Lithographic apparatus and device manufacturing method

• US 9,110,389 B2
• Filed: 09/23/2011
• Issued: 08/18/2015
• Est. Priority Date: 06/11/2003
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: De Smit, Joannes Theodoor, Banine, Vadim Yevgenyevich, Bisschops, Theodorus Hubertus Josephus, Dierichs, Marcel Mathijs Theodore Marie, Modderman, Theodorus Marinus
• Primary Examiner(s): Artman, Thomas R
• Application Number:
  US13/241,837
• Publication Number:
  US 20120013872A1
• Time in Patent Office: 1,425 Days
• US Class Current: 1/1
• CPC Class Codes: G03F 7/70341 Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply chemical composition of immersion liquids G03F7/2041
• CPC Class Codes: G03F 7/708 Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
• CPC Class Codes: G03F 7/70858 Environment aspects, e.g. pressure of beam-path gas, temperature pollution aspects G03F7/70916

Abstract

A lithographic apparatus and device manufacturing method makes use of a liquid confined in a reservoir between the projection system and the substrate. Bubbles forming in the liquid from dissolved atmospheric gases or from out-gassing from apparatus elements exposed to the liquid are detected and/or removed so that they do not interfere with exposure and lead to printing defects on the substrate. Detection may be carried out by measuring the frequency dependence of ultrasonic attenuation in the liquid and bubble removal may be implemented by degassing and pressurizing the liquid, isolating the liquid from the atmosphere, using liquids of low surface tension, providing a continuous flow of liquid through the imaging field, and/or phase shifting ultrasonic standing-wave node patterns.

Claims

1. A lithographic projection apparatus comprising:

a substrate table configured to hold a substrate;

a projection system arranged to project a patterned radiation beam onto a target portion of the substrate;

a liquid supply system configured to at least partly fill a space between the projection system and the substrate with a liquid;

a liquid confinement member, with respect to which the substrate table is movable, extending along at least part of a boundary of the space, the liquid confinement member having an opening configured to form a fluid seal between the liquid confinement member and a surface of the substrate or substrate table, wherein the opening is configured to remove liquid from the space; and

a bubble reduction device configured to reduce a size of bubbles in the liquid, a concentration of bubbles or gas in the liquid, or both, the bubble reduction device comprising a degassing device configured to degas the liquid.

2. An apparatus according to claim 1, further comprising an ultrasonic transducer.

3. An apparatus according to claim 2, wherein the ultrasonic transducer is configured to remove bubbles from the liquid.

4. An apparatus according to claim 2, wherein the ultrasonic transducer is arranged to remove contamination from a part of the apparatus.

5. An apparatus according to claim 2, wherein the ultrasonic transducer is mechanically isolated from the liquid confinement member.

6. An apparatus according to claim 2, wherein the ultrasonic transducer is located nearby the liquid confinement member.

7. An apparatus according to claim 1, wherein the degassing device comprises a chamber configured to contain the liquid to be degassed, and a pump arranged to extract gas from the chamber.

8. An apparatus according to claim 1, wherein the degassing device is arranged to raise a temperature of the liquid.

9. An apparatus according to claim 1, wherein the liquid supply system is configured to isolate the liquid from the atmosphere between the degassing device and the space.

10. An apparatus according to claim 1, further comprising an opening configured to supply a gas under pressure to adjacent liquid in the space.

11. An apparatus according to claim 1, further comprising a bubble detector comprising a light source, a light detector and a light comparator.

12. An apparatus according to claim 1, wherein the degassing device is located upstream of the space and configured to degas the liquid prior to supply to the space.

13. An apparatus according to claim 1, wherein the opening is formed in a face of the liquid confinement member that opposes the substrate during exposure and wherein the liquid confinement member has an open aperture in a bottom surface of the member, the open aperture being in a part of the member below a final surface of the projection system and above the substrate table, the open aperture having a cross-sectional width smaller than a cross-sectional width of the substrate, the open aperture configured to allow the liquid to flow therethrough between above the open aperture and below the open aperture, and the open aperture configured to allow an exposure beam to pass therethrough.

14. An apparatus according to claim 1, further comprising a seal member extending across a gap between the liquid confinement member and the projection system.

15. An apparatus according to claim 1, further comprising an inlet to supply the liquid to the space, the inlet located above a bottom surface of the liquid confinement member, extending substantially horizontally, and facing toward a path of an optical axis of the projection system through the space.

16. An apparatus according to claim 1, wherein the liquid confinement member surrounds a final optical element of the projection system and is separated from a lateral periphery of the final optical element by an open gap such that liquid can flow through the gap to above a bottom surface of the final optical element.

17. A lithographic apparatus comprising:

a projection system configured to image a pattern on a substrate;

a table movable with respect to the projection system;

a liquid supply system configured to supply liquid to a reservoir between the projection system and the table;

a liquid confinement member extending along at least part of a boundary of the reservoir, the liquid confinement member configured to substantially contain the liquid in the reservoir to a region on the substrate or substrate table having an area smaller than the area of the substrate, the region surrounded by a gaseous atmosphere; and

a degassing device to degas the liquid, wherein the degassing device is located upstream of the space and configured to degas the liquid prior to supply to the space.

18. An apparatus according to claim 17, further comprising an opening formed in a face of the liquid confinement member that opposes the substrate during exposure, the opening configured to remove liquid from the space and wherein the liquid confinement member has an open aperture in a bottom surface of the member, the open aperture being in a part of the member below a final surface of the projection system and above the substrate table, the open aperture having a cross-sectional width smaller than a cross-sectional width of the substrate, the open aperture configured to allow the liquid to flow therethrough between above the open aperture and below the open aperture, and the open aperture configured to allow an exposure beam to pass therethrough.

19. An apparatus according to claim 18, further comprising an inlet to supply the liquid to the space, the inlet located above a bottom surface of the liquid confinement member, extending substantially horizontally, and facing toward a path of an optical axis of the projection system through the space.

20. An apparatus according to claim 18, wherein the liquid confinement member surrounds a final optical element of the projection system and is separated from a lateral periphery of the final optical element such that liquid can flow through the gap to above a bottom surface of the final optical element.

21. A device manufacturing method, the method comprising:

at least partly filling a space between a projection system of a lithographic apparatus and a movable table with a liquid;

confining the liquid to the space using a liquid confinement member, with respect to which the table is movable, extending along at least part of a boundary of the space;

forming a fluid seal between the liquid confinement member and a surface of the substrate or table;

projecting a radiation image through the liquid in the space onto a target portion of a substrate; and

degassing the liquid using a degasser, wherein the degasser is located upstream of the space and the degassing the liquid is performed prior to supply of the liquid to the space.