Inertial sensor
First Claim
1. An inertial sensor, comprising:
- a membrane;
a plurality of first electrodes patterned on the membrane;
a plurality of piezoelectric elements patterned on the first electrodes;
a second electrode integrally formed to cover the piezoelectric elements; and
second insulators formed at the outer surface of the piezoelectric element formed at the outside among the patterned piezoelectric elements,wherein the second electrode is formed to cover the piezoelectric elements and the second insulators.
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Accused Products
Abstract
Disclosed herein is an inertial sensor. An inertial sensor according to preferred embodiments of the present invention is configured to include a membrane, a plurality of first electrodes patterned on the membrane, a plurality of piezoelectric elements patterned on the first electrodes, and a second electrode integrally formed to cover the piezoelectric elements. By the configuration, the piezoelectric element is encapsulated with the second electrode that is integrally formed to prevent water or humidity from being permeated into the piezoelectric element, thereby preventing physical properties of the piezoelectric element from being changed or preventing the piezoelectric element from being delaminated.
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Citations
14 Claims
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1. An inertial sensor, comprising:
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a membrane; a plurality of first electrodes patterned on the membrane; a plurality of piezoelectric elements patterned on the first electrodes; a second electrode integrally formed to cover the piezoelectric elements; and second insulators formed at the outer surface of the piezoelectric element formed at the outside among the patterned piezoelectric elements, wherein the second electrode is formed to cover the piezoelectric elements and the second insulators. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An inertial sensor, comprising:
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a membrane; a plurality of first electrodes patterned on the membrane; a piezoelectric element integrally formed on the first electrodes; a second electrode integrally formed to cover the piezoelectric element; and second insulators formed at the outside of the patterned piezoelectric element, wherein the second electrode is formed to cover the piezoelectric elements and the second insulator. - View Dependent Claims (11, 12, 13, 14)
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Specification