Method and apparatus for determining a property of a surface

• US 9,103,651 B2
• Filed: 06/14/2013
• Issued: 08/11/2015
• Est. Priority Date: 06/18/2012
• Status: Active Grant

• Current Assignee: Mitutoyo Corporation
• Original Assignee: Mitutoyo Corporation
• Inventors: Quaedackers, Johannes Anna, Haitjema, Han
• Primary Examiner(s): Lyons, Michael A
• Application Number:
  US13/918,134
• Publication Number:
  US 20130335747A1
• Time in Patent Office: 788 Days
• US Class Current: 1/1
• CPC Class Codes: G01B 11/0675 using interferometry
• CPC Class Codes: G01B 9/02087 Combining two or more images of the same region
• CPC Class Codes: G01B 9/02088 Matching signals with a database
• CPC Class Codes: G01B 9/0209 Low-coherence interferometers
• CPC Class Codes: G01N 2021/4126 Index of thin films
• CPC Class Codes: G01N 21/45 using interferometric methods; using Schlieren methods

Abstract

Method of determining a property of a sample from a correlogram obtainable by scanning of a surface of the sample through a focal plane of an objective using broad-band interferometry is provided. The correlogram may be displaying interference radiation intensity as a function of the scanning distance from the surface. The correlogram may be correlated with a secondary correlogram to obtain a cross correlogram or with the same correlogram to obtain an autocorrelogram. A property of the sample may be determined from the auto or cross correlogram.

Claims

1. A method for determining a property of a sample from a correlogram obtainable by scanning of a surface of the sample through a focal plane of an objective lens while applying broad-band interferometry, the sample including a film transparent for the broadband radiation used in the broad-band interferometry, the method comprising:

receiving a correlogram having interference radiation intensity as a function of a scanning distance from the surface of the sample to the focal plane of the objective lens;

autocorrelating the received correlogram with itself to calculate an autocorrelogram as a cross correlogram; and

determining the property of the sample from the autocorrelogram,

wherein the interference radiation intensity measures intensity of interference between a reference illumination beam and a measurement illumination beam.

2. The method according to claim 1, wherein the determining the property of the sample comprises determining a thickness of the film from the autocorrelogram.

3. The method according to claim 2, wherein the film has a thickness determined in accordance with the determining a thickness, the method further comprising:

calculating a calibration correlogram on the basis of the determined thickness of the film and a known calibration property of the sample;

correlating the received correlogram with the calibration correlogram to obtain a calibrated cross correlogram; and

using the calibrated cross correlogram and the known calibration property to determine another property of the sample.

4. The method according to claim 2, wherein the film has a thickness determined in accordance with the determining a thickness, the method further comprising:

storing a plurality of calibration correlograms as a function of a plurality of determined thicknesses of the film and a known calibration property;

selecting a calibration correlogram from the memory on the basis of the determined thickness of the thin film;

correlating the received correlogram with the calibration correlogram to calculate a calibrated cross correlogram; and

using the calibrated cross correlogram and the known calibration property to determine another property of the sample.

5. The method according to claim 1, wherein the determining the property of the sample comprises determining a refractive index of the film from the autocorrelogram.

6. The method according to claim 1, further comprising fitting a physical model to the autocorrelogram.

7. The method according to claim 1, further comprising:

storing a plurality of reference autocorrelograms with their corresponding properties in a memory to provide a lookup table;

iteratively comparing the calculated autocorrelogram with the reference autocorrelograms from the lookup table to find a target reference autocorrelogram which fits the calculated autocorrelogram the best among the reference autocorrelograms stored in the memory; and

determining the property of the sample based on a property of the target reference autocorrelogram.

8. The method according to claim 7, further comprising:

storing a portion of each of the reference autocorrelograms in the lookup table; and

comparing a same portion of the calculated autocorrelogram with each of the stored portions of the reference autocorrelograms from the lookup table to find the target reference autocorrelogram.

9. The method according to claim 7, further comprising:

scanning a reference surface of a reference sample with a known property through a focal plane of an objective lens while applying broad-band interferometry;

receiving a reference correlogram displaying interference radiation intensity as a function of the scanning distance from the reference surface of the reference sample to the focal plane of the objective lens;

autocorrelating the received reference correlogram with itself to calculate a reference autocorrelogram;

storing the reference autocorrelogram with its known property as a related property in a memory to provide the lookup table; and

repeating each of the above for a plurality of reference surfaces of reference samples with different known properties so as to store a plurality of reference autocorrelograms in the lookup table with their known properties.

10. The method according to claim 7, further comprising:

calculating a reference autocorrelogram as function of a known property;

storing the reference autocorrelogram with its known property in a memory to provide the lookup table; and

repeating the calculating and the storing for a plurality of known properties so as to store a plurality of reference autocorrelograms in the lookup table with their known properties.

11. The method according to claim 1, further comprising:

calculating a calibration correlogram with the determined property of the sample and a known calibration property of the sample;

correlating the received correlogram with the calculated calibration correlogram to calculate a calibrated cross correlogram; and

using the calibrated cross correlogram and the known calibration property to determine another property of the sample.

12. The method according to claim 11, further comprising using a shift of the received correlogram with respect to the calibrated cross correlogram to determine the another property from the calibrated cross correlogram.

13. The method according to claim 1, further comprising estimating the point of the cross correlogram where an amplitude of the cross correlogram is at its maximum by:

subjecting the cross correlogram to a Fourier transform; and

fitting a slope of a phase of the Fourier transform to the cross correlogram.

14. The method according to claim 13, wherein the estimating the point of the cross correlogram where an amplitude of the cross correlogram is at its maximum comprises:

subjecting the cross correlogram to a Fourier transform to produce a signal;

subjecting the Fourier transformed signal to a filter;

subjecting the filtered signal to an inverse Fourier transform; and

calculating the location of the center of mass or maximum using the absolute value of the inverse Fourier transformed signal.

15. The method according to claim 14, wherein the estimating the point of the cross correlogram where an amplitude of the cross correlogram is at its maximum further comprises calculating the location of the phase zero crossing of the inverse Fourier transformed signal nearest to the location of the centre of mass or maximum of the inverse Fourier transformed signal.

16. The method according to claim 1, wherein the autocorrelogram is calculated independent of a height of the sample.

17. The method according to claim 1, wherein only one surface among a plurality of surfaces of the sample is scanned.

18. A system for determining a property of a sample comprising a film, the system comprising:

a broadband illuminator configured to provide a broadband illumination beam to a surface of the sample;

a beam splitter configured to split the illumination beam in a reference beam for reflection on a reference reflector and a measurement beam for reflection on the surface of the sample;

a detector configured to receive an interference signal created between the reference beam reflected from the reference reflector and the reflected measurement beam from the surface of the sample;

a scanner configured to scan the surface of the sample;

a processor configured to receive a signal representing the interference signal received on the detector from the detector and a distance signal from the scanner, and further configured to combine the interference signal and the distance signal into a received correlogram displaying an interference radiation intensity as a function of a scanning distance from the surface; and

an auto correlator configured to correlate the received correlogram with itself to calculate an autocorrelogram,

wherein the processor is configured to determine a property of the sample from the autocorrelogram, and

wherein the interference radiation intensity measures intensity of interference between the reference beam and the measurement beam.