Tunable and switchable resonator and filter structures in single crystal piezoelectric MEMS devices using bimorphs
First Claim
1. A micro-electrical-mechanical system (MEMS) device comprising:
- a substrate;
one or more anchors formed on a first surface of the substrate;
a piezoelectric layer suspended over the first surface of the substrate by the one or more anchors, wherein the piezoelectric layer is a piezoelectric bimorph;
a first electrode on a first surface of the piezoelectric layer facing the first surface of the substrate; and
a second electrode on a second surface of the piezoelectric layer opposite the first surface, the second electrode including a first conducting section and a second conducting section, which are inter-digitally dispersed on the second surface.
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Accused Products
Abstract
A MEMS device includes a substrate, one or more anchors formed on a first surface of the substrate, and a piezoelectric layer suspended over the first surface of the substrate by the one or more anchors. Notably, the piezoelectric layer is a bimorph including a first bimorph layer and a second bimorph layer. A first electrode may be provided on a first surface of the piezoelectric layer facing the first surface of the substrate, such that the first electrode is in contact with the first bimorph layer of the piezoelectric layer. A second electrode may be provided on a second surface of the piezoelectric layer opposite the substrate, such that the second electrode is in contact with the second bimorph layer of the piezoelectric layer. The second electrode may include a first conducting section and a second conducting section, which are inter-digitally dispersed on the second surface.
37 Citations
30 Claims
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1. A micro-electrical-mechanical system (MEMS) device comprising:
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a substrate; one or more anchors formed on a first surface of the substrate; a piezoelectric layer suspended over the first surface of the substrate by the one or more anchors, wherein the piezoelectric layer is a piezoelectric bimorph; a first electrode on a first surface of the piezoelectric layer facing the first surface of the substrate; and a second electrode on a second surface of the piezoelectric layer opposite the first surface, the second electrode including a first conducting section and a second conducting section, which are inter-digitally dispersed on the second surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A micro-electrical-mechanical system (MEMS) device comprising:
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a substrate; one or more anchors formed on a first surface of the substrate; a piezoelectric layer suspended over the first surface of the substrate by the one or more anchors, wherein the piezoelectric layer is a piezoelectric bimorph; a first electrode on a first surface of the piezoelectric layer facing the first surface of the substrate; a second electrode on a second surface of the piezoelectric layer opposite the first surface, the second electrode including a first conducting section and a second conducting section, which are inter-digitally dispersed on the second surface; and a third electrode on the first surface of the substrate below the first electrode. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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27. A micro-electrical-mechanical system (MEMS) device comprising:
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a substrate; one or more anchors formed on a first surface of the substrate, each of the one or more anchors comprising at least one piezoelectric anchor layer, wherein the at least one piezoelectric anchor layer is a piezoelectric bimorph; a piezoelectric layer suspended over the first surface of the substrate by the one or more anchors; a first electrode on a first surface of the piezoelectric anchor layer facing the first surface of the substrate; and a second electrode on a second surface of the piezoelectric anchor layer and the piezoelectric layer opposite the first surface, the second electrode including a first conducting section and a second conducting section, which are inter-digitally dispersed on the second surface. - View Dependent Claims (28, 29, 30)
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Specification