Systems and methods for measuring the stress profile of ion-exchanged glass

• US 9,140,543 B1
• Filed: 05/03/2012
• Issued: 09/22/2015
• Est. Priority Date: 05/25/2011
• Status: Active Grant

• Current Assignee: Corning Incorporated
• Original Assignee: Corning Incorporated
• Inventors: Allan, Douglas Clippinger, Koch, Karl William III, Roussev, Rostislav Vatchev, Schaut, Robert Anthony, Schneider, Vitor Marino
• Primary Examiner(s): Le, John H
• Application Number:
  US13/463,322
• Time in Patent Office: 1,237 Days
• Field of Search: 702/42, 702/159, 356/32, 356/364, 65/301.4
• US Class Current: 1/1
• CPC Class Codes: G01B 11/16 for measuring the deformation in a solid, e.g. optical strain gauge
• CPC Class Codes: G01L 1/242 the material being an optical fibre

Abstract

Systems and methods for measuring the stress profile of ion-exchanged glass are disclosed, based on the TM and TE guided mode spectra of the optical waveguide formed in the ion-exchanged glass. The method includes digitally defining from the TM and TE guided mode spectra positions of intensity extrema, and calculating respective TM and TE effective refractive indices from these positions. The method also includes calculating TM and TE refractive index profiles n_TM(z) and n_TE(z) using either an inverse WKB calculation or a fitting process that employs assumed functions for n_TM(z) and n_TE(z). The method also includes calculating the stress profile S(z)=[n_TM(z)−n_TE(z)]/SOC, where SOC is a stress optic coefficient for the glass substrate. Systems for performing the method are also disclosed.

Claims

1. A method of measuring a stress profile of an ion-exchanged glass substrate based on TM and TE guided mode spectra from an optical waveguide defined in part by an ion-exchange region, the method comprising:

digitally defining from the TM and TE guided mode spectra respective TM and TE intensity profiles corresponding to TM and TE guided modes, including;

a) coupling light into the optical waveguide through a coupling prism optically coupled to the optical waveguide to define a prism-waveguide interface;

b) reflecting light from the prism-waveguide interface, the reflected light representative of the TM and TE guided mode spectra; and

c) detecting the reflected light with a photodetector array;

determining positions of intensity extrema of the TM and TE intensity profiles;

calculating respective TM and TE effective refractive indices from the positions;

calculating TM and TE refractive index profiles n_TM(z) and n_TE(z) where z is a distance from a substrate surface by performing one of a) an inverse WKB calculation based on the TM and TE effective refractive indices, or b) fitting calculated guided mode spectra to the TM and TE guided mode spectra using one or more respective assumed functions for n_TM(z) and n_TE(z); and

calculating the stress profile S(z)=[n_TM(z)−

n_TE(z)]/SOC, where SOC is a stress optic coefficient for the glass substrate.

2. The method according to claim 1, further comprising:

determining initial positions of the intensity extrema of the TM and TE intensity profiles; and

applying curve-fitting to the TM and TE intensity profiles, including the initial intensity extrema positions, to establish the intensity extrema positions.

3. The method according to claim 2, further comprising:

digitally defining the TM and TE guided mode spectra including imaging of light representative of the TM and TE guided mode spectra onto a photodetector having pixels with a pixel size; and

performing the curve-fitting to determine the positions of the TM and TE intensity extrema with a resolution smaller than the pixel size.

4. The method according to claim 1, further comprising noise-averaging the TM and TE intensity profiles.

5. The method according to claim 1, further comprising performing at least one of low-pass and band-pass filtering of the TM and TE guided mode spectra.

6. The method according to claim 1, further comprising one of a) providing the light to the coupling prism by scanning the light through a range of angles relative to a surface normal of the coupling prism and b) providing the light to the coupling prism as one or more convergent light beams without scanning the convergent light beams.

7. The method according to claim 1, further comprising calculating from the stress profile S(z) at least one of the following:

a compressive surface stress CS(0);

an estimated center tension CT;

an integral of the stress; and

an integral of the squared stress.

8. The method according to claim 1, further comprising the intensity extrema being intensity minima.

9. A method of measuring a stress profile formed in an ion-exchanged glass substrate having a surface and a stress optic coefficient SOC, comprising:

digitally capturing TM and TE guided mode spectra of an optical waveguide defined by the ion-exchanged glass substrate, including performing said digitally capturing the TM and TE guided mode spectra by imaging light representative of the TM and TE guided mode spectra onto a photodetector having pixels with a pixel size, and wherein the curve-fitting includes determining the positions of the TM and TE intensity extrema with a resolution smaller than the pixel size;

determining positions of intensity extrema of the TM and TE guided mode spectra

by applying curve-fitting to portions of the TM and TE guided mode spectra to establish the respective TM and TE intensity extrema;

calculating respective TM and TE effective refractive indices from the positions;

calculating TM and TE refractive index profiles n_TM(z) and n_TE(z) where z is a distance from the substrate surface by performing one of a) an inverse WKB calculation based on TM and TE effective refractive indices, respectively, or b) fitting calculated guided mode spectra to the TM and TE guided mode spectra using one or more assumed functions for n_TM(z) and n_TE(z); and

calculating the stress profile S(z)=[n_TM(z)−

n_TE(z)]/SOC.

10. The method according to claim 9, further comprising noise-averaging at least portions the TM and TE guided mode spectra.

11. The method according to claim 9, further comprising performing at least one of low-pass and band-pass filtering of the TM and TE guided mode spectra.

12. The method according to claim 9, further comprising:

optically contacting a prism to the glass substrate surface to form a prism-waveguide interface;

coupling TM and TE light into the optical waveguide through the prism-waveguide interface as respective TM and TE guided modes while reflecting a portion of the TM and TE light from the prism-waveguide interface, wherein the reflected light is representative of the TM and TE guided mode spectra.

13. A system for measuring a stress profile of an ion-exchanged glass substrate having a surface, a stress optic coefficient SOC and an ion-exchange region that in part defines an optical waveguide, comprising:

a photodetector array having an array of pixels and configured to detect light representative of TM and TE guided mode spectra of the optical waveguide and form therefrom a digital representation of the TM and TE guided mode spectra;

a controller configured to receive the digital representation of the TM and TE guided mode spectra, the controller having instructions stored in a computer-readable medium that cause the controller to carry out the following calculation to calculate the positions of intensity extrema in the TM and TE guided mode spectra to sub-pixel resolution;

determine positions of intensity extrema in the TM and TE guided mode spectra;

calculate respective TM and TE effective refractive indices from the positions;

calculate, from the TM and TE effective refractive indices, TM and TE refractive index profiles n_TM(z) and n_TE(z), where z is a distance from the substrate surface, either by performing an inverse WKB calculation or by fitting calculated guided mode spectra to the TM and TE guided mode spectra using one or more assumed functions for n_TM(z) and n_TE(z); and

calculate the stress profile S(z)=[n_TM(z)−

n_TE(z)]/SOC.

14. The system according to claim 13, further comprising:

a light source unit configured to generate light;

a prism coupler assembly having a coupling prism optically contacted to the upper surface of the ion-exchanged glass substrate to define a prism-waveguide interface;

a photodetector unit that includes the photodetector array; and

the prism coupler assembly being operably arranged relative to the light source unit and the photodetector unit to receive the light from the light source unit at the prism-waveguide interface and form therefrom reflected light, the reflect light being representative of TM and TE guided mode spectra of the optical waveguide.

15. The system according to claim 14, further comprising:

the photodetector unit including first and second polarizers having orthogonal polarizations and configured so that first and second portions of the reflected light respectively pass through the first and second polarizers to define respective TM and TE regions on the photodetector array corresponding to the TM and the TE guided mode spectra.

16. The system according to claim 13, wherein the light source unit and the photodetector unit are moveable relative to the prism coupler assembly.