Conical graphite electrode with raised edge
First Claim
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1. An electrode comprising carbon having a specific thermal conductivity from 20 to 200 W/(m*K), said electrode comprising:
- a main body having a cross-section defining a base surface of the electrode; and
a conical or pyramidal tip comprising a device having a cavity adapted to receive a filament rod adapted to grow in size, the conical or pyramidal tip including a top and a base radially outside and longitudinally below the top,wherein the conical or pyramidal tip is surrounded by at least one raised edge radially outside and longitudinally above the base of the conical or pyramidal tip,wherein the raised edge is adapted to avoid collapse of the electrode during a deposition process whereby the filament rod grows in a deposition reactor due to sol silicon deposition on the filament rod, wherein the electrode comprises a plurality of zones of different materials with different specific thermal conductivities, the specific thermal conductivities of materials increasing from the inside outward, and wherein at least one inner zone is a loose or replaceable insert.
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Abstract
A carbon electrode has a conical or pyramidal tip, wherein the tip is surrounded on its side by a raised edge.
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Citations
17 Claims
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1. An electrode comprising carbon having a specific thermal conductivity from 20 to 200 W/(m*K), said electrode comprising:
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a main body having a cross-section defining a base surface of the electrode; and a conical or pyramidal tip comprising a device having a cavity adapted to receive a filament rod adapted to grow in size, the conical or pyramidal tip including a top and a base radially outside and longitudinally below the top, wherein the conical or pyramidal tip is surrounded by at least one raised edge radially outside and longitudinally above the base of the conical or pyramidal tip, wherein the raised edge is adapted to avoid collapse of the electrode during a deposition process whereby the filament rod grows in a deposition reactor due to sol silicon deposition on the filament rod, wherein the electrode comprises a plurality of zones of different materials with different specific thermal conductivities, the specific thermal conductivities of materials increasing from the inside outward, and wherein at least one inner zone is a loose or replaceable insert. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method for producing polycrystalline silicon by depositing highly pure elementary silicon from a gas phase onto a surface of silicon rods, wherein at least one of the silicon rods is held in a deposition reactor by an electrode comprising carbon having a specific thermal conductivity from 20 to 200 W/(m*K), said electrode comprising:
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a main body having a cross-section defining a base surface of the electrode; and a conical or pyramidal tip comprising a device having a cavity adapted to receive a filament rod adapted to grow in size, the conical or pyramidal tip including a top and a base radially outside and longitudinally below the top, wherein the conical or pyramidal tip is surrounded by at least one raised edge radially outside and longitudinally above the base of the conical or pyramidal tip, wherein the raised edge is adapted to avoid collapse of the electrode during a deposition process whereby the filament rod grows in a deposition reactor due to polysilicon deposition on the filament rod, wherein the electrode comprises a plurality of zones of different materials with different specific thermal conductivities, the specific thermal conductivities of materials increasing from the inside outward, and wherein at least one inner zone is a loose or replaceable insert.
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13. An electrode comprising carbon having a specific thermal conductivity from 20 to 200 W/(m*K), said electrode comprising:
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a main body having a cross section defining a base surface of the electrode; and a conical or pyramidal tip comprising a device having a cavity adapted to receive a filament rod adapted to grow in size, the conical or pyramidal tip including a top and a base radially outside and longitudinally below the top, wherein the conical or pyramidal tip is surrounded by at least one raised edge radially outside and at least 15 mm longitudinally above the base of the conical or pyramidal tip, and wherein the raised edge is adapted to avoid collapse of the electrode during a deposition process whereby the filament rod grows in a deposition reactor due to polysilicon deposition on the filament rod, wherein the electrode comprises a plurality of zones of different materials with different specific thermal conductivities, the specific thermal conductivities of materials increasing from the inside outward, and wherein at least one inner zone is a loose or replaceable insert. - View Dependent Claims (14, 15, 16, 17)
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Specification