Bipolar microelectronic device

• US 9,136,794 B2
• Filed: 06/21/2012
• Issued: 09/15/2015
• Est. Priority Date: 06/22/2011
• Status: Active Grant

• Current Assignee: Research Triangle Institute International
• Original Assignee: Research Triangle Institute International
• Inventors: Stoner, Brian, Piascik, Jeffrey
• Primary Examiner(s): KINKEAD, ARNOLD M
• Application Number:
  US14/116,111
• Publication Number:
  US 20140104013A1
• Time in Patent Office: 1,181 Days
• Field of Search: 250/427, 250/423.R, 250/492.1, 250/282, 250/290, 250/294, 250/292, 331/116.M, 331/154
• US Class Current: 1/1
• CPC Class Codes: H01J 49/14 using particle bombardment, e.g. ionisation chambers
• CPC Class Codes: H01J 49/26 Mass spectrometers or separator tubes
• CPC Class Codes: H01J 49/408 with multiple changes of direction, e.g. by using electric or magnetic sectors, closed-loop time-of-flight
• CPC Class Codes: H01J 49/4215 Quadrupole mass filters H01J49/4225 takes precedence
• CPC Class Codes: H01L 29/0657 characterised by the shape of the body
• CPC Class Codes: H01L 29/73 Bipolar junction transistors
• CPC Class Codes: H03C 1/16 by means of discharge device having at least three electrodes H03C1/28 - H03C1/34, H03C1/50, H03C1/52, H03C1/62 take precedence

Abstract

An apparatus, system, and method are disclosed for modulating electric current. An electron source electrode provides a flow of electrons in a partial vacuum environment. An ionizable gas in the partial vacuum environment forms positively charged ion particles in response to impact with the electrons from the electron source electrode. Application of a bias voltage differential between a first bias electrode and a second bias electrode in the partial vacuum environment forms an electric field gradient in a path of the flow of electrons. A collector electrode in the partial vacuum environment collects more electrons than ion particles when a collector electrode input voltage is above a threshold, and collects more ion particles than electrons when the collector electrode input voltage is below the threshold.

Claims

1. An apparatus to modulate electric current, the apparatus comprising:

an electron source electrode in a partial vacuum environment, the electron source electrode providing a flow of electrons;

an ionizable gas in the partial vacuum environment, at least a portion of the ionizable gas forming ion particles in response to impact with the electrons from the electron source electrode, the ion particles having a positive electric charge;

a first bias electrode and a second bias electrode in the partial vacuum environment, the first and second bias electrodes forming an electric field gradient in a path of the flow of electrons in response to application of a bias voltage differential between the first and second bias electrodes, wherein the first bias electrode has a positive voltage and the second bias electrode has a negative voltage; and

a collector electrode in the partial vacuum environment, the collector electrode collecting more electrons than ion particles in response to a collector electrode input voltage being above a threshold, and the collector electrode collecting more ion particles than electrons in response to the collector electrode input voltage being below the threshold, wherein the first bias electrode collects at least a portion of the electrons in response to the collector electrode input voltage being below the threshold and the second bias electrode collecting at least a portion of the ion particles in response to the collector electrode input voltage being above the threshold.

2. The apparatus of claim 1, wherein the collector electrode comprises a split electrode, the split electrode comprising an input electrode that receives the collector electrode input voltage and an output electrode that provides an output voltage based on the collected electrons and ion particles.

3. The apparatus of claim 2, wherein the output electrode provides a negative output voltage in response to the collector electrode input voltage being above the threshold and provides a positive output voltage in response to the collector electrode input voltage being below the threshold such that a polarity of the output voltage is inverted from a polarity of the collector electrode input voltage over at least a predefined range of collector electrode input voltages.

4. The apparatus of claim 2, wherein the input electrode comprises a charge modulation grid disposed adjacent to the output electrode, the charge modulation grid comprising one or more openings, the electrons and the ion particles passing through the one or more openings to reach the output electrode.

5. The apparatus of claim 1, further comprising an extraction grid disposed adjacent to the electron source electrode, the extraction grid drawing the electrons from the electron source electrode to provide the flow of electrons in response to a positive voltage differential between the extraction grid and the electron source electrode.

6. The apparatus of claim 5, wherein the electron source electrode comprises a carbon nanotube field emitter.

7. The apparatus of claim 1, wherein the electron source electrode, the first and second bias electrodes, and the collector electrode are formed on a micro-electro-mechanical systems (“

MEMS”

) substrate.

8. The apparatus of claim 7, wherein one or more of the electron source electrode, the first and second bias electrodes, and the collector electrode comprises a hinged polysilicon panel that is formed on the MEMS substrate, rotated along a hinged axis away from the MEMS substrate, and locked into place.

9. The apparatus of claim 1, wherein the ionizable gas comprises a noble gas.

10. The apparatus of claim 9, wherein the ionizable gas further comprises a quench gas with a lower ionization potential than the noble gas, the noble gas and the quench gas forming a Penning mixture.

11. A system to modulate electric current, the system comprising:

a substrate;

a sealed packaging enclosing at least a surface of the substrate forming a partial vacuum environment between the sealed packaging and the surface of the substrate;

a bipolar microelectronic device disposed on the surface of the substrate in the partial vacuum environment, the bipolar microelectronic device comprising,

an electron source electrode that provides a flow of electrons;

an ionizable gas in the partial vacuum environment, at least a portion of the ionizable gas forming ion particles in response to impact with the electrons from the electron source electrode, the ion particles having a positive electric charge;

a first bias electrode and a second bias electrode that form an electric field gradient in a path of the flow of electrons in response to an application of a bias voltage differential between the first and second bias electrodes;

a collector electrode that collects more electrons than ion particles in response to a collector electrode input voltage being above a threshold and collects more ion particles than electrons in response to the collector electrode input voltage being below the threshold; and

a plurality of electrical connections of the substrate, the electrical connections in electrical communication with the bipolar microelectronic device to provide the collector electrode input voltage to the collector electrode and to receive an output voltage from the collector electrode.

12. The system of claim 11, further comprising one or more additional bipolar microelectronic devices disposed on the surface of the substrate in the partial vacuum environment.

13. The system of claim 12, wherein the bipolar microelectronic device and the one or more additional bipolar microelectronic devices are arranged in a digital logic circuit.

14. The system of claim 13, further comprising an electronic device comprising the substrate, the sealed packaging, the bipolar microelectronic device, and the one or more additional bipolar microelectronic devices.

15. A method for modulating electric current, the method comprising:

providing a flow of electrons from an electron source in a partial vacuum environment;

forming ion particles from an ionizable gas in the partial vacuum environment in response to impacting the ionizable gas with the electrons, the ion particles having a positive electric charge;

applying a bias voltage differential between first and second bias electrodes in the partial vacuum environment to form an electric field gradient in a path of the flow of electrons;

collecting more electrons than ion particles at a collector electrode in the partial vacuum environment in response to a collector electrode input voltage being above a threshold;

collecting at least a portion of the electrons at the first bias electrode in response to the collector electrode input voltage being below the threshold, the first bias electrode having a positive voltage;

collecting more ion particles than electrons at the collector electrode in the partial vacuum environment in response to the collector electrode input voltage being below the threshold; and

collecting at least a portion of the ion particles at the second bias electrode in response to the collector electrode input voltage being above the threshold, the second bias electrode having a negative voltage.

16. The method of claim 15, further comprising,

receiving the collector electrode input voltage at an input electrode of the collector electrode;

and

providing an output voltage at an output electrode of the collector electrode based on the collected electrons and ion particles.

17. The method of claim 15, further comprising providing a positive voltage differential between an extraction grid and the electron source electrode to draw the electrons from the electron source electrode.