×

Vapor deposition of anti-stiction layer for micromechanical devices

  • US 9,150,959 B2
  • Filed: 04/19/2011
  • Issued: 10/06/2015
  • Est. Priority Date: 05/25/2005
  • Status: Active Grant
First Claim
Patent Images

1. A method of passivating the surfaces of a micromechanical device, the method comprising:

  • providing a micromechanical device within a sealed chamber;

    pulling a partial vacuum in the chamber;

    introducing a vapor consisting of passivants to an inlet to the chamber having a filter-diffuser located thereat, the passivants include perfluordecanoic acid (PFDA);

    simultaneously, at the filter-diffuser, filtering the vapor arriving at the inlet and injecting the vapor in multiple directions to uniformly distribute the vapor within the chamber, the vapor being injected through a manifold having a cylindrical body portion coupled to a central cylindrical cavity, wherein filters are attached to the periphery thereof and extend radially outward from the body portion;

    flowing the vapor from the manifold to the central cylindrical cavity and radially outward through the filters and into the chamber;

    filtering the vapor at the inlet such that pores in the filter walls allow individual PFDA molecules to flow through the filter walls but that filter out larger PFDA particles; and

    allowing the vapor to react with the surfaces of the micromechanical device for a predetermined time.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×