Neutron-detecting apparatuses and methods of fabrication

• US 9,151,853 B2
• Filed: 11/07/2013
• Issued: 10/06/2015
• Est. Priority Date: 11/07/2012
• Status: Active Grant

• Current Assignee: Rensselaer Polytechnic Institute
• Original Assignee: Rensselaer Polytechnic Institute
• Inventors: Dahal, Rajendra P., Huang, Jacky Kuan-Chih, Lu, James J. Q., Danon, Yaron, Bhat, Ishwara B.
• Primary Examiner(s): Rodela, Eduardo A
• Application Number:
  US14/074,131
• Publication Number:
  US 20140252520A1
• Time in Patent Office: 698 Days
• Field of Search: 257/414, 257/428, 257/429, 257/513, 257/514, 257/622, 257/E31.001, 257/E31.032, 257/E27.122
• US Class Current: 1/1
• CPC Class Codes: G01T 3/00 Measuring neutron radiation G01T5/00 takes precedence
• CPC Class Codes: G01T 3/08 with semiconductor detectors
• CPC Class Codes: H01L 27/142 Energy conversion devices photovoltaic modules or arrays of single photovoltaic cells comprising bypass diodes integrated or directly associated with the devices H01L31/0443; photovoltaic modules composed of a plurality of thin film solar cells deposited on the same substrate H01L31/046
• CPC Class Codes: H01L 27/1443 with at least one potential jump or surface barrier
• CPC Class Codes: H01L 31/02161 for devices characterised by at least one potential jump barrier or surface barrier
• CPC Class Codes: H01L 31/03529 Shape of the potential jump barrier or surface barrier
• CPC Class Codes: H01L 31/115 Devices sensitive to very short wavelength, e.g. X-rays, gamma-rays or corpuscular radiation
• CPC Class Codes: H01L 31/18 Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
• CPC Class Codes: Y02E 10/50 Photovoltaic [PV] energy

Abstract

Neutron-detecting structures and methods of fabrication are provided which include: a substrate with a plurality of cavities extending into the substrate from a surface; a p-n junction within the substrate and extending, at least in part, in spaced opposing relation to inner cavity walls of the substrate defining the plurality of cavities; and a neutron-responsive material disposed within the plurality of cavities. The neutron-responsive material is responsive to neutrons absorbed for releasing ionization radiation products, and the p-n junction within the substrate spaced in opposing relation to and extending, at least in part, along the inner cavity walls of the substrate reduces leakage current of the neutron-detecting structure.

Claims

1. An apparatus comprising:

a neutron-detecting structure, the neutron-detecting structure comprising;

a substrate comprising a plurality of cavities extending into the substrate from a surface thereof;

a p-n junction within the substrate and extending, at least in part, in spaced opposing relation to inner cavity walls of the substrate defining the plurality of cavities therein;

a neutron-responsive material disposed within the plurality of cavities, the neutron-responsive material being responsive to neutrons absorbed thereby for releasing ionizing radiation reaction products, wherein the p-n junction within the substrate spaced in opposing relation to and extending, at least in part, along the inner cavity walls of the substrate reduces leakage current of the neutron-detecting structure;

wherein the p-n junction within the substrate is a continuous p-n junction, the continuous p-n junction being disposed, in part, parallel to the surface of the substrate from which the plurality of cavities extend into the substrate, as well as in spaced opposing relation to the inner cavity walls of the substrate; and

wherein the continuous p-n junction is spaced from the surface of the substrate a greater distance than the continuous p-n junction is spaced in opposing relation to the inner cavity walls of the substrate.

2. The apparatus of claim 1,

wherein, in operation, the substrate comprises a depletion region, the depletion region extending within the substrate to at least a depth of the plurality of cavities within the substrate.

3. The apparatus of claim 2, wherein the depletion region of the substrate resides, at least in part, within an n⁻

region of the substrate, the n⁻

region of the substrate being above an n⁺ region of the substrate.

4. The apparatus of claim 1, wherein at least one cavity of the plurality of cavities within the substrate is, at least in part, a hexagonal-cross-sectional-shaped cavity.

5. The apparatus of claim 1, wherein the plurality of cavities are arrayed, at least in part, in a honeycomb pattern within the substrate.

6. The apparatus of claim 1, further comprising multiple neutron-detecting structures, the neutron-detecting structure being one neutron-detecting structure of the multiple neutron-detecting structures, and wherein the multiple neutron-detecting structures are electrically coupled in series.

7. The apparatus of claim 1, wherein the neutron-detecting structure is designed to operate at zero bias voltage.

8. The apparatus of claim 1, wherein the p-n junction extends into the substrate, parallel to the inner cavity walls thereof to at least a depth of a cavity of the plurality of cavities within the substrate.

9. The apparatus of claim 1, wherein the p-n junction extends into the substrate conformally about the plurality of cavities within the substrate.