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MEMS scanning mirror field of view provision methods and apparatus

  • US 9,116,350 B2
  • Filed: 03/11/2013
  • Issued: 08/25/2015
  • Est. Priority Date: 03/11/2013
  • Status: Active Grant
First Claim
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1. An apparatus for providing a micro-electromechanical system (MEMS) scanning mirror unobstructed field of view, comprising:

  • an optoelectronic assembly associated with a laser device, wherein the assembly includes a MEMS scanning mirror having a field of view, and wherein the MEMS scanning mirror includes;

    a substrate having at least a top layer; and

    a micro scale mirror having a substantially oval or circular shape, embedded in the top layer of the substrate, wherein the mirror is rotatable about a chord axis of the mirror to deflect a beam from the laser device, and wherein the top layer includes a cutout at one side, dimensioned to reduce obstruction of the mirror to enlarge the field of view, wherein the cutout comprises at least two cutout edges, wherein each cutout edge extends to an edge of the top layer to form a determined angle with the edge of the top layer.

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