Variable capacitor tuned using laser micromachining

• US 9,099,248 B2
• Filed: 06/27/2008
• Issued: 08/04/2015
• Est. Priority Date: 06/29/2007
• Status: Active Grant

• Current Assignee: Corporation for National Research Initiatives
• Original Assignee: Corporation for National Research Initiatives
• Inventors: Huff, Michael A., Ozgur, Mehmet
• Primary Examiner(s): Wagner, Jenny L
• Assistant Examiner(s): McFadden, Michael P
• Application Number:
  US12/216,006
• Publication Number:
  US 20090002914A1
• Time in Patent Office: 2,594 Days
• Field of Search: 361/281
• US Class Current: 1/1
• CPC Class Codes: H01G 5/145 with profiled electrodes
• CPC Class Codes: H01L 28/60 Electrodes

Abstract

A variable capacitor device is disclosed in which the capacitive tuning ratio and quality factor are increased to very high levels, and in which the capacitance value of the device is tuned and held to a desired value with a high level of accuracy and precision using a laser micromachining tuning process on suitably designed and fabricated capacitor devices. The tuning of the variable capacitor devices can be performed open-loop or closed-loop, depending on the precision of the eventual capacitor value needed or desired. Furthermore, the tuning to a pre-determined value can be performed before the variable capacitor device is connected to a circuit, or alternatively, the tuning to a desired value can be performed after the variable capacitor device has been connected into a circuit.

Claims

1. A variable capacitor fabricated on a substrate, the capacitor comprising:

a first plate fabricated on the substrate,

a dielectric fabricated on the first plate,

a second plate fabricated on the dielectric so that the dielectric is located between the first and second plates,

the second plate including a plurality of subparts, each of the plurality of subparts including a first end and a second end and being connected to each subpart adjacent to the subpart at the first and second ends by a corresponding pair of first and second trimmable connections located, respectively, at the first and second ends of the subpart, such that the plurality of subparts are connected together by a plurality of corresponding pairs of first and second trimmable connections forming electrical connections between the plurality of subparts,

each of the plurality of subparts having corresponding predefined dimensions so as to provide a tuning range for the capacitor'"'"'s capacitance value, the capacitor'"'"'s capacitance value being tuned to a predetermined value by at least one of the corresponding pairs of first and second trimmable electrical connections being trimmed from the capacitor, so as to trim at least one subpart from the capacitor by electrically separating the at least one subpart from the other subparts included in the second plate.

2. The capacitor of claim 1, wherein each of the subparts has predefined dimensions that are comparable to each of the other subparts'"'"' dimensions so that the capacitive value of the capacitor will be changed by a single predefined amount for each subsection that is trimmed from the capacitor.

3. The capacitor of claim 1, wherein each of the subparts has predefined dimensions that are comparable to at least some of the other subparts'"'"' dimensions and that vary from at least others of the other subparts'"'"' dimensions so that the capacitive value of the capacitor will be changed by a variable amount, depending on the particular subsections trimmed and the number of subsections trimmed from the capacitor.

4. The capacitor of claim 2, wherein each of the subparts changes the capacitive value of the capacitor by a predetermined amount, depending on whether the subpart is trimmed or not trimmed from the second plate, and wherein the number of subparts is such that the capacitor is tunable over a range of capacitive values.

5. The capacitor of claim 4, wherein the predetermined amount by which each of the subparts changes the capacitive value of the capacitor and the number of subparts are such that the capacitor has a tuning ratio of at least 100.

6. The capacitor of claim 4, wherein the predetermined amount by which each of the subparts changes the capacitive value of the capacitor and the number of subparts are such that the capacitor has a tuning ratio of at least 10.

7. The capacitor of claim 1, wherein the first and second plates and the dielectric are made from thin film depositions using photolithographic processes, and wherein the second plate has a shape that facilitates trimming of at least the second plate by a laser micromachining tool to tune the capacitance value of the capacitor to a predefined amount.

8. The capacitor of claim 1, wherein the substrate is made from a material that is either a solid bulk substrate material or comprised of a stack of layers of substrate material.

9. The capacitor of claim 8, wherein the substrate is made from an insulating material selected from the group consisting of ceramics, low-temperature co-fired ceramic, alumina, sapphire, glass, polystyrene, polycarbonate, and PMMA plastics and polytetrafluoroethylene.

10. The capacitor of claim 8, wherein the substrate is made from a semi-insulating material selected from the group consisting of GaAs, high-resistivity silicon, polysilicon, SiC, GaN, and diamond-like Carbon.

11. The capacitor of claim 8, wherein the substrate is made from a material selected from the group consisting of polyflon, beryllia, sapphire, aluminum nitride, lithium niobate (LiNbO₃), random and woven fiber reinforced glass substrates, polymers, and laminates.

12. The capacitor of claim 1, wherein the capacitor further comprises first and second electrodes connected, respectively, to the first and second plates.

13. The capacitor of claim 12, wherein the first and second electrodes are made from a highly conductive metal deposited onto the substrate by sputtering or evaporation.

14. The capacitor of claim 13, wherein the highly conductive metal from which the first and second electrodes are made is selected from the group consisting of gold, copper and silver.

15. The capacitor of claim 1, wherein the dielectric is made from an insulator material selected from the group consisting of silicon dioxide, silicon nitride, hafnium oxide, alumina and zirconium oxide, strontium oxide, titanium oxide, barium titanate, Barium strontium titanium oxide (“

BSTO”

), PZT, dielectric forms of carbon nanotubes.

16. The capacitor of claim 1, wherein the dielectric is made from an insulator material deposited on the substrate using a deposition process selected from the group consisting of chemical vapor deposition and atomic layer deposition.

17. The capacitor of claim 1, wherein one of the plurality of subparts is comprised of a plurality of further subparts that are smaller in dimensions than each of the plurality of subparts, each of the plurality of further subparts being connected to each further subpart adjacent to the further subpart by a further trimmable connection that is different from the corresponding pairs of first and second trimmable connections and that is also part of the one subpart comprised of the plurality of further subparts.

18. The capacitor of claim 1, wherein the first plate is fabricated directly on the substrate as a single, continuous thin film of a conductive material deposited on the substrate.

19. The capacitor of claim 1, wherein the first plate is fabricated on the substrate as a plurality of discrete dis-continuous thin film subparts deposited on the substrate and connected by a plurality of trimmable connections.