Microelectromechanical system with a micro-scale spring suspension system and methods for making the same
First Claim
1. An integrated Microelectromechanical System (“
- MEMS”
) device, comprising;
a substrate;
a MEMS filter device mechanically suspended above a major surface of the substrate;
a first gas gap between the major surface of the substrate and the MEMS filter device; and
an isolation platform mechanically connected to the substrate and comprising a frame structure framing a periphery of the MEMS filter device and at least one first resilient component coupled between the frame structure and the MEMS filter device, where the isolation platform absorbs vibrations from an environment prior to reaching the MEMS filter device.
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Accused Products
Abstract
Integrated Microelectromechanical System (“MEMS”) devices and methods for making the same. The MEMS devices comprise a substrate (200) and a MEMS filter device (100) mechanically suspended above a major surface of the substrate. A first gas gap (202) exists between the major surface of the substrate and the MEMS filter device. An isolation platform (600) is provided to absorb vibrations from an external environment prior to reaching the MEMS filter device. In this regard, the isolation platform comprises: a frame structure (610) framing a periphery of the MEMS filter device; and at least one resilient component (612-618) coupled between the frame structure and the MEMS filter device. The frame structure is mechanically connected to the substrate. Electronic circuitry is connected to the MEMS filter device via a resilient interconnection (204, 206) that is movable in at least one direction of the vibrations.
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Citations
21 Claims
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1. An integrated Microelectromechanical System (“
- MEMS”
) device, comprising;a substrate; a MEMS filter device mechanically suspended above a major surface of the substrate; a first gas gap between the major surface of the substrate and the MEMS filter device; and an isolation platform mechanically connected to the substrate and comprising a frame structure framing a periphery of the MEMS filter device and at least one first resilient component coupled between the frame structure and the MEMS filter device, where the isolation platform absorbs vibrations from an environment prior to reaching the MEMS filter device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
- MEMS”
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12. A method for making an integrated Microelectromechanical System (“
- MEMS”
) device, comprising;mechanically suspending a MEMS filter device above a major surface of a substrate; framing a periphery of the MEMS filter device with a frame structure of an isolation platform that is mechanically coupled to the substrate; coupling at least one resilient component between the frame structure and the MEMS filter device; and absorbing, by the resilient component, vibrations from an external environment prior to reaching the MEMS filter device. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21)
- MEMS”
Specification