Two way gate valve and substrate processing system having the same
First Claim
1. A two way gate valve comprising:
- a valve chamber havinga first entrance coupled with a first chamber,a second entrance coupled with a second chamber, andan openable and closable chamber cover;
a moving module includinga first sealing plate for sealing the first entrance,a second sealing plate for sealing the second entrance, anda moving module body to which the first and the second sealing plates are mounted;
a push-pull module includinga push-pull module body coupled with the moving module body such that the moving module body can linearly move,a first operating body disposed inside the push-pull module body and directly contacting the first sealing plate to move the first sealing plate in a first entrance direction such that the first sealing plate seals the first entrance, anda second operating body disposed inside the push-pull module body and directly contacting the second sealing plate to move the second sealing plate in a second entrance direction such that the second sealing plate seals the second entrance,wherein the first operating body and the second operating body are disposed in a row along the push-pull module body;
a first driving unit, coupled with the first operating body, to drive the first operating body;
a second driving unit, coupled with the second operating body, to drive the second operating body; and
a third driving unit moving the push-pull module between an operation position and a standby position,wherein the first, second and third driving units are arranged in the row and the third driving unit is disposed in a middle of the row, andwherein, when the push-pull module is moved to the operation position by the third driving unit, the first operating body is operated by the first driving unit and the second operating body is operated by the second driving unit, so that one of the first entrance and the second entrance is selectively sealed.
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Accused Products
Abstract
A two way gate valve includes a valve chamber having a first entrance coupled with a first chamber, a second entrance coupled with a second chamber, and an openable and closable chamber cover; a moving module having a first sealing plate for sealing the first entrance, a second sealing plate for sealing the second entrance, and a moving module body to which the first and the second sealing plates are mounted; a push-pull module having a push-pull module body coupled with the moving module body such that the moving module body can linearly move, a first operating body for moving the moving module in a first entrance direction such that the first sealing plate seals the first entrance, and a second operating body for moving the moving module in a second entrance direction such that the second sealing plate seals the second entrance.
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Citations
18 Claims
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1. A two way gate valve comprising:
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a valve chamber having a first entrance coupled with a first chamber, a second entrance coupled with a second chamber, and an openable and closable chamber cover; a moving module including a first sealing plate for sealing the first entrance, a second sealing plate for sealing the second entrance, and a moving module body to which the first and the second sealing plates are mounted; a push-pull module including a push-pull module body coupled with the moving module body such that the moving module body can linearly move, a first operating body disposed inside the push-pull module body and directly contacting the first sealing plate to move the first sealing plate in a first entrance direction such that the first sealing plate seals the first entrance, and a second operating body disposed inside the push-pull module body and directly contacting the second sealing plate to move the second sealing plate in a second entrance direction such that the second sealing plate seals the second entrance, wherein the first operating body and the second operating body are disposed in a row along the push-pull module body; a first driving unit, coupled with the first operating body, to drive the first operating body; a second driving unit, coupled with the second operating body, to drive the second operating body; and a third driving unit moving the push-pull module between an operation position and a standby position, wherein the first, second and third driving units are arranged in the row and the third driving unit is disposed in a middle of the row, and wherein, when the push-pull module is moved to the operation position by the third driving unit, the first operating body is operated by the first driving unit and the second operating body is operated by the second driving unit, so that one of the first entrance and the second entrance is selectively sealed. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A substrate processing system comprising:
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a first chamber; a second chamber; a valve chamber having a first entrance coupled with the first chamber, a second entrance coupled with the second chamber, and an openable and closable chamber cover; a moving module including a first sealing plate for sealing the first entrance, a sealing plate for sealing the second entrance, and a moving module body to which the first and second sealing plates are mounted; a push-pull module including a push-pull module body coupled with the moving module body such that the moving module body can linearly move, a first operating body disposed inside the push-pull module body and directly contacting the first sealing plate to move the first sealing plate in a first entrance direction such that the first sealing plate seals the first entrance, and a second operating body disposed inside the push-pull module body and directly contacting the second sealing plate to move the second sealing plate in a second entrance direction such that the second sealing plate seals the second entrance, wherein the first operating body and the second operating body are disposed in a row along the push-pull module body; a first driving unit, coupled with the first operating body, to drive the first operating body; a second driving unit, coupled with the second operating body, to drive the second operating body; and a third driving unit moving the push-pull module between an operation position and a standby position, wherein the first, second and third driving units are arranged in the row and the third driving unit is disposed in a middle of the row, and wherein, when the push-pull module is moved to the operation position by the third driving unit, the first operating body is operated by the first driving unit or the second operating body is operated by the second driving unit, so that one of the first entrance and the second entrance is selectively sealed. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification