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Physical quantity sensor and electronic apparatus

  • US 9,151,775 B2
  • Filed: 08/08/2012
  • Issued: 10/06/2015
  • Est. Priority Date: 08/17/2011
  • Status: Active Grant
First Claim
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1. A physical quantity sensor comprising:

  • a base substrate provided with a first recess having a first bottom surface, a second recess having a second bottom surface and a third recess having a third bottom surface, the first and second bottom surfaces being continuously provided via a first step, the first and third bottom surfaces being continuously provided via a second step, the second bottom surface being deeper than the first bottom surface, the third bottom surface being deeper than the second bottom surface; and

    a sensor substrate that is located above the base substrate by way of the first through third recesses, the sensor substrate includes;

    a peripheral frame contacting the base substrate;

    a sensor that is circumscribed by the peripheral frame in a plan view, the sensor being movably supported by the peripheral frame; and

    a support that connects the sensor to the peripheral frame,wherein the sensor is sectioned into a first part and a second part by the support, includes first and second movable electrodes in the first part and the second part, respectively, the second part is larger in mass than the first part, and a through hole is provided at least in one of the first part and the second part, andthe base substrate includes a first fixed electrode in a first position overlapping with the first movable electrode in the plan view, and the first fixed electrode is continuously provided on part of the first and second bottom surfaces and the first step, andthe base substrate include a second fixed electrode in a second position overlapping with the second movable electrode in the plan view, and the second fixed electrode is continuously provided on part of the first and third bottom surfaces and the second step.

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