MEMS anchors

• US 9,116,344 B2
• Filed: 11/26/2013
• Issued: 08/25/2015
• Est. Priority Date: 10/27/2008
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Pixtronix, Incorporated (Qualcomm, Inc.)
• Inventors: Wu, Joyce H., Andersson, Mark B., Steyn, Jasper Lodewyk
• Primary Examiner(s): CHERRY, EUNCHA P
• Application Number:
  US14/090,702
• Publication Number:
  US 20140085698A1
• Time in Patent Office: 637 Days
• Field of Search: 359/198.1, 359/214.1, 3592231-2261, 359/230, 359/234, 359/290, 359/291
• US Class Current: 1/1
• CPC Class Codes: B81B 1/00 Devices without movable or flexible elements, e.g. microcapillary devices
• CPC Class Codes: B81B 2203/0307 Anchors
• CPC Class Codes: B81B 3/0035 Constitution or structural means for controlling the movement of the flexible or deformable elements
• CPC Class Codes: G02B 26/02 for controlling the intensity of light G02B26/004 takes precedence
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B

Abstract

The invention relates to an improved apparatus and method for the design and manufacture of MEMS anchoring structures for light modulators in order to address the stresses of beams mounted on them.

Claims

1. A MEMS device comprising:

a substrate including a surface;

a shutter suspended over the surface, the shutter including a first side and second side, the second side being substantially opposite to the first side along an axis of movement of the shutter;

a first actuator coupled to the first side of the shutter via a first compliant beam; and

a second actuator coupled to the second side of the shutter via a second compliant beam,

wherein the first actuator is the only actuator coupled to the first side of the shutter.

2. The MEMS device of claim 1, wherein the first compliant beam includes an attachment point to the shutter that is substantially along the axis of movement of the shutter.

3. The MEMS device of claim 2, wherein the second compliant beam includes an attachment point to the shutter that is substantially along the axis of movement of the shutter.

4. The MEMS device of claim 1, wherein the shutter is in a first position along the axis of movement in response to the first actuator being in a relaxed state and the second actuator being in an actuated state.

5. The MEMS device of claim 1, wherein the shutter is in a second position along the axis of movement in response to the first actuator being in an actuated state and the second actuator being in a relaxed state.

6. The MEMS device of claim 1, wherein the shutter includes one or more shutter apertures.

7. The MEMS device of claim 1, wherein the first compliant beam includes a first electrode.

8. The MEMS device of claim 7, wherein the second compliant beam includes a second electrode.

9. The MEMS device of claim 1, wherein the surface includes an aperture for allowing the passage of light over which the shutter is at least partially suspended.

19. The MEMS device of claim 1, wherein the second actuator is the only actuator coupled to the second side of the shutter.

10. A MEMS device comprising:

a substrate including a surface;

a shutter suspended over the surface, the shutter including a first side and second side, the second side being substantially opposite to the first side along an axis of movement of the shutter;

a first means for moving the shutter coupled to the first side of the shutter via a first compliant beam; and

a second means for moving the shutter coupled to the second side of the shutter via a second compliant beam,

wherein the first means is the only means coupled to the first side of the shutter.

11. The MEMS device of claim 10, wherein the first compliant beam includes an attachment point to the shutter that is substantially along the axis of movement of the shutter.

12. The MEMS device of claim 11, wherein the second compliant beam includes an attachment point to the shutter that is substantially along the axis of movement of the shutter.

13. The MEMS device of claim 10, wherein the shutter is in a first position along the axis of movement in response to the first means for moving the shutter being in a relaxed state and the second means for moving the shutter being in an actuated state.

14. The MEMS device of claim 10, wherein the shutter is in a second position along the axis of movement in response to the first means for moving the shutter being in an actuated state and the second means for moving the shutter being in a relaxed state.

15. The MEMS device of claim 10, wherein the shutter includes one or more shutter apertures.

16. The MEMS device of claim 10, wherein the first compliant beam includes a first electrode.

17. The MEMS device of claim 16, wherein the second compliant beam includes a second electrode.

18. The MEMS device of claim 10, wherein the surface includes an aperture for allowing the passage of light over which the shutter is at least partially suspended.

20. The MEMS device of claim 10, wherein the second means is the only means coupled to the second side of the shutter.