CPC Class Codes
C23C 16/45534
Use of auxiliary reactants ...
H01L 21/02178
the material containing alu...
H01L 21/02181
the material containing haf...
H01L 21/02189
the material containing zir...
H01L 21/022
the layer being a laminate,...
H01L 21/0228
deposition by cyclic CVD, e...
H01L 21/28088
the final conductor layer n...
H01L 21/28194
by deposition, e.g. evapora...
H01L 21/3115
Doping the insulating layers
H01L 21/3141
Deposition using atomic lay...
H01L 21/3143
composed of alternated laye...
H01L 21/3162
on a silicon body
H01L 21/31641
Deposition of Zirconium oxi...
H01L 21/31645
Deposition of Hafnium oxide...
H01L 29/4966
the conductor material next...
H01L 29/518
the insulating material con...