Emitting device with improved extraction

• US 9,142,741 B2
• Filed: 06/14/2012
• Issued: 09/22/2015
• Est. Priority Date: 06/15/2011
• Status: Active Grant

• Current Assignee: Sensor Electronic Technology Incorporated (Seoul Semiconductor Co., Ltd.)
• Original Assignee: Sensor Electronic Technology Incorporated (Seoul Semiconductor Co., Ltd.)
• Inventors: Shatalov, Maxim S., Dobrinsky, Alexander, Shur, Michael, Gaska, Remigijus
• Primary Examiner(s): Stultz, Jessica
• Assistant Examiner(s): Alam, Mohammed R
• Application Number:
  US13/517,711
• Publication Number:
  US 20140008675A1
• Time in Patent Office: 1,195 Days
• Field of Search: 257/98, 257/E33.074
• US Class Current: 1/1
• CPC Class Codes: F21V 5/002 using microoptical elements for redirecting or diffusing light
• CPC Class Codes: H01L 2933/0083 Periodic patterns for optical field-shaping in or on the semiconductor body or semiconductor body package, e.g. photonic bandgap structures
• CPC Class Codes: H01L 33/0045 the devices being superluminescent diodes
• CPC Class Codes: H01L 33/007 comprising nitride compounds
• CPC Class Codes: H01L 33/20 with a particular shape, e.g. curved or truncated substrate
• CPC Class Codes: H01L 33/22 Roughened surfaces, e.g. at the interface between epitaxial layers
• CPC Class Codes: H01L 33/60 Reflective elements
• CPC Class Codes: Y10T 29/49 Method of mechanical manufacture

Abstract

A profiled surface for improving the propagation of radiation through an interface is provided. The profiled surface includes a set of large roughness components providing a first variation of the profiled surface having a characteristic scale approximately an order of magnitude larger than a target wavelength of the radiation. The profiled surface also includes a set of small roughness components superimposed on the set of large roughness components and providing a second variation of the profiled surface having a characteristic scale on the order of the target wavelength of the radiation.

Claims

1. A device comprising:

an at least partially transparent layer having a first side and a second side, wherein radiation enters the at least partially transparent layer through the first side and exits the at least partially transparent layer through the second side, and wherein at least one of the first side or the second side comprises a profiled surface, the profiled surface including;

a set of large roughness components providing a first variation of the profiled surface having a characteristic scale approximately an order of magnitude larger than a target wavelength of the radiation; and

a set of small roughness components providing a second variation of the profiled surface having a characteristic scale on the order of the target wavelength of the radiation, wherein the set of small roughness components are superimposed on the set of large roughness components, and wherein a graded refractive index along a height of each small roughness component in the set of small roughness components decreases substantially linearly along the height, and wherein a refractive index at a particular height of a small roughness component corresponds to an average of a refractive index of a material forming the small roughness component and a refractive index of a material adjacent to the profiled surface of the at least partially transparent layer, weighted by a fractional cross-sectional area of the small roughness component at the particular height.

2. The device of claim 1, wherein at least one of the first variation or the second variation is a non-periodic random variation.

3. The device of claim 1, wherein the set of large roughness components comprises a series of shapes being at least one of:

a truncated pyramid or a truncated cone.

4. The device of claim 3, wherein the series of shapes are inversely truncated to facilitate focusing of the radiation.

5. The device of claim 3, wherein each of the series of shapes has a cone opening angle less than normal.

6. The device of claim 3, wherein a side of each of the series of shapes forms an angle with the normal to a base of the shape less than forty-five degrees.

7. The device of claim 1, wherein the set of small roughness components forms a photonic crystal.

8. The device of claim 1, wherein the at least partially transparent layer is a substrate for the device, and wherein the profiled surface is an outer surface of the substrate.

9. The device of claim 1, wherein the device is configured to operate as one of:

a light emitting diode, a laser diode, or a super-luminescent light emitting diode, and wherein the target wavelength of the radiation corresponds to a peak wavelength of radiation generated in an active region of the device.

10. An emitting device comprising:

a group III-nitride based semiconductor structure including an active region, the active region configured to generate radiation having a peak wavelength;

an at least partially transparent layer on a first side of the active region, wherein radiation generated in the active region passes through the at least partially transparent layer, and wherein the at least partially transparent layer includes at least one profiled surface, wherein the at least one profiled surface includes;

a set of large roughness components providing a first variation of the profiled surface having a characteristic scale approximately an order of magnitude larger than a target wavelength of the radiation; and

a set of small roughness components providing a second variation of the profiled surface having a characteristic scale on the order of the target wavelength of the radiation, wherein the set of small roughness components are superimposed on the set of large roughness components, and wherein a graded refractive index along a height of each small roughness component in the set of small roughness components decreases substantially linearly along the height, and wherein a refractive index at a particular height of a small roughness component corresponds to an average of a refractive index of a material forming the small roughness component and a refractive index of a material adjacent to the profiled surface of the at least partially transparent layer, weighted by a fractional cross-sectional area of the small roughness component at the particular height.

11. The emitting device of claim 10, further comprising a boundary at the at least one profiled surface, wherein a refractive index changes by at least approximately five percent at the boundary.

12. The emitting device of claim 10, wherein the set of small roughness components forms a photonic crystal.

13. The emitting device of claim 10, wherein at least one of the first variation or the second variation is a non-periodic random variation.

14. The emitting device of claim 10, wherein the set of large roughness components comprises a series of shapes being at least one of:

a truncated pyramid or a truncated cone, and wherein the set of small roughness components comprises a plurality of peaks and valleys of a material forming the at least partially transparent layer.

15. An emitting device comprising:

an active region configured to generate radiation having a peak wavelength; and

an at least partially transparent layer on a first side of the active region, wherein radiation generated in the active region passes through the at least partially transparent layer, and wherein the at least partially transparent layer includes at least one profiled surface, wherein the at least one profiled surface includes;

a set of large roughness components providing a first variation of the profiled surface having a characteristic scale approximately an order of magnitude larger than a target wavelength of the radiation; and

a set of small roughness components providing a second variation of the profiled surface having a characteristic scale on the order of the target wavelength of the radiation, wherein the set of small roughness components are superimposed on the set of large roughness components, and wherein a graded refractive index along a height of each small roughness component in the set of small roughness components decreases substantially linearly along the height, and wherein a refractive index at a particular height of a small roughness component corresponds to an average of a refractive index of a material forming the small roughness component and a refractive index of a material adjacent to the profiled surface of the at least partially transparent layer, weighted by a fractional cross-sectional area of the small roughness component at the particular height.

16. The device of claim 15, wherein the set of large roughness components comprises a series of shapes being at least one of:

a truncated pyramid or a truncated cone.

17. The device of claim 16, wherein the set of small roughness components comprises a plurality of peaks and valleys of a material forming the at least partially transparent layer.

18. The device of claim 15, further comprising an at least partially reflective layer on a second side of the active region opposite the first side.

19. The device of claim 15, wherein the device is formed using a group III-nitride based heterostructure.

20. The device of claim 15, wherein the at least partially transparent layer comprises a sapphire substrate of the device, and wherein the at least one profiled surface comprises an outer surface of the substrate.