Capacitive pressure sensor with intrinsic temperature compensation
First Claim
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1. A pressure sensor, comprising:
- a probe body;
a capacitive sensor disposed at a distal end of the probe body, the capacitive sensor producing a sensing capacitance;
a shunt capacitance; and
wherein a change in the sensing capacitance resulting from a change in temperature is intrinsically offset by a corresponding change in the shunt capacitance.
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Abstract
Pressure sensors and their methods of use are described. In one embodiment, a pressure sensor includes a probe body and a capacitive sensor disposed at a distal end of the probe body. The capacitive sensor produces a sensing capacitance. The pressure sensor also includes a shunt capacitance. In the described pressure sensor, a change in the sensing capacitance due to dimensional changes associated with a temperature change is offset by a corresponding change in the shunt capacitance.
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Citations
20 Claims
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1. A pressure sensor, comprising:
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a probe body; a capacitive sensor disposed at a distal end of the probe body, the capacitive sensor producing a sensing capacitance; a shunt capacitance; and wherein a change in the sensing capacitance resulting from a change in temperature is intrinsically offset by a corresponding change in the shunt capacitance. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method of making a pressure sensor, comprising:
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arranging a pressure deflectable diaphragm cap having a first capacitive surface on a probe body; electrically coupling the first capacitive surface to the probe body; selecting a material having a desired dielectric constant and forming a non-deformable component from the material; forming a second capacitive surface on a portion of the non-deformable component; connecting a lead to the second capacitive surface and positioning the non-deformable component within the probe body wherein a shunt capacitance is defined between the lead and the probe body; and arranging the non-deformable component relative to the pressure deflectable diaphragm cap by spacing the second capacitive surface away from the first capacitive surface such that the first and second surfaces define a capacitive sensor having a sensing capacitance, wherein a change in the sensing capacitance resulting from a change in temperature is offset by a corresponding change in the shunt capacitance. - View Dependent Claims (18, 19, 20)
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Specification