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Optical deflector including narrow piezoelectric sensor element between torsion bar and piezoelectric actuator

  • US 9,097,897 B2
  • Filed: 09/10/2013
  • Issued: 08/04/2015
  • Est. Priority Date: 09/11/2012
  • Status: Active Grant
First Claim
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1. An optical deflector comprising:

  • a mirror;

    a first support frame surrounding said mirror;

    a first torsion bar arranged along a first axis of said mirror, a first end of said first torsion bar being coupled to an outer circumference of said mirror;

    a pair of first piezoelectric actuators arranged between said first support frame and said first torsion bar; and

    a first piezoelectric sensor inserted between said first torsion bar and one of said first piezoelectric actuators,wherein said first piezoelectric sensor includes at least one first piezoelectric sensor element having a width smaller than two-fifths of a width of the one of said first piezoelectric actuators and being arranged at a wide portion within two-fifths of said width from an inner end of the one of said first piezoelectric actuators, andwherein said first piezoelectric sensor element is directly adjacent to said first torsion bar.

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