Rotation rate sensor and method for operating a rotation rate sensor
First Claim
1. A rotation rate sensor, comprising:
- a substrate including a main extension plane;
force transmission elements movably fastened to the substrate using detection springs; and
a seismic mass, the seismic mass being suspended over the force transmission elements movably relative to the substrate such that the seismic mass is excited, using a drive unit, to a drive vibration about a drive axis that is parallel to the main extension plane, and when a rotation rate that extends in parallel to the main extension plane and perpendicularly to the drive axis is present, the seismic mass is excited to a detection vibration about a detection axis that is perpendicular to the main extension plane as a result of Coriolis forces;
wherein the detection springs are connected to the force transmission elements in a region of vibrational nodes.
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Accused Products
Abstract
A rotation rate sensor having a substrate including a main extension plane, force transmission elements that are movably fastened on the substrate using detection springs and a seismic mass are provided, the seismic mass being suspended over the force transmission elements, movably relative to the substrate, in such a way that the seismic mass is able to be excited, using a drive unit, to a drive vibration about a drive axis that is parallel to the main extension plane, and in response to the presence of a rotation rate that extends in parallel to the main extension plane and perpendicular to the drive axis, the seismic mass is excitable, as a result of Coriolis forces, to a detection vibration about a detection axis that is perpendicular to the main extension plane, the detection springs being connected to the force transmission elements in the region of the vibrational nodes.
14 Citations
14 Claims
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1. A rotation rate sensor, comprising:
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a substrate including a main extension plane; force transmission elements movably fastened to the substrate using detection springs; and a seismic mass, the seismic mass being suspended over the force transmission elements movably relative to the substrate such that the seismic mass is excited, using a drive unit, to a drive vibration about a drive axis that is parallel to the main extension plane, and when a rotation rate that extends in parallel to the main extension plane and perpendicularly to the drive axis is present, the seismic mass is excited to a detection vibration about a detection axis that is perpendicular to the main extension plane as a result of Coriolis forces; wherein the detection springs are connected to the force transmission elements in a region of vibrational nodes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 11, 12, 13)
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9. A method for operating a rotation rate sensor comprising a substrate including a main extension plane, force transmission elements movably fastened to the substrate using detection springs, and a seismic mass, the seismic mass being suspended over the force transmission elements movably relative to the substrate such that the seismic mass is excited, using a drive unit, to a drive vibration about a drive axis that is parallel to the main extension plane, and when a rotation rate that extends in parallel to the main extension plane and perpendicularly to the drive axis is present, the seismic mass is excited to a detection vibration about a detection axis that is perpendicular to the main extension plane as a result of Coriolis forces, wherein the detection springs are connected to the force transmission elements in a region of vibrational nodes, the method comprising:
exciting the seismic mass to the drive vibration about the drive axis using the drive unit, the drive vibration being coupled into the force transmission elements such that a standing wave is produced in the force transmission elements, the force transmission elements being fixed to the vibrational nodes of the standing wave using the detection springs. - View Dependent Claims (10)
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14. A rotation rate sensor, comprising:
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a substrate extending in a main extension plane; a drive unit; force transmission elements movably fastened to the substrate via detection springs; a seismic mass that is suspended between the force transmission elements and is movable relative to the substrate; and a detection element; wherein; the drive unit is configured to excite the seismic mass into a drive mode in which the seismic mass rotationally vibrates with a drive vibration about a drive axis that is parallel to the main extension plane; the drive unit and the force transmission elements are coupled to each other such that the drive vibration of the seismic mass causes the force transmission elements to be excited to a standing wave with vibrational nodes; the detection springs are connected to the force transmission elements at the vibrational nodes, so that the excitation of the force transmission elements to the standing wave causes essentially no movement of the detection springs; the seismic mass is configured to, when in the drive mode, respond to a Coriolis force generated by a rotation rate about an axis that is perpendicular to the drive axis and is parallel to the main extension plane by rotationally vibrating about a detection axis that is perpendicular to the main extension plane; and the rotational vibration of the seismic mass about the detection axis causes the force transmission elements to a vibration which the detection element is configured to detect.
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Specification