Tunable bandpass filter integrated circuit
First Claim
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1. A tunable bandpass filter integrated circuit comprising:
- at least two spaced conductor layers;
a plurality of peripherally spaced backside vias extending between said two spaced conductor layers defining a resonator cavity;
at least one internal backside via comprising a first internal backside via; and
a tunable impedance connected in series with said first internal backside via between said two spaced conductor layers, wherein a center frequency of the tunable bandpass filter is based at least partly on an impedance of said first internal backside via and an impedance of the tunable impedance, and wherein adjusting the impedance of the tunable impedance causes the center frequency of the tunable bandpass filter to be adjusted.
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Abstract
A tunable bandpass filter integrated circuit includes a filter core including at least two spaced conductor layers, a plurality of peripherally spaced backside vias extending between the conductor layers defining a resonator cavity, at least one internal backside via, and a tunable impedance connected in series with the internal backside via between the conductor layers for adjusting the resonance of the cavity.
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Citations
27 Claims
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1. A tunable bandpass filter integrated circuit comprising:
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at least two spaced conductor layers; a plurality of peripherally spaced backside vias extending between said two spaced conductor layers defining a resonator cavity; at least one internal backside via comprising a first internal backside via; and a tunable impedance connected in series with said first internal backside via between said two spaced conductor layers, wherein a center frequency of the tunable bandpass filter is based at least partly on an impedance of said first internal backside via and an impedance of the tunable impedance, and wherein adjusting the impedance of the tunable impedance causes the center frequency of the tunable bandpass filter to be adjusted. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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Specification