Wireless voltage sensing device

• US 9,128,124 B2
• Filed: 02/11/2013
• Issued: 09/08/2015
• Est. Priority Date: 02/10/2012
• Status: Active Grant

• Current Assignee: California Institute of Technology
• Original Assignee: California Institute of Technology
• Inventors: Rajagopal, Aditya, Chang, Chieh-Feng, Sadek, Akram Sarwat, Scherer, Axel, Jimenez, Raymond
• Primary Examiner(s): Vazquez, Arleen M
• Assistant Examiner(s): RODAK, LEE E
• Application Number:
  US13/764,612
• Publication Number:
  US 20130207639A1
• Time in Patent Office: 939 Days
• Field of Search: 324/72.5, 324/76.39, 324/97, 324/111, 324/444, 324/713, 324522-530, 324 7641- 7683
• US Class Current: 1/1
• CPC Class Codes: A61B 2560/0214 of power generation or supply
• CPC Class Codes: A61B 2562/0233 Special features of optical sensors or probes classified in A61B5/00
• CPC Class Codes: A61B 2562/164 the sensor is mounted in or on a conformable substrate or carrier
• CPC Class Codes: A61B 2562/166 the sensor is mounted on a specially adapted printed circuit board
• CPC Class Codes: A61B 2562/223 Optical cables therefor
• CPC Class Codes: A61B 5/0031 Implanted circuitry
• CPC Class Codes: A61B 5/24 Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof

Abstract

A voltage sensing apparatus on a semiconductor substrate, including one or more inputs comprising metal contacts, an output comprising a laser transmitter, circuitry electrically connecting and interfacing the inputs to the output; and a power module. A method of fabricating the apparatus is also described.

Claims

1. A voltage sensing apparatus, comprising:

a semiconductor substrate having one or more probe areas each having a length of 2000 micrometers or less and a width of 50 micrometers or less;

one or more inputs, comprising one or more metal contacts on the one or more probe areas, wherein the one or more metal contacts sense voltage comprising one or more voltage waveforms and in response to one or more stimuli;

an output, comprising a laser on the substrate, wherein the laser can transmit one or more signals;

circuitry, on the substrate, electrically connecting and interfacing the one or more inputs to the output, wherein the circuitry can convert the one or more voltage waveforms into the one or more signals;

a power module on the substrate and electrically connected to the circuitry, wherein the power module can provide power to the circuitry and the laser; and

wherein the circuitry, the probe areas, the power module, and the laser are within a surface area of the substrate of 4000 micrometers by 1000 micrometers or less.

2. The apparatus of claim 1, wherein:

the circuitry, the probe areas, the power module, and the laser are within the surface area of the substrate of 3120000 micrometers squared or less and within a height of 200 micrometers or less.

3. The apparatus of claim 1, wherein the circuitry comprises:

(i) a voltage to current converter circuit that converts the voltage into current;

(ii) a modulator circuit including a differential voltage controlled oscillator (VCO), wherein the current modulates the differential VCO'"'"'s center frequency to form one or more VCO waveforms;

(iii) a mixer circuit that heterodynes the one or more VCO waveforms to form one or more heterodyned waveforms; and

(iv) a laser circuit that drives and modulates the laser with the one or more heterodyned waveforms, wherein the laser outputs electromagnetic radiation that transmits the one or more signals comprising the one or more heterodyned waveforms off the apparatus and the semiconductor substrate; and

wherein the circuitry consumes 400 microwatts of power or less; and

the voltage sensing apparatus further comprises;

a photodetector detecting the electromagnetic radiation and forming a detected signal in response thereto;

a demodulator circuit connected to the photodetector, wherein the demodulator circuit demodulates the detected signal to reproduce the voltage.

4. The apparatus of claim 3, wherein the differential voltage controlled oscillator has instability (no direct current equilibrium).

5. The apparatus of claim 1, wherein:

the substrate comprises silicon;

the one or more probe areas are separated by 200 micrometers or less;

the one or more metal contacts have an area of 20 micrometers by 20 micrometers or less; and

the circuitry has a length of 500 micrometers or less and a width of 500 micrometers or less.

6. The apparatus of claim 1, wherein:

the one or more metal contacts have an input impedance of more than 1 MegaOhm;

the power module provides more than 1.4 milliwatts of input electrical power;

the circuitry consumes 400 microwatts of power or less and has voltage rails of +/−

2V or less; and

the laser emits the one or more signals comprising modulated electromagnetic radiation having a transmission frequency of 20 Megahertz or less.

7. The apparatus of claim 1, wherein the circuitry and the laser operate with a combined power of less than 400 microwatts, provided by the power module.

8. The apparatus of claim 7, wherein the power module is a battery and the apparatus further comprises:

an optical fiber connected to the laser so that the laser transmits the electromagnetic radiation along the optical fiber, or

the laser emits near infrared light, or light that is transmitted through a transmission window of human tissue.

9. The apparatus of claim 1, wherein the power module is a photovoltaic device and the apparatus further comprises:

a fiber connected to the photovoltaic device; and

a length of the fiber that extends to a light source when the substrate is implanted, so that the photovoltaic device receives light along the fiber.

10. The apparatus of claim 1, wherein the apparatus is biocompatible and bioimplantable on or inside a human or animal tissue or a human or animal being and the voltage apparatus includes a microvolt voltage sensitivity.

11. The apparatus of claim 1, wherein the laser emits near infrared light, or light that is transmitted through a transmission window of human tissue.

12. The apparatus of claim 1, wherein the apparatus is an integrated semiconductor circuit chip biocompatible and bioimplantable on or inside tissue or a being such that the one or more metal contacts receive the one or more stimuli from neurons.

13. The apparatus of claim 1, wherein the semiconductor substrate comprises silicon and the silicon between adjacent probe areas is completely removed.

14. The apparatus of claim 1, wherein the semiconductor substrate comprises silicon and the probe areas comprise a height of at least 25 micrometers and/or the silicon and has a thickness of 25 micrometers or less.

15. The apparatus of claim 1, further comprising:

a thermal oxide on both sides of the substrate;

a stiction layer on the thermal oxide on the one or more probe areas;

the one or more metal contacts defined on the stiction layer;

first metallization electrically connecting the one or more metal contacts to the circuitry;

second metallization electrically connecting the circuitry to the laser; and

third metallization electrically connecting the power module to the circuitry.

16. The apparatus of claim 1, wherein the circuitry consumes 400 microwatts of power or less.

17. A method of fabricating a voltage sensing device, comprising:

providing semiconductor substrate comprising silicon, having one or more probe areas each having a length of 2000 micrometers or less and a width of 50 micrometers or less;

providing one or more inputs comprising one or more metal contacts on the probe areas, wherein the one or more metal contacts sense voltage comprising one or more voltage waveforms in response to one or more stimuli external to the substrate;

providing circuitry on the semiconductor substrate, wherein the circuitry interfaces the inputs to an output and includes;

(i) a voltage to current converter circuit on the substrate and electrically connected to the metal contacts, wherein the voltage to current converter circuit converts the one or more voltage waveforms into one or more current waveforms,

(ii) a modulator circuit on the substrate and electrically connected to the voltage to current converter circuit, wherein the modulator circuit modulates the one or more current waveforms to form one or more modulated waveforms;

providing the output comprising a laser on the semiconductor substrate, electrically connected to the modulator circuit, wherein the laser transmits the modulated waveform off the substrate; and

providing a power module on the semiconductor substrate and in electrical connection with the circuitry, wherein the power module provides power to the laser and the circuitry.

18. The method of claim 17, further comprising:

lithographically defining and etching the one or more probe areas on the semiconductor substrate;

depositing a thermal oxide on both sides of the substrate;

depositing a stiction layer on thermal oxide on the one or more probe areas;

defining and depositing the one or more metal contacts on the stiction layer;

depositing metallization to electrically connect the one or more metal contacts to the circuitry;

depositing metallization to electrically connect the circuitry to the laser; and

depositing metallization to electrically connect the power module to the circuitry.

19. A voltage sensing apparatus, comprising:

a semiconductor substrate having a probe area having a length of 2000 micrometers or less and a width of 50 micrometers or less;

a metal contact on the probe area, wherein the metal contact senses voltage, producing a voltage waveform in response to a stimulus;

circuitry comprising;

a current mirror that converts the voltage waveform into a current waveform; and

current starved delay elements configured in a ring oscillator geometry in a voltage controlled oscillator (VCO), the current starved delay elements generating a pulse waveform in response to the current waveform and control voltages; and

wherein the pulse waveform has a frequency corresponding to a magnitude of the voltage waveform; and

a laser that transmits the pulse waveform to an external reader for demodulation so that the voltage waveform can be read; and

a power module on the substrate and electrically connected to the circuitry, wherein the power module can provide power to the circuitry and the laser; and

wherein the circuitry, the probe area, the power module, and the laser are within a surface area of the substrate of 4000 micrometers by 1000 micrometers or less.

20. The apparatus of claim 19, wherein:

the ring oscillator geometry includes a first differential ring element and a second differential ring element each having first and second inputs and first and second outputs;

the inputs and outputs of the differential ring elements are connected via inverters;

the first and second outputs of the first differential ring element are connected to the first and second inputs of the second differential ring element, respectively, and

the first output of second differential ring element is connected to the second input of the first differential ring element and the second output of second differential ring element is connected to the first input of the first differential ring element.