Bending vibration piece and electronic device
First Claim
1. A bending vibration piece comprising:
- at least one pair of drive vibration arms;
one pair of detection vibration arms;
a supporting part for supporting the drive vibration arms and the detection vibration arms;
a through-hole provided in the supporting part, the through-hole penetrating the supporting part;
a first recess provided in the supporting part, the first recess being located adjacent to a first edge of the supporting part;
a drive electrode arranged on the drive vibration arms;
a detection electrode arranged on the detection vibration arms;
a drive electrode pad provided on a main surface of the supporting part, the drive electrode pad being connected to the drive electrode; and
a detection electrode pad provided on the main surface of the supporting part, the detection electrode pad being connected to the detection electrode, whereinthe drive electrode pad is arranged more toward the drive vibration arms than the first recess,the detection electrode pad is arranged more toward the detection vibration arms than the first recess,the through-hole is located between the drive electrode pad and the detection electrode pad, andthe through-hole and the first recess are partially overlapped with each other in an extending direction of the first edge of the supporting part.
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Accused Products
Abstract
A bending vibration piece has a pair of drive vibration arms and a pair of detection vibration arms in an opposite direction thereto which are connected to a supporting part. The supporting part has recessed portions formed on both lateral parts in a direction of width, and a through-hole formed substantially at the center in a plane part of the supporting part and more toward the drive vibration arms than the recessed portions are. On a surface of the supporting part, drive electrode pads are arranged toward the drive vibration arms and detection electrode pads are arranged toward the detection vibration arms, with these electrode pads being separated from each other in a longitudinal direction by the recessed portions on both lateral part of the supporting part and the through-hole in the plane part.
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Citations
9 Claims
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1. A bending vibration piece comprising:
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at least one pair of drive vibration arms; one pair of detection vibration arms; a supporting part for supporting the drive vibration arms and the detection vibration arms; a through-hole provided in the supporting part, the through-hole penetrating the supporting part; a first recess provided in the supporting part, the first recess being located adjacent to a first edge of the supporting part; a drive electrode arranged on the drive vibration arms; a detection electrode arranged on the detection vibration arms; a drive electrode pad provided on a main surface of the supporting part, the drive electrode pad being connected to the drive electrode; and a detection electrode pad provided on the main surface of the supporting part, the detection electrode pad being connected to the detection electrode, wherein the drive electrode pad is arranged more toward the drive vibration arms than the first recess, the detection electrode pad is arranged more toward the detection vibration arms than the first recess, the through-hole is located between the drive electrode pad and the detection electrode pad, and the through-hole and the first recess are partially overlapped with each other in an extending direction of the first edge of the supporting part. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification