Spring structure, resonator, resonator array and sensor

• US 9,127,943 B2
• Filed: 02/29/2012
• Issued: 09/08/2015
• Est. Priority Date: 03/04/2011
• Status: Active Grant

• Current Assignee: Murata Manufacturing Co Limited
• Original Assignee: Murata Electronics OY (Murata Manufacturing Co Limited)
• Inventors: Blomqvist, Anssi, Ruohio, Jaakko
• Primary Examiner(s): Williams, Hezron E
• Assistant Examiner(s): Sinha, Tarun
• Application Number:
  US13/407,860
• Publication Number:
  US 20120222483A1
• Time in Patent Office: 1,287 Days
• Field of Search: 734/88, 735/040.2, 735/041.2, 735/041.34, 188/379, 267/37.3, 267/136
• US Class Current: 1/1
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis
• CPC Class Codes: G01C 19/574 the devices having two sensing masses in anti-phase motion

Abstract

The invention presents a spring structure (501), which has at least two masses (Ma, Mb) coupled in a first direction as opposite phase oscillators by means of springs (Sh1, Sh2) connected to them (Ma, Mb), via a loop (L, E) between said springs (Sh1, Sh2) connected to their coupling points, wherein oblique springs (Sl45, Sr45) are connected from said coupling points of the loop (L) to the anchors (A) of the base such that the longitudinal motion of the loop (L) is arranged to occur perpendicularly or substantially perpendicularly to said first direction, to thus attenuate opposite phase oscillation other than that of the masses (Ma, Mb). The invention also presents the use of a spring structure in a resonator and/or in a resonator array as well as in a sensor or a sensor comprising system.

Claims

1. A spring structure, comprising:

at least two masses coupled in a first direction as opposite phase oscillators using springs connected to the masses, via a u-shaped member between said springs and connected to coupling points of the springs, wherein oblique springs are connected from said coupling points to anchors of base such that longitudinal motion of the u-shaped member is configured to occur perpendicularly to or substantially perpendicularly to said first direction, to thus attenuate in-phase oscillation and enable opposite phase oscillation of the masses, wherein the oblique springs are oblique with respect to both the springs and the u-shaped member.

2. A spring structure according to claim 1, wherein the oblique springs are symmetrical in relation to the u-shaped member.

3. A spring structure according to claim 1, wherein the oblique springs have the same spring constant.

4. A spring structure according to claim 1, wherein the oblique springs have the same chemical and/or structural composition.

5. A spring structure according to claim 1, wherein the oblique springs have in common at least one of the dimensions length, width or thickness.

6. A double differential spring structure, which has two spring structures according to claim 1 coupled with a connecting stiff member as opposite phase oscillators.

7. A resonator, comprising:

at least one spring structure,

wherein the spring structure comprises at least two masses coupled in a first direction as opposite phase oscillators using springs connected to the masses, via a u-shaped member between said springs and connected to coupling points of the springs.

wherein oblique springs are connected from said coupling points to anchors of a base such that longitudinal motion of the u-shaped member is configured to occur perpendicularly to or substantially perpendicularly to said first direction, to thus attenuate in-phase oscillation and enable opposite phase oscillation of the masses, and

wherein the oblique springs are oblique with respect to both the springs and the u-shaped member.

8. A resonator array, comprising:

at least one resonator, the resonator comprising at least one spring structure,

wherein the spring structure comprise at least two masses coupled in a first direction as opposite phase oscillators using springs connected to the masses, via a u-shaped member between said springs and connected to coupling points of the springs,

wherein oblique springs are connected from said coupling points to anchors of a base such that longitudinal motion of the u-shaped member is configured to occur perpendicularly to or substantially perpendicularly to said first direction, to thus attenuate in-phase oscillation and enable opposite phase oscillation of the masses, and

wherein the oblique spring are oblique with respect to both springs and the u-shaped member.

9. A sensor, comprising:

at least one resonator, the resonator comprising at least one spring structure,

wherein the spring structure comprises at least two masses coupled in a first direction as opposite phase oscillators using springs connected to the masses, via a u-shaped member between said springs and connected to coupling points of the springs,

wherein oblique springs are connected from said coupling points to anchors of a base such that longitudinal motion of the u-shaped member is configured to occur perpendicularly to or substantially perpendicularly to said first direction, to thus attenuate in-phase oscillation and enable opposite phase oscillation of the masses, and

wherein the oblique springs are oblique with respect to both the springs and the u-shaped member.

10. A sensor system, comprising:

a sensor comprising at least one resonator,

wherein the at least one resonator comprises at least one spring structure.

wherein the at least one spring structure comprises at least two masses coupled in a first direction as opposite phase oscillators using springs connected to the masses, via a u-shaped member between said springs and connected to coupling points of the springs,

wherein oblique springs are connected from said coupling points to anchors of a base such that longitudinal motion of the u-shaped member is configured to occur perpendicularly to or substantially perpendicularly to said first direction, to thus attenuate in-phase oscillation and enable opposite phase oscillation of the masses, and

wherein the oblique springs are oblique with respect to both the springs and the u-shaped member.