Bending vibration piece and electronic device

• US 9,121,707 B2
• Filed: 06/19/2012
• Issued: 09/01/2015
• Est. Priority Date: 06/24/2011
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Shimura, Masashi, Kikuchi, Takayuki
• Primary Examiner(s): Williams, Hezron E
• Assistant Examiner(s): Sinha, Tarun
• Application Number:
  US13/527,077
• Publication Number:
  US 20120325000A1
• Time in Patent Office: 1,169 Days
• Field of Search: 735/041.6
• US Class Current: 1/1
• CPC Class Codes: G01C 19/5621 the devices involving a micromechanical structure

Abstract

A bending vibration piece has a pair of drive vibration arms and a pair of detection vibration arms in an opposite direction thereto which are connected to a supporting part. The supporting part has recessed portions formed on both lateral parts in a direction of width, and a through-hole formed substantially at the center in a plane part of the supporting part and more toward the drive vibration arms than the recessed portions are. On a surface of the supporting part, drive electrode pads are arranged toward the drive vibration arms and detection electrode pads are arranged toward the detection vibration arms, with these electrode pads being separated from each other in a longitudinal direction by the recessed portions on both lateral part of the supporting part and the through-hole in the plane part.

Claims

1. A bending vibration piece comprising:

at least one pair of drive vibration arms;

one pair of detection vibration arms;

a supporting part for supporting the drive vibration arms and the detection vibration arms;

a through-hole provided in the supporting part, the through-hole penetrating the supporting part;

a first recess provided in the supporting part, the first recess being located adjacent to a first edge of the supporting part;

a drive electrode arranged on the drive vibration arms;

a detection electrode arranged on the detection vibration arms;

a drive electrode pad provided on a main surface of the supporting part, the drive electrode pad being connected to the drive electrode; and

a detection electrode pad provided on the main surface of the supporting part, the detection electrode pad being connected to the detection electrode, wherein

the drive electrode pad is arranged more toward the drive vibration arms than the first recess,

the detection electrode pad is arranged more toward the detection vibration arms than the first recess,

the through-hole is located between the drive electrode pad and the detection electrode pad, and

the through-hole and the first recess are partially overlapped with each other in an extending direction of the first edge of the supporting part.

2. The bending vibration piece according to claim 1, further comprising one pair of connecting arms extending in opposite directions to each other, each of the connecting arms extending from each of the first edge and a second edge of the supporting part, wherein the one pair of detection vibration arms is configured with two vibration arms extending from the supporting part in opposite directions to each other, an extending direction of the detection vibration arms is orthogonal to an extending direction of the connecting arms, and the at least one pair of drive vibration arms is configured with two pairs of vibration arms extending in opposite directions to each other, an extending direction of the vibration arms is orthogonal to the extending direction of the connecting arms.

3. The bending vibration piece according to claim 1, further comprising:

a second recess that is provided in the supporting part, the second recess being located adjacent to a second edge, which is opposite to the first edge, of the supporting part.

4. The bending vibration piece according to claim 1, wherein the first recess is formed in such a way as to penetrate the supporting part.

5. The bending vibration piece according to claim 1, wherein the through-hole provided in the supporting part is arranged more toward the detection vibration arms than the first recess.

6. An electronic device comprising the bending vibration piece according to claim 1.

7. An electronic device comprising the bending vibration piece according to claim 2.

8. An electronic device comprising the bending vibration piece according to claim 3.

9. An electronic device comprising the bending vibration piece according to claim 4.