Device for modulating light with multiple electrodes

• US 9,110,289 B2
• Filed: 01/13/2011
• Issued: 08/18/2015
• Est. Priority Date: 04/08/1998
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Miles, Mark W.
• Primary Examiner(s): Lester, Evelyn A
• Application Number:
  US13/005,926
• Publication Number:
  US 20110170166A1
• Time in Patent Office: 1,678 Days
• Field of Search: 359/223, 359/224, 359290-292, 359/295, 359/298, 359/318, 345/85, 345/108, 348/770, 348/771
• US Class Current: 1/1
• CPC Class Codes: G02B 19/0019 having reflective surfaces only (e.g. louvre systems, systems with multiple planar reflectors)
• CPC Class Codes: G02B 26/00 Optical devices or arrangements for the control of light using movable or deformable optical elements control of light by modification of the optical properties of the media of the elements involved therein G02F1/00
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G02B 26/007 the movable or deformable optical element controlling the colour, i.e. a spectral characteristic, of the light
• CPC Class Codes: G02B 26/02 for controlling the intensity of light G02B26/004 takes precedence
• CPC Class Codes: G02B 26/06 for controlling the phase of light G02B26/08 takes precedence , measuring optical phase difference G01J9/00
• CPC Class Codes: G02B 26/0816 by means of one or more reflecting elements
• CPC Class Codes: G02B 26/0825 the reflecting element being a flexible sheet or membrane, e.g. for varying the focus flexible mirrors for cosmetic use A45D42/24
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 27/0068 having means for controlling the degree of correction, e.g. using phase modulators, movable elements controlling the phase of light using moving or deformable elements G02B26/06
• CPC Class Codes: G02B 5/201 in the form of arrays
• CPC Class Codes: G02F 1/0128 based on electro-mechanical, magneto-mechanical, elasto-optic effects
• CPC Class Codes: G02F 2203/12 spatial light modulator
• CPC Class Codes: G09G 2300/0426 Layout of electrodes and connections
• CPC Class Codes: G09G 2300/0469 Details of the physics of pixel operation
• CPC Class Codes: G09G 2300/08 Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
• CPC Class Codes: G09G 2300/0809 Several active elements per pixel in active matrix panels
• CPC Class Codes: G09G 2300/0842 forming a memory circuit, e.g. a dynamic memory with one capacitor
• CPC Class Codes: G09G 2300/088 using a non-linear two-terminal element
• CPC Class Codes: G09G 3/2014 : by modulation of the duration of a single pulse during which the logic level remains constant
• CPC Class Codes: G09G 3/22 : using controlled light sources
• CPC Class Codes: G09G 3/3433 : using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices using liquid crystal devices G09G3/36; using electrochromic devices G09G3/38
• CPC Class Codes: G09G 3/3466 : based on interferometric effect
• CPC Class Codes: Y10T 29/49002 : Electrical device making
• CPC Class Codes: Y10T 29/4913 : Assembling to base an electrical component, e.g., capacitor, etc.

Abstract

Improvements in an interferometric modulator that has a cavity defined by two walls.

Claims

1. A display device, comprising:

a substrate;

first and second means for reflecting light defining an interferometric light modulation cavity therebetween, wherein the first and second means for reflecting light are conductive and movable with respect to the substrate; and

first and second means for causing movement of the first and second reflecting means.

2. The device of claim 1, wherein each of the first and second means for reflecting light comprises an at least partially reflective layer.

3. The device of claim 1, wherein each of the first and second means for causing movement comprises an electrode.

4. The device of claim 1, wherein the first and second means for causing movement are adjacent to one another.

5. The device of claim 1, wherein the first and second means for reflecting light are substantially parallel.

6. The device of claim 1, wherein a first edge of the first means for causing movement and a first edge of the second means for causing movement are substantially parallel.

7. The device of claim 1, wherein the first and second means for causing movement are substantially rectangular.

8. The device of claim 1, wherein the wavelength of reflected light depends on a height of the cavity.

9. The device of claim 1, wherein the first and second means for causing movement are positioned on the same means for reflecting light.

10. The device of claim 1, further comprising:

third and fourth means for reflecting light, the third and fourth reflecting means defining an additional interferometric light modulation cavity, wherein the third reflecting means forms a means for causing relative movement between the third reflecting means and the substrate; and

third and fourth substantially coplanar means for causing relative movement of the third reflecting means and the substrate.

11. The device of claim 1, wherein the first and second means for causing movement are substantially coplanar.

12. A display device comprising:

a substrate;

a first reflective electrode, and a first layer configured to move, cooperatively defining an interferometric light modulation cavity, wherein the first reflective electrode is movable with respect to the substrate; and

first and second electrodes associated with the cavity, wherein at least one of the first and second electrodes is configured to cause a relative movement of the first reflective electrode and the substrate.

13. The device of claim 12, wherein the first and second electrodes are within the cavity.

14. The device of claim 12, wherein the device comprises a MEMS device.

15. The device of claim 12, wherein the first and second electrodes are adjacent to one another.

16. The device of claim 12, wherein a first edge of the first electrode and a first edge of the second electrode are substantially parallel.

17. The device of claim 12, wherein the first and second electrodes are substantially rectangular.

18. The device of claim 12, wherein the first layer is at least partially reflective.

19. The device of claim 12, wherein the wavelength reflected depends on a height of the cavity.

20. The device of claim 12, wherein the first and second electrodes are positioned on the first layer.

21. The device of claim 12, further comprising:

a second reflective electrode and a second layer cooperatively defining an additional interferometric light modulation cavity, wherein the second reflective electrode is movable with respect to the substrate; and

third and fourth substantially coplanar electrodes associated with the additional cavity, wherein at least one of the third and fourth electrodes is configured to cause a relative movement of the second reflective electrode and the substrate, and wherein the device is configured to display an image.

22. The device of claim 12, wherein the first and second electrodes are substantially coplanar.

23. A display device comprising:

a substrate;

a first reflective electrode and a first layer cooperatively defining an interferometric light modulation cavity, wherein the first reflective electrode is movable with respect to the substrate;

first and second electrodes associated with the cavity, wherein at least one of the first and second electrodes is configured to cause a relative movement of the first reflective electrode and the substrate;

a second reflective electrode and a second layer cooperatively defining an additional interferometric light modulation cavity, wherein the second reflective electrode is movable with respect to the substrate; and

third and fourth substantially coplanar electrodes associated with the additional cavity, wherein at least one of the third and fourth electrodes is configured to cause a relative movement of the second reflective electrode and the substrate, and wherein the device is configured to display an image.