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Apparatus for prevention of pressure transients in microphones

  • US 9,137,595 B2
  • Filed: 11/08/2013
  • Issued: 09/15/2015
  • Est. Priority Date: 11/14/2012
  • Status: Expired due to Fees
First Claim
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1. An acoustic device comprising:

  • a substrate;

    a microelectromechanical system (MEMS) apparatus, the MEMS apparatus including a diaphragm and a backplate;

    a cover, the cover coupled to the substrate and enclosing the MEMS apparatus;

    a port, the port disposed through the substrate, the MEMS apparatus being disposed over the port;

    a valve, the valve disposed over the port and opposite the MEMS apparatus, the valve being configured to automatically without human intervention assume a closed position during the occurrence of a high pressure event and prevent a pressure transient from damaging the MEMS apparatus, the valve being configured to automatically without human intervention assume an open position during the absence of a high pressure event.

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