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Micromechanical sensor with multiple spring bars

  • US 9,103,850 B2
  • Filed: 04/27/2010
  • Issued: 08/11/2015
  • Est. Priority Date: 04/28/2009
  • Status: Active Grant
First Claim
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1. A micromechanical sensor, comprising:

  • a substrate;

    an anchor coupled to the substrate;

    a bending spring device responsive to a rotational movement about the anchor, the bending spring device comprising spring bars that extend substantially parallel from the anchor to one or more masses, wherein each spring bar comprises;

    a first end being coupled to the anchor; and

    a second end being coupled to the one or more masses; and

    a meander located between the first and the second end, wherein a total length of at least one spring bar is greater than a length of bars of the meander so as to improve a linear spring characteristic of the bending spring device.

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