Charged particle beam apparatus

• US 9,129,773 B2
• Filed: 06/03/2013
• Issued: 09/08/2015
• Est. Priority Date: 06/08/2012
• Status: Active Grant

• Current Assignee: Hitachi High-Tech Company Limited (Hitachi, Ltd.)
• Original Assignee: Hitachi High-Technologies Corporation (Hitachi, Ltd.)
• Inventors: Ando, Tohru, Shigeto, Kunji, Tamayama, Shotaro, Narita, Yusuke
• Primary Examiner(s): Wells, Nikita
• Application Number:
  US14/406,415
• Publication Number:
  US 20150144804A1
• Time in Patent Office: 827 Days
• Field of Search: 250/423.R, 250/310, 250/306, 250/311, 250/396.R, 250/398, 250/492.1, 250/492.3
• US Class Current: 1/1
• CPC Class Codes: H01J 2237/2007 Holding mechanisms
• CPC Class Codes: H01J 2237/202 Movement
• CPC Class Codes: H01J 2237/20285 computer-controlled
• CPC Class Codes: H01J 2237/22 Treatment of data
• CPC Class Codes: H01J 2237/2801 Details
• CPC Class Codes: H01J 2237/2809 characterised by the imaging problems involved
• CPC Class Codes: H01J 37/20 Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
• CPC Class Codes: H01J 37/22 Optical , image processing or photographic arrangements associated with the tube
• CPC Class Codes: H01J 37/261 Details
• CPC Class Codes: H01J 37/265 Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
• CPC Class Codes: H01J 37/28 with scanning beams H01J37/268, H01J37/292, H01J37/2955 take precedence

Abstract

In many cases, the charged particle beam apparatus is used basically for observation at a magnification of 10,000 times or higher. It is thus difficult to recognize how the orientation of a sample seen with the naked eye corresponds to the origination of the sample appearing on an acquired image. This makes it difficult intuitively to grasp the tilt direction and other details of the sample. An object of this invention is to provide a charged particle beam apparatus allowing the orientation and the tilted state of the sample to be grasped intuitively. The apparatus includes: a charged particle beam source that emits a charged particle beam; a charged particle beam optical system that irradiates the sample with the charged particle beam; a platform on which the sample is placed; a stage capable of moving the platform at least in a tilt direction; a display unit that displays a tilted state of the platform by use of a simulated image of the platform; an operation input unit that allows a user to designate the position and direction of the sample for observation; and a control unit that controls the amount of movement of the stage based on a signal input from the operation input unit.

Claims

1. A charged particle beam apparatus comprising:

a charged particle beam source that emits a charged particle beam;

a charged particle beam optical system that irradiates a sample with the charged particle beam;

a platform on which the sample is placed;

a stage capable of moving the platform in a parallel, tilted, and rotation manner, the stage having a tilted axis;

a display unit that displays an observation image of the sample, a simulated image of the platform to represent a tilted state and an observation target portion of the platform, and a two-dimensional display of the platform;

an operation input unit capable for desirably setting the tilted axis and a tilted angle on the simulated image; and

a control unit for matching the tilted axis of the stage with the tilted axis of the simulation image by moving the platform in a parallel and rotation manner of the stage based on signals inputted from the operation input unit, the control unit matching a tilted angle of the stage with a tilted angle of the simulated image, the control unit executing raster rotation of the stage in a reverse direction with the rotation angle executed for matching the tilted axis of the stage with the tilted axis of the simulated image, so that only a direction of a center line of tilting of the platform is changed on the observation image without the stage actually rotating,

wherein a warning is issued if a state of the stage does not match a state indicated by the simulated image of the platform.

3. The charged particle beam apparatus according to claim 1 or 2,

wherein the simulated image represents an SEM image on a surface of the platform.

4. The charged particle beam apparatus according to claim 1 or 2,

wherein the simulated image is an image of a CCD camera on a surface of the platform.

5. The charged particle beam apparatus according to claim 1 or 2,

wherein the simulated image represents an overall external shape of the platform.

6. The charged particle beam apparatus according to claim 1 or 2,

wherein the simulated image is used to designate the observation target portion of the sample and the direction in which the observation of the sample is performed.

7. The charged particle beam apparatus according to claim 1 or 2, further comprising:

an imaging device for imaging the sample;

wherein an image obtained by the imaging device is superimposed on the simulated image of the platform when displayed.

8. The charged particle beam apparatus according to claim 1 or 2,

wherein the simulated image is displayed in a manner permitting a grasp of the tilted state of the stage within a display surface of the display unit, the tilted state of the stage being relative to the direction perpendicular to the display surface.

9. The charged particle beam apparatus according to claim 1 or 2,

wherein an image of at least a part of the components included in the charged particle beam optical system is displayed in conjunction with the simulated image of the platform.

10. The charged particle beam apparatus according to claim 9,

wherein the charged particle beam optical system includes a detector that detects secondary particles obtained from the sample irradiated with the charged particle beam;

and

wherein the part of the components included in the charged particle beam optical system is the detector.

11. The charged particle beam apparatus according to claim 9,

wherein the part of the components included in the charged particle beam optical system faces the sample.

12. The charged particle beam apparatus according to claim 1 or 2, further comprising:

a vacuum pump that evacuates a path through which the charged particle beam passes from the charged particle beam source to the sample, the path being evacuated to a predetermined degree of vacuum;

wherein the control unit performs control to tilt the stage during a waiting time in which the predetermined degree of vacuum is reached.

13. The charged particle beam apparatus according to claim 1 or 2,

wherein the point of view of the simulated image is arranged to be changed.

14. The charged particle beam apparatus according to claim 1 or 2,

wherein a mark representing the angle of rotation of the simulated image of the platform relative to a vertical axis is displayed on the simulated image of the platform.

15. The charged particle beam apparatus according to claim 1 or 2,

wherein the mark displayed on the simulated image of the platform is operated to control the angle of rotation of the simulated image relative to a vertical axis.

16. The charged particle beam apparatus according to claim 1 or 2,

wherein the operation input unit is capable of moving the simulated image of the platform without moving the stage.

17. The charged particle beam apparatus according to claim 1 or 2,

wherein the operation input unit includes an input means for moving the stage in such a manner that the platform reaches the state displayed on the simulated image of the platform.

18. The charged particle beam apparatus according to claim 1 or 2,

wherein a warning is issued if the state of the stage does not match the state indicated by the simulated image of the platform.

19. The charged particle beam apparatus according to claim 1 or 2,

wherein a warning is issued if the input information from the operation input unit does not match the state indicated by the simulated image of the platform.

2. A charged particle beam apparatus comprising:

a charged particle beam source that emits a charged particle beam;

a charged particle beam optical system that irradiates a sample with the charged particle beam;

a platform on which the sample is placed;

a stage capable of moving the platform in a parallel, tilted, and rotation manner, the stage having a tilted axis;

a display unit that displays an observation image of the sample, a simulated image of the platform to represent a tilted state and an observation target portion of the platform, and a two-dimensional display of the platform;

an operation input unit capable for desirably setting the tilted axis and a tilted angle on the simulated image; and

a control unit for matching the tilted axis of the stage with the tilted axis of the simulation image by moving the platform in a parallel and rotation manner of the stage based on signals inputted from the operation input unit, the control unit matching a tilted angle of the stage with a tilted angle of the simulated image, the control unit executing raster rotation of the stage in a reverse direction with the rotation angle executed for matching the tilted axis of the stage with the tilted axis of the simulated image, so that only a direction of a center line of tilting of the platform is changed on the observation image without the stage actually rotating,

wherein a warning is issued if inputted information from the operation input unit does not match a state indicated by the simulated image of the platform.