Microelectromechanical switches for steering of RF signals

• US 9,123,493 B2
• Filed: 01/23/2014
• Issued: 09/01/2015
• Est. Priority Date: 01/23/2014
• Status: Active Grant

• Current Assignee: Harris Corporation (L3Harris Technologies, Inc.)
• Original Assignee: Harris Corporation (L3Harris Technologies, Inc.)
• Inventors: Rogers, John E.
• Primary Examiner(s): Talpalatski, Alexander
• Application Number:
  US14/161,784
• Publication Number:
  US 20150206686A1
• Time in Patent Office: 586 Days
• Field of Search: 335/78
• US Class Current: 1/1
• CPC Class Codes: H01H 2001/0078 with parallel movement of the movable contact relative to the substrate
• CPC Class Codes: H01H 59/0009 making use of micromechanics

Abstract

A switch includes a shuttle having an elongated length resiliently supported at opposing ends thereof and configured to move along a motion axis in response to an applied voltage. A shuttle switch portion includes a plurality of shuttle contact fingers extending transversely from opposing sides of the shuttle. A common contact at a common terminal side of the shuttle includes a plurality of contact fingers respectively interdigitated with the shuttle contact fingers. First and second terminal contacts are adjacent a switched terminal side of the shuttle, and include first terminal contact fingers and second terminal contact fingers respectively interdigitated with shuttle contact fingers. The shuttle switch portion is configured to selectively connect the common contact to the first terminal contact or the second terminal contact.

Claims

1. A MEMS switch, comprising:

first and second opposing base members formed on a substrate;

first and second resilient members provided respectively at said first and second opposing base members;

a shuttle having an elongated length which extends over said substrate and is resiliently supported at opposing first and second ends thereof by said first and second resilient members respectively;

a drive portion configured to selectively move said shuttle along a motion axis aligned with said elongated length in response to an applied voltage, said drive portion comprised of

a shuttle drive portion provided at a first location along said elongated length including a plurality of shuttle drive fingers extending transversely from opposing sides of said shuttle, and

a plurality of motive drive fingers interdigitated with said plurality of shuttle drive fingers, said motive drive fingers fixed with respect to said substrate and disposed on opposing sides of said shuttle drive portion;

a shuttle switch portion provided at a second location along said elongated length, electrically isolated from said shuttle drive portion and from said first and second opposing base members, said shuttle switch portion including a first switch element formed of a first plurality of shuttle contact fingers extending transversely from opposing sides of a first switch section of said shuttle, and a second shuttle switch element formed of a second plurality of shuttle contact fingers extending transversely from opposing sides of a second switch section of said shuttle;

a common contact having a fixed position relative to said substrate and disposed on a common terminal side of said shuttle, said common contact comprising a first and second plurality of common contact fingers respectively interdigitated with said first plurality of shuttle contact fingers and said second plurality of shuttle contact fingers;

first and second terminal contacts fixed on a portion of said substrate adjacent to a switched terminal side of said shuttle and comprising first terminal contact fingers and second terminal contact fingers respectively interdigitated with said first plurality of shuttle contact fingers, and said second plurality of shuttle contact fingers; and

wherein said shuttle switch portion exclusively forms an electrical connection between said common contact and said first terminal contact when said drive portion moves said shuttle to a first position along said motion axis, and exclusively forms an electrical connection between said common contact and said second terminal contact when said drive portion moves said shuttle to a second position along said motion axis.

2. The MEMS switch according to claim 1, wherein said plurality of motive drive finger are comprised of a plurality of first position motive drive fingers and a plurality of second position motive drive fingers, and said first position motive drive fingers are electrically isolated from said second position motive drive fingers.

3. The MEMS switch according to claim 2, wherein said shuttle drive portion is configured to move said shuttle to said first position when a voltage is applied to said first position motive drive fingers, and configured to move to said second position when said voltage is applied to said second position motive drive fingers.

4. The MEMS switch according to claim 3, wherein an interdigital spacing of said first position motive drive fingers relative to said first plurality of said shuttle drive fingers is asymmetric as compared to an interdigital spacing of said second position motive drive fingers and said second plurality of shuttle drive fingers, whereby a first electrostatic force exerted upon said shuttle when said voltage is applied to said first position motive drive fingers is opposed in direction from a second electrostatic force exerted upon said shuttle when said voltage is applied to said second position motive drive fingers.

5. The MEMS switch according to claim 4, wherein said shuttle drive portion is electrically connected to a ground portion of said substrate, electrically isolated from first position motive drive fingers and said second position motive drive fingers.

6. The MEMS switch according to claim 1, wherein an interdigital spacing of said first plurality of common contact fingers relative to adjacent ones of said first plurality of shuttle contact fingers is asymmetric as compared to an interdigital spacing of said second plurality of common contact fingers relative to adjacent ones of said second plurality of shuttle contact fingers.

7. The MEMS switch according to claim 1, wherein an interdigital spacing of said first terminal contact fingers relative to adjacent ones of said first plurality of shuttle contact fingers, is asymmetric as compared to an interdigital spacing of said second terminal contact fingers relative to adjacent ones of said second plurality of shuttle contact fingers.

8. The MEMS switch according to claim 1, wherein said base members, said resilient member and said shuttle are each defined by a plurality of material layers deposited on said substrate.

9. The MEMS switch according to claim 1, further comprising a wall constructed of a plurality of layers of conductive material disposed on said substrate and extending transversely from a major surface of said substrate, said wall substantially enclosing an area containing said shuttle, said first and second terminal contacts, and said common contact.

10. The MEMS switch according to claim 9, further comprising a first, second and third transition portion, each including an outer conductive shield which is formed integral with said wall and each including an inner conductor electrically isolated from said conductive shield which extends through said wall and is respectively connected to one of said common contact, said first terminal contact and said second terminal contact.

11. The MEMS switch according to claim 1, wherein said shuttle has a rest position determined by said first and second resilient members, and said drive portion is configured to exert a first electrostatic force on said shuttle which is arranged to move said shuttle in a first direction from said rest position to said first position along said motion axis, and exerts a second electrostatic force on said shuttle to move said shuttle in a second direction opposed to said first direction, from said rest position to a second position along said motion axis.

12. A MEMS switch, comprising:

first and second opposing base members formed on a substrate;

a shuttle having an elongated length extending over said substrate and resiliently supported at opposing first and second ends thereof by said first and second opposing base members;

a drive portion configured to selectively move said shuttle along a motion axis aligned with said shuttle in response to an applied voltage;

a shuttle switch portion provided at a location along said elongated length including a first switch element formed of a first plurality of shuttle contact fingers extending transversely from opposing sides of a first switch section of said shuttle, and a second shuttle switch element formed of a second plurality of shuttle contact fingers extending transversely from opposing sides of a second switch section of said shuttle;

a common contact fixed relative to said substrate and situated adjacent a common terminal side of said shuttle and comprising a first and second plurality of common contact fingers respectively interdigitated with said first plurality of shuttle contact fingers and said second plurality of shuttle contact fingers;

first and second terminal contacts fixed relative to said substrate and situated adjacent a switched terminal side of said shuttle, said first and second terminal contact respectively comprising first terminal contact fingers and second terminal contact fingers, and respectively interdigitated with said first plurality of shuttle contact fingers, and said second plurality of shuttle contact fingers, said first terminal contact electrically isolated from said second terminal contact;

wherein said shuttle switch portion exclusively forms an electrical connection between said common contact and said first terminal contact when said drive portion moves said shuttle to a first position along said motion axis, and exclusively forms an electrical connection between said common contact and said second terminal contact when said drive portion moves said shuttle to a second position along said motion axis.

13. The MEMS switch according to claim 12, further comprising a wall defined by a plurality of layers of conductive material disposed on said substrate and extending transversely from a major surface of said substrate, said wall substantially enclosing an area containing said shuttle, said first and second terminal contacts, and said common contact.

14. The MEMS switch according to claim 13, further comprising a first, second and third transition portion, each including an outer conductive shield which is formed integral with said wall and each including an inner conductor electrically isolated from said conductive shield which extends through said wall and is respectively connected to one of said common contact, said first terminal contact and said second terminal contact.

15. The MEMS switch according to claim 12, wherein an interdigital spacing of said first plurality of common contact fingers relative to adjacent ones of said first plurality of shuttle contact fingers is asymmetric as compared to an interdigital spacing of said second plurality of common contact fingers relative to adjacent ones of said second plurality of shuttle contact fingers.

16. The MEMS switch according to claim 12, wherein an interdigital spacing of said first terminal contact fingers relative to adjacent ones of said first plurality of shuttle contact fingers, is asymmetric as compared to an interdigital spacing of said second terminal contact fingers relative to adjacent ones of said second plurality of shuttle contact fingers.

17. The MEMS switch according to claim 12, wherein said drive portion is comprised of:

a shuttle drive portion provided at a first location along said elongated length including a plurality of shuttle drive fingers extending transversely from opposing sides of said shuttle, and

a plurality of motive drive fingers interdigitated with said plurality of shuttle drive fingers, said plurality of motive drive fingers fixed with respect to said substrate and disposed on opposing sides of said shuttle drive portion.

18. The MEMS switch according to claim 17, wherein said plurality of motive drive finger are comprised of a plurality of first position motive drive fingers and a plurality of second position motive drive fingers, and said first position motive drive fingers are electrically isolated from said second position motive drive fingers.

19. The MEMS switch according to claim 18, wherein said shuttle drive portion is configured to move said shuttle to said first position when a voltage is applied to said first position motive drive fingers, and configured to move to said second position when said voltage is applied to said second position motive drive fingers.

20. The MEMS switch according to claim 19, wherein an interdigital spacing of said first position motive drive fingers relative to adjacent ones of said first plurality of said shuttle drive fingers is asymmetric as compared to an interdigital spacing of said second position motive drive fingers relative to adjacent ones of said second plurality of shuttle drive fingers, whereby a first electrostatic force exerted upon said shuttle when said voltage is applied to said first position motive drive fingers is opposed in direction from a second electrostatic force exerted upon said shuttle when said voltage is applied to said second position motive drive fingers.

21. The MEMS switch according to claim 12, wherein said base members, said shuttle, said first and second terminal contacts, and said common contact are each defined by a plurality of material layers deposited on said substrate.

22. The MEMS switch according to claim 12, wherein said shuttle has a rest position determined by first and second resilient members respectively disposed on said first and second base members.

23. The MEMS switch according to claim 22 wherein said drive portion is configured to exert a first electrostatic force on said shuttle which is arranged to move said shuttle in a first direction from said rest position to said first position along said motion axis, and to exert a second electrostatic force on said shuttle to move said shuttle in a second direction opposed to said first direction, from said rest position to a second position along said motion axis.

24. A method for switching an electrical signal, comprising:

forming from a plurality of material layers disposed on a substrate;

a shuttle having an elongated length extending over said substrate and is resiliently supported at opposing ends thereof;

a drive portion configured to selectively move said shuttle along a motion axis in two opposing directions aligned with said shuttle in response to an applied voltage;

a shuttle switch portion provided at a location along said elongated length including a first switch element formed of a first plurality of shuttle contact fingers extending transversely from opposing sides of said shuttle, and a second shuttle switch element electrically isolated from said first switch element and formed of a second plurality of shuttle contact fingers extending transversely from opposing sides of said shuttle;

a common contact fixed relative to said substrate and situated adjacent a common terminal side of said shuttle, said common contact comprises a first and second plurality of common contact fingers respectively interdigitated with said first plurality of shuttle contact fingers and said second plurality of shuttle contact fingers;

first and second terminal contacts fixed relative to said substrate and situated adjacent a switched terminal side of said shuttle, said first and second terminal contacts respectively comprising a first plurality of terminal contact fingers and a second plurality of terminal contact fingers respectively interdigitated with said first plurality of shuttle contact fingers and said second plurality of shuttle contact fingers; and

wherein said method comprises selectively exclusively forming with said shuttle switch portion an electrical connection between said common contact and said first terminal contact when said drive portion applies a first electrostatic force to move said shuttle in a first direction from a rest position to a first position along said motion axis, and exclusively forms an electrical connection between said common contact and said second terminal contact when said drive portion applies a second electrostatic force to move said shuttle in a second direction from said rest position to a second position along said motion axis.

25. A MEMS switch comprising:

first and second opposing base members extending transversely away from a surface of a substrate and comprised of a plurality of conductive material layers stacked on said substrate;

a shuttle defined by selected ones of said plurality of conductive material layers which are stacked and arranged to form a beam having an elongated length;

first and second resilient member resiliently supporting opposing ends of said beam to facilitate motion of said beam along a motion axis, said first and second resilient members respectively integrated with said first and second opposing base members and integrated with said shuttle, and formed from selected ones of said plurality of conductive material layers which also form said first and second base members and said shuttle;

a shuttle switch portion including a plurality of shuttle contact fingers extending transversely from opposing sides of the shuttle;

a common contact adjacent one side of the shuttle switch portion, said common contact comprises a first and second plurality of common contact fingers respectively interdigitated with said first plurality of shuttle contact fingers and said second plurality of shuttle contact fingers;

first and second terminal contacts adjacent a second side of the shuttle switch portion opposed from the first side, said first and second terminal contacts respectively comprising a first plurality of terminal contact fingers and a second plurality of terminal contact fingers respectively interdigitated with said first plurality of shuttle contact fingers and said second plurality of shuttle contact fingers; and

wherein the shuttle contact fingers are arranged so that said shuttle switch portion selectively connects the common contact to the first terminal contact when said shuttle is in a first position along said motion axis, to the second terminal contact when in a second position along said motion axis, and isolates the common contact from the first and second terminal contact when said shuttle is in a third position along said motion axis.