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Spring structure, resonator, resonator array and sensor

  • US 9,127,943 B2
  • Filed: 02/29/2012
  • Issued: 09/08/2015
  • Est. Priority Date: 03/04/2011
  • Status: Active Grant
First Claim
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1. A spring structure, comprising:

  • at least two masses coupled in a first direction as opposite phase oscillators using springs connected to the masses, via a u-shaped member between said springs and connected to coupling points of the springs, wherein oblique springs are connected from said coupling points to anchors of base such that longitudinal motion of the u-shaped member is configured to occur perpendicularly to or substantially perpendicularly to said first direction, to thus attenuate in-phase oscillation and enable opposite phase oscillation of the masses, wherein the oblique springs are oblique with respect to both the springs and the u-shaped member.

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