Organic light-emitting display device and method of manufacturing the same

• US 9,105,864 B2
• Filed: 03/15/2013
• Issued: 08/11/2015
• Est. Priority Date: 10/09/2012
• Status: Active Grant

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Inventors: Choi, Chaun-Gi
• Primary Examiner(s): Loke, Steven
• Assistant Examiner(s): MAZUMDER, DIDARUL A
• Application Number:
  US13/833,818
• Publication Number:
  US 20140097411A1
• Time in Patent Office: 879 Days
• Field of Search: 257/40, 257/57, 257/59, 257/66, 257/72, 257/347, 257/350, 257/351, 257/532, 438/34, 438/23, 438/149, 438/157
• US Class Current: 1/1
• CPC Class Codes: H01L 27/1225 with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
• CPC Class Codes: H01L 27/1255 integrated with passive devices, e.g. auxiliary capacitors
• CPC Class Codes: H10K 50/805 Electrodes
• CPC Class Codes: H10K 59/1201 Manufacture or treatment
• CPC Class Codes: H10K 59/1213 the pixel elements being TFTs
• CPC Class Codes: H10K 59/1216 the pixel elements being capacitors
• CPC Class Codes: H10K 59/1315 comprising structures specially adapted for lowering the resistance

Abstract

An organic light-emitting display device may include a plurality of scan lines, a plurality of data lines, and a plurality of pixels located at an intersection region of the scan line and the data line, wherein the organic light-emitting display device includes a thin film transistor including a gate electrode on a different layer than a scan line, an active layer on the gate electrode, and source and drain electrodes that are in contact with source and drain regions of the active layer, and a capacitor including a first capacitor electrode on the same layer as the scan line, a second capacitor electrode on the gate electrode, and a third electrode on the same layer as the source and drain electrodes.

Claims

1. An organic light-emitting display device including a plurality of scan lines and a plurality of data lines, and a plurality of pixels each located at an intersection region of the scan line and the data line, wherein the organic light-emitting display device comprises:

a thin film transistor including a gate electrode on a different layer than a scan line, an active layer on the gate electrode, and source and drain electrodes in contact with source and drain regions of the active layer; and

a capacitor including;

a first capacitor electrode on a same layer as the scan line, the first capacitor electrode below both the gate electrode and the active layer,

a second capacitor electrode overlapping and on the first capacitor electrode,

a first insulating layer between the first capacitor electrode and the second capacitor electrode, the gate electrode and the second capacitor electrode on the first insulating layer,

a third capacitor electrode on a same layer as the source and drain electrodes,

a second insulating layer on the gate electrode and the second capacitor electrode and between the second capacitor electrode and the third capacitor electrode, and

a third insulating layer between the second capacitor electrode and the third capacitor electrode.

2. The organic light-emitting display device of claim 1, wherein the active layer is formed of an oxide semiconductor.

3. The organic light-emitting display device of claim 1, wherein a thickness of the gate electrode is thinner than a thickness of the scan line.

4. The organic light-emitting display device of claim 1, wherein the scan line is a low resistance wire.

5. The organic light-emitting display device of claim 1, wherein the capacitor further comprises a fourth capacitor electrode on the third capacitor electrode.

6. The organic light-emitting display device of claim 5, further comprising a pixel electrode on one of the source and drain electrodes, wherein the pixel electrode is disposed on an upper suface of the one of the source and drain electrodes and on a same layer as the fourth capacitor electrode.

7. The organic light-emitting display device of claim 5, further comprising:

a fourth insulating layer between the third capacitor electrode and the fourth capacitor electrode.

8. The organic light-emitting display device of claim 1, further comprising a pixel electrode on the same layer as the gate electrode and the second capacitor electrode.

9. The organic light-emitting display device of claim 1, wherein the scan line and the gate electrode are electrically connected through contact holes formed in an insulating layer between the scan line and the gate electrode.

10. A method of manufacturing an organic light-emitting display device, the method comprising:

forming a first capacitor electrode on a same layer as a scan line;

forming a first insulating layer on the first capacitor electrode;

forming a gate electrode and a second capacitor electrode on the first insulating layer, the second capacitor electrode overlapping and on the first capacitor electrode;

forming a second insulating layer on the gate electrode and the second capacitor electrode;

forming an active layer that overlaps the gate electrode on the second insulating layer, the first capacitor electrode below both the gate electrode and the active layer;

forming a third insulating layer on the active layer, the third insulating layer including openings which expose a part of source and drain regions of the active layer; and

forming a third capacitor electrode and source and drain electrodes on the third insulating layer, the source and drain electrodes being in contact with the source and drain regions through the openings.

11. The method of claim 10, wherein the active layer is formed of an oxide semiconductor.

12. The method of claim 10, wherein a thickness of the gate electrode is thinner than a thickness of the scan line.

13. The method of claim 10, wherein the scan line is a low resistance wire.

14. The method of claim 10, further comprising:

forming a fourth insulating layer on the source and drain electrodes; and

forming a fourth capacitor electrode on the fourth insulating layer.

15. The method of claim 14, further comprising forming a pixel electrode on a same layer as the fourth capacitor electrode.

16. The method of claim 15, further comprising forming a fifth insulating layer, which has an opening that exposes a part of the pixel electrode, on the pixel electrode and the fourth capacitor electrode.

17. The method of claim 10, further comprising forming a pixel electrode on a same layer as the gate electrode and the second capacitor electrode.

18. The method of claim 17, further comprising forming a fourth insulating layer on the pixel electrode, the third insulating layer, the third capacitor electrode, and the source and drain electrodes, wherein the fourth insulating layer has an opening that exposes a part of the pixel electrode.

19. The method of claim 10, further comprising forming an electrode pattern that electrically connects the scan line and the gate electrode through contact holes formed in an insulating layer between the scan line and the gate electrode.