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Faceted, germanium slotted waveguide

  • US 9,116,290 B1
  • Filed: 10/08/2012
  • Issued: 08/25/2015
  • Est. Priority Date: 10/07/2011
  • Status: Active Grant
First Claim
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1. A waveguide comprising:

  • a substrate;

    a first germanium sidewall formed adjacent to the substrate, wherein the first germanium sidewall is formed by growing germanium on the substrate;

    a second germanium sidewall disposed onto the substrate, wherein the second germanium sidewall is formed by growing germanium on the substrate;

    a protective layer disposed onto the substrate between the first germanium sidewall and the second germanium sidewall, wherein the first germanium sidewall, the second germanium sidewall, the protective layer and the substrate form the waveguide; and

    a trapezoidal slot in the waveguide defined by the first germanium sidewall, the second germanium sidewall and the protective layer, wherein the trapezoidal slot is defined by an interior surface the first germanium sidewall grown on the substrate and an interior surface the second germanium sidewall grown on the substrate and an optical signal travels along the sidewalls within the trapezoidal slot.

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