted between said first torsion bar and one of said first piezoelectric actuators, wherein said first piezoelectric sensor includes at least one first piezoelectric sensor element having a width smaller than two-fifths of a width of the one of said first piezoelectric actuators and being arranged at a wide portion within two-fifths of said width from an inner end of the one of said first piezoelectric actuators, and wherein said first piezoelectric sensor element is directly adjacent to said first torsion bar. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification