Phase difference detector, phase difference detection program, and plasma processing system using the phase difference detector

• US 9,110,106 B2
• Filed: 05/29/2013
• Issued: 08/18/2015
• Est. Priority Date: 06/04/2012
• Status: Active Grant

• Current Assignee: Daihen Corporation
• Original Assignee: Daihen Corporation
• Inventors: Kitano, Toyokazu, Kasai, Yoshinobu, Yoshizako, Yuji
• Primary Examiner(s): Donovan, Lincoln
• Assistant Examiner(s): SKIBINSKI, THOMAS S
• Application Number:
  US13/904,514
• Publication Number:
  US 20130320852A1
• Time in Patent Office: 811 Days
• Field of Search: 315/111.21, 315/111.31, 315/111.41, 315/111.51, 315/111.61, 315/111.71, 315/111.01, 702/64, 702/72, 702/106, 708/800, 708/819, 313/231.01, 313/231.31, 313/231.41, 313/231.51, 313/231.61, 324/76.77, 324/76.78, 324/76.55, 324/607, 370/350, 375/140, 375/14, 375/200, 375/206, 375/376, 375/371, 364/717, 327/164, 327/105, 327/119
• US Class Current: 1/1
• CPC Class Codes: G01R 25/00 Arrangements for measuring phase angle between a voltage and a current or between voltages or currents
• CPC Class Codes: H01J 37/32917 Plasma diagnostics
• CPC Class Codes: H01J 37/32926 Software, data control or modelling
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge
• CPC Class Codes: H05H 1/46 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/26 takes precedence
• CPC Class Codes: H05H 2242/26 Matching networks

Abstract

A phase difference detector detects the phase difference between two AC signals at a high speed and with high accuracy. A phase difference computation unit computes the phase difference φ_r(=φ₂−φ₁) between two detected voltages v₁ (phase angle: φ₁) and v₂ (phase angle: φ₂). The phase difference computation unit uses a sine wave v_s and a cosine wave v_c generated separately and having the same frequency as the fundamental frequency of the voltages v₁ and v₂, to perform computation of v_2s=v₂×v_s, v_2c=v₂×v_c, v_1s=v₁×v_s, v_1c=v₁×v_c, and then extracts DC components I₂=(−A₂/2)·sin(φ₂), R₂=(A₂/2)·cos(φ₂), I₁=(−A₁/2)·sin(φ₁), R₁=(A₁/2)·cos(φ₁) at low-pass filters. The phase difference computation unit computes R₃=R₁×R₂+I₁×I₂ at a complex multiplying unit to obtain R₃=(A₁·A₂/4)·cos(φ_r), computes I₃=R₂×I₁−R₁×I₂ to obtain I₃=(A₁·A₂/4)·sin(φ_r), and computes φ_r=tan⁻¹(I₃/R₃) at the arctangent calculation unit, thereby obtaining the phase difference φ_r.

Claims

1. A phase difference detector for detecting a phase difference between a first AC signal and a second AC signal having a same frequency as a fundamental frequency of the first AC signal, the detector comprising:

a sine wave generator that generates a sine wave signal having the same frequency as the fundamental frequency;

a cosine wave generator that generates a cosine wave signal having the same frequency as the fundamental frequency;

a first signal multiplier that multiplies the first AC signal and the sine wave signal;

a second signal multiplier that multiplies the first AC signal and the cosine wave signal;

a third signal multiplier that multiplies the second AC signal and the sine wave signal;

a fourth signal multiplier that multiplies the second AC signal and the cosine wave signal;

a DC component extraction unit that extracts four DC components by removing an AC component from a result of multiplication in each of the first through the fourth signal multipliers;

a trigonometric function computation unit that obtains a sine value and a cosine value of the phase difference by a computation using the four DC components; and

a phase difference computation unit that uses the cosine value and the sine value computed by the trigonometric function computation unit to compute arctangent of a ratio of the sine value to the cosine value to obtain the phase difference,

wherein;

when the first AC signal is A₁·

cos(2π

·

f₀·

t+φ

₁)+h₁(t) (where h₁(t) is the sum of harmonic components) and the second AC signal is A₂·

cos(2π

·

f₀·

t+φ

₂)+h₂(t) (where h₂(t) is the sum of harmonic components),

the sine wave signal generated by the sine wave generator and the cosine wave signal generated by the cosine wave generator are expressed as sin(2π

·

f₀·

t)and cos(2π

·

f₀·

t), respectively,

the four DC components extracted by the DC component extraction unit are expressed as R₁=(A₁/2)·

cos(φ

₁), I₁=(−

A₁/2)·

sin(φ

₁), R₂=(A₂/2)·

cos(φ

₂) and I₂=(−

A₂/2)·

sin(φ

₂), and

the trigonometric function computation unit computes R₁×

R₂+I₁×

I₂ to obtain a cosine value expressed as (A₁·

A₂/4)·

cos(φ

_r)(where φ

_r=φ

₂−

φ

₁) and computes R₂×

I₁−

R₁×

I₂ to obtain a sine value expressed as (A₁·

A₂/4)·

sin(φ

_r).

2. A phase difference detector for detecting a phase difference between a first AC signal and a second AC signal having a same frequency as a fundamental frequency of the first AC signal, the detector comprising:

a sine wave generator that generates a sine wave signal having the same frequency as the fundamental frequency;

a cosine wave generator that generates a cosine wave signal having the same frequency as the fundamental frequency;

a first signal multiplier that multiplies the first AC signal and the sine wave signal;

a second signal multiplier that multiplies the first AC signal and the cosine wave signal;

a third signal multiplier that multiplies the second AC signal and the sine wave signal;

a fourth signal multiplier that multiplies the second AC signal and the cosine wave signal;

a DC component extraction unit that extracts four DC components by removing an AC component from a result of multiplication in each of the first through the fourth signal multipliers;

a trigonometric function computation unit that obtains a sine value and a cosine value of the phase difference by a computation using the four DC components; and

a phase difference computation unit that uses the cosine value and the sine value computed by the trigonometric function computation unit to compute arctangent of a ratio of the sine value to the cosine value to obtain the phase difference,

wherein the sine wave generator and the cosine wave generator are provided by a direct digital synthesizer comprising;

a first clock generator that generates a first reference clock;

a first frequency retaining unit that retains a value of a fundamental frequency of the first AC signal;

a first adder that adds the value of a fundamental frequency retained in the first frequency retaining unit and a result of addition and outputs a result every time a clock pulse of the first reference clock is inputted; and

a first waveform storing unit that stores a table of wave height values of predetermined sine waves or cosine waves and outputs a wave height value corresponding to the result of addition every time the result of addition is outputted from the first adder.

3. A computer readable storage medium comprising a phase difference detection program encoded and stored in a computer readable format, the program configured to cause a computer to function as a phase difference detector for detecting a phase difference between a first AC signal and a second AC signal having a same frequency as a fundamental frequency of the first AC signal, the program causing the computer to function as:

a sine wave generator that generates a sine wave signal having the same frequency as the fundamental frequency;

a cosine wave generator that generates a cosine wave signal having the same frequency as the fundamental frequency;

a first signal multiplier that multiplies the first AC signal and the sine wave signal;

a second signal multiplier that multiplies the first AC signal and the cosine wave signal;

a third signal multiplier that multiplies the second AC signal and the sine wave signal;

a fourth signal multiplier that multiplies the second AC signal and the cosine wave signal;

a DC component extraction unit that extracts four DC components by removing an AC component from a result of multiplication in each of the first through the fourth signal multipliers;

a trigonometric function computation unit that obtains a sine value and a cosine value of the phase difference by a computation using the four DC components; and

a phase difference computation unit that uses the cosine value and the sine value computed by the trigonometric function computation unit to compute arctangent of a ratio of the sine value to the cosine value to obtain the phase difference,

wherein;

when the first AC signal is A₁·

cos(2π

f₀·

t+φ

₁)+h₁(t) (where h₁(t) is the sum of harmonic components) and the second AC signal is A₂·

cos(2π

·

f₀·

t+φ

₂)+h₂(t) (where h₂(t) is sum of harmonic components),

the sine wave signal generated by the sine wave generator and the cosine wave signal is generated by the cosine wave generator are expressed as sin(2π

·

f₀·

t) and cos(2π

·

f₀·

t), respectively,

the four DC components extracted by the DC component extraction unit are expressed as R₁=(A₁/2)·

cos(φ

₁), I₁=(−

A₁/2)·

sin(φ

₁), R₂=(A₂/2)·

cos(φ

₂) and I₂=(−

A₂/2)·

sin(φ

₂), and

the trigonometric function computation unit computes R₁×

R₂+I₁×

I₂ to obtain a cosine value expressed as (A₁·

A₂/4)·

cos(φ

_r)(where φ

_r=φ

₂−

φ

₁) and computes R₂×

I₁−

R₁×

I₂ to obtain a sine value expressed as (A₁·

A₂/4)·

sin(φ

_r).

4. A plasma processing system for plasma-processing an object by supplying two high-frequency voltages having a same frequency and a phase difference to a pair of electrodes of a plasma chamber, the system comprising:

a phase difference detector for detecting a phase difference between a first AC signal and a second AC signal having a same frequency as a fundamental frequency of the first AC signal, the detector comprising;

a sine wave generator that generates a sine wave signal having the same frequency as the fundamental frequency;

a cosine wave generator that generates a cosine wave signal having the same frequency as the fundamental frequency;

a first multiplier that multiplies the first AC signal and the sine wave signal;

a second signal multiplier that multiplies the first AC signal and the cosine wave signal;

a third signal multiplier that multiplies the second AC signal and the sine wave signal;

a fourth signal multiplier that multiplies the second AC signal and the cosine wave signal;

a DC component extraction unit that extracts four DC components by removing an AC component from a result of multiplication in each of the first through the fourth signal multipliers;

a trigonometric function computation unit that obtains a sine value and a cosine value of the phase difference by a computation using the four DC components; and

a phase difference computation unit that uses the cosine value and the sine value computed by the trigonometric function computation unit to compute arctangent of a ratio of the sine value to the cosine value to obtain the phase difference;

an AC voltage detector that detects AC voltages at respective input ends of the paired electrodes and outputs to the phase difference detector one of voltages detected as the first AC signal and the other one of the voltages detected as the second AC signal;

an input unit for inputting control values of the frequency and the phase difference;

a computation unit that computes difference between the control value of the phase difference inputted by the input unit and a phase difference detected by the phase difference detector;

a first high-frequency instruction signal generator that generates, based on the control value of the frequency, a first high-frequency instruction signal having the frequency and a zero phase angle;

a second high-frequency instruction signal generator that generates, based on the control value of the frequency and the difference between phase differences computed by the computation unit, a second high-frequency instruction signal having the frequency and a phase angle of the difference between the phase differences;

a first high-frequency generator for outputting, based on the first high-frequency instruction signal, a high-frequency voltage having the frequency of the control value and a zero phase angle to one of the paired electrodes; and

a second high-frequency generator for outputting, based on the second high-frequency instruction signal, a high-frequency voltage having the frequency of the control value and a phase angle of the difference between phase differences to the other one of the paired electrodes.

5. The plasma processing system according to claim 4, wherein:

the first high-frequency instruction signal generator is provided by a direct digital synthesizer comprising;

a second clock generator that generates a second reference clock,

a second frequency retaining unit that retains a control value of a frequency inputted by the input unit,

a second adder that adds the control value of the frequency retained in the second frequency retaining unit and a result of addition and outputs a result every time a clock pulse of the second reference clock is inputted,

a second waveform storing unit that stores a table of wave height values of predetermined sine waves or cosine waves and outputs a wave height value corresponding to the result of addition every time the result of addition is outputted from the second adder, and

a first signal converter that converts a wave height value outputted from the second waveform storing unit into an analog signal,

the second high-frequency instruction signal generator is provided by a direct digital synthesizer comprising;

a third frequency retaining unit that retains a control value of a frequency inputted by the input unit,

a phase difference retaining unit that retains difference between the phase differences computed by the computation unit;

a third adder that adds the control value of the frequency retained in the third frequency retaining unit and a result of addition and outputs a result every time a clock pulse of the second reference clock is inputted,

a fourth adder that adds the difference between the phase differences retained in the phase difference retaining unit and a result of addition and outputs a result every time a clock pulse of the second reference clock is inputted,

a third waveform storing unit that stores a table of wave height, values of predetermined sine waves or cosine waves and outputs a wave height value corresponding to the result of addition every time the result of addition is outputted from the fourth adder, and

a second signal converter that converts a wave height value outputted from the third waveform storing unit into an analog signal.

6. The plasma processing system according to claim 5, wherein when the first AC signal is A₁·

cos(2π

·

f₀·

t+φ

₁)+h₁(t) (where h₁(t) is the sum of harmonic components) and the second AC signal is A₂·

cos(2π

·

f₀·

t+φ

₂)+h₂(t) (where h₂(t) is the harmonic components),

the sine wave signal generated by the sine wave generator and the cosine wave signal generated by the cosine wave generator are expressed as sin(2π

·

f₀·

t) and cos(2π

·

f₀·

t), respectively,

the four DC components extracted by the DC components extraction unit are expressed as R₁=(A₁/2)·

cos(φ

₁), I₁=(−

A₁/2)·

sin(φ

₁), R₂=(A₂/2)·

cos(φ

₂) and I₂=(−

A₂/2)·

sin(φ

₂), and

the trigonometric function computation unit computes R₁×

R₂+I₁×

I₂ to obtain a cosine value expressed as (A₁·

A₂/4)·

cos(φ

_r)(where φ

_r=φ

₂−

φ

₁) and computes R₂×

I₁−

R₁×

I₂ to obtain a sine value expressed as (A₁·

A₂/4)·

sin(φ

_r).

7. The plasma processing system according to claim 5, wherein the sine wave generator and the cosine wave generator are provided by a direct digital synthesizer comprising:

a first clock generator that generates a first reference clock;

a first frequency retaining unit that retains a value of a fundamental frequency of the first AC signal;

a first adder that adds the value of a fundamental frequency retained in the first frequency retaining unit and a result of addition and outputs a result every time a clock pulse of the first reference clock is inputted; and

a first waveform storing unit that stores a table of wave height values of predetermined sine waves or cosine waves and outputs a wave height value corresponding to the result of addition every time the result of addition is outputted from the first adder.

8. The plasma processing system according to claim 4, wherein when the first AC signal is A₁·

cos(2π

·

f₀·

t+φ

₁)+h₁(t) (where h₁(t) is the sum of harmonic components) and the second AC signal is A₂·

cos(2π

·

f₀·

t+φ

₂)+h₂(t) (where h₂(t) is the harmonic components),

the sine wave signal generated by the sine wave generator and the cosine wave signal generated by the cosine wave generator are expressed as sin(2π

·

f₀·

t) and cos(2π

·

f₀·

t), respectively,

the four DC components extracted by the DC component extraction unit are expressed as R₁=(A₁/2)·

cos(φ

₁), I₁=(−

A₁/2)·

sin(φ

₁), R₂=(A₂/2)·

cos(φ

₂) and I₂=(−

A₂/2)·

sin(φ

₂), and

the trigonometric function computation unit computes R₁×

R₂+I₁×

I₂ to obtain a cosine value expressed as (A₁·

A₂/4)·

cos(φ

_r)(where φ

_r=φ

₂−

φ

₁) and computes R₂×

I₁−

R₁×

I₂ to obtain a sine value expressed as (A₁·

A₂/4)·

sin(φ

_r).

9. The plasma processing system according to claim 4, wherein the sine wave generator and the cosine wave generator are provided by a direct digital synthesizer comprising:

a first clock generator that generates a first reference clock;

a first frequency retaining unit that retains a value of a fundamental frequency of the first AC signal;

a first adder that adds the value of a fundamental frequency retained in the first frequency retaining unit and a result of addition and outputs a result every time a clock pulse of the first reference clock is inputted; and

a first waveform storing unit that stores a table of wave height values of predetermined sine waves or cosine waves and outputs a wave height value corresponding to the result of addition every time the result of addition is outputted from the first adder.

10. A computer readable storage medium comprising a phase difference detection program encoded and stored in a computer readable format, the program configured to cause a computer to function as a phase difference detector for detecting a phase difference between a first AC signal and a second AC signal having a same frequency as a fundamental frequency of the first AC signal, the program causing the computer to function as:

a sine wave generator that generates a sine wave signal having the same frequency as the fundamental frequency;

a cosine wave generator that generates a cosine wave signal having the same frequency as the fundamental frequency;

a first signal multiplier that multiplies the first AC signal and the sine wave signal;

a second signal multiplier that multiplies the first AC signal and the cosine wave signal;

a third signal multiplier that multiplies the second AC signal and the sine wave signal;

a fourth signal multiplier that multiplies the second AC signal and the cosine wave signal;

a DC component extraction unit that extracts four DC components by removing an AC component from a result of multiplication in each of the first through the fourth signal multipliers;

a trigonometric function computation unit that obtains a sine value and a cosine value of the phase difference by a computation using the four DC components; and

a phase difference computation unit that uses the cosine value and the sine value computed by the trigonometric function computation unit to compute arctangent of a ratio of the sine value to the cosine value to obtain the phase difference,

wherein the sine wave generator and the cosine wave generator are provided by a direct digital synthesizer comprising;

a first clock generator that generates a first reference clock;

a first frequency retaining unit that retains a value of a fundamental frequency of the first AC signal;

a first adder that adds the value of a fundamental frequency retained in the first frequency retaining unit and a result of addition and outputs a result every time a clock pulse of the first reference clock is inputted; and

a first waveform storing unit that stores a table of wave height values of predetermined sine waves or cosine waves and outputs a wave height value corresponding to the result of addition every time the result of addition is outputted from the first adder.