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Electronic device, method for manufacturing thereof, and electronic apparatus

  • US 9,144,159 B2
  • Filed: 02/06/2013
  • Issued: 09/22/2015
  • Est. Priority Date: 02/09/2012
  • Status: Active Grant
First Claim
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1. An electronic device comprising:

  • a first member having a first surface;

    a second member placed on the first surface of the first member;

    a cavity formed between the first and second members;

    a functional element accommodated in the cavity;

    an external connection terminal disposed outside of the cavity on the first surface of the first member;

    a groove formed in the first surface of the first member, the groove extending from inside of the cavity to the external connection terminal;

    a wiring disposed within the groove and electrically connecting the functional element with the external connection terminal;

    a first through-hole disposed at a position of the second member, the position overlapping the groove in a plan view; and

    a filling member disposed within the first through-hole, whereina depth of the groove is larger than a thickness of the wiring so that an aft gap is provided between the second member and a top surface of the wiring, andthe filling member is formed in the air gap of the groove below the second member so that no air communication is permitted between the inside of the cavity and the external connection terminal via the groove.

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