Apparatus and method of fabricating flat plate display
First Claim
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1. A fabricating apparatus of a flat plate display comprising:
- a stage on which a substrate having liquid resin formed thereon is seated;
an imprinting mold bonded with the liquid resin of the substrate to form a thin film pattern on the substrate, the imprinting mold comprises projections and grooves; and
a planarization layer formed between the stage and the substrate to planarize a surface of the stage,wherein the planarization layer comprises;
a buffer layer formed on the stage;
a slip layer formed between the buffer layer and the substrate; and
an adhesive layer between the buffer layer and the stage and between the buffer layer and the slip layer.
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Abstract
A fabricating apparatus and a method of a flat plate display are disclosed. A fabricating apparatus of a flat plate display includes a stage on which a substrate having liquid resin formed thereon is seated, a imprinting mold bonded with the liquid resin of the substrate to form a thin film pattern on the substrate, the imprinting mold comprises projections and grooves, and a planarization layer formed between the stage and the substrate to planarize a surface of the stage.
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3 Claims
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1. A fabricating apparatus of a flat plate display comprising:
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a stage on which a substrate having liquid resin formed thereon is seated; an imprinting mold bonded with the liquid resin of the substrate to form a thin film pattern on the substrate, the imprinting mold comprises projections and grooves; and a planarization layer formed between the stage and the substrate to planarize a surface of the stage, wherein the planarization layer comprises; a buffer layer formed on the stage; a slip layer formed between the buffer layer and the substrate; and an adhesive layer between the buffer layer and the stage and between the buffer layer and the slip layer. - View Dependent Claims (2, 3)
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Specification