Ultrasonic transducer structure, ultrasonic transducer, and method of manufacturing ultrasonic transducer
First Claim
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1. An ultrasonic transducer comprising:
- a first substrate that comprises a driving circuit;
a first insulating layer that is disposed on the first substrate;
a second substrate that is disposed on the first insulating layer and has a via-hole therein;
a support portion that is disposed above and spaced apart from the second substrate;
a thin film that is supported by the support portion and is spaced apart from the second substrate; and
a cavity between the second substrate and the thin film,wherein the first substrate and the second substrate are directly bonded to each other with the first insulating layer therebetween.
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Abstract
An ultrasonic transducer structure, an ultrasonic transducer, and a method of manufacturing the ultrasonic transducer are provided. The ultrasonic transducer structure includes a driving wafer that includes a driving circuit; and an ultrasonic transducer wafer that is disposed on the driving wafer and includes a first wafer in which a via-hole is formed, a first insulating layer formed on the first wafer, a second wafer spaced apart from the first insulating layer, and a cavity formed between the first insulating layer and the second wafer.
5 Citations
6 Claims
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1. An ultrasonic transducer comprising:
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a first substrate that comprises a driving circuit; a first insulating layer that is disposed on the first substrate; a second substrate that is disposed on the first insulating layer and has a via-hole therein; a support portion that is disposed above and spaced apart from the second substrate; a thin film that is supported by the support portion and is spaced apart from the second substrate; and a cavity between the second substrate and the thin film, wherein the first substrate and the second substrate are directly bonded to each other with the first insulating layer therebetween. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification