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Microelectromechanical system with a micro-scale spring suspension system and methods for making the same

  • US 9,136,822 B2
  • Filed: 08/19/2013
  • Issued: 09/15/2015
  • Est. Priority Date: 08/19/2013
  • Status: Active Grant
First Claim
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1. An integrated Microelectromechanical System (“

  • MEMS”

    ) device, comprising;

    a substrate;

    a MEMS filter device mechanically suspended above a major surface of the substrate;

    a first gas gap between the major surface of the substrate and the MEMS filter device; and

    an isolation platform mechanically connected to the substrate and comprising a frame structure framing a periphery of the MEMS filter device and at least one first resilient component coupled between the frame structure and the MEMS filter device, where the isolation platform absorbs vibrations from an environment prior to reaching the MEMS filter device.

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