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Ultrasensitive biosensors

  • US 9,109,251 B2
  • Filed: 01/03/2013
  • Issued: 08/18/2015
  • Est. Priority Date: 06/25/2004
  • Status: Active Grant
First Claim
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1. An apparatus comprising:

  • a substrate;

    a sensor array integrated with the substrate, a sensor of the sensor array including a source, a drain, a channel interposed between the source and the drain, an insulating layer disposed over the channel and overlapping the source and the drain, and a gate region disposed over the insulating layer, the gate region defining binding sites to which beads or polymer films are adhered and configured to receive a polymerase chain reaction (PCR) product, a conductivity of the channel to change in response to a pH change associated with the PCR product; and

    a heater integrated with the substrate;

    wherein a film is attached to the binding sites and includes surface functionalization having both base and acid terminations.

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