Photomasks and methods for using same

• US 9,152,038 B2
• Filed: 09/11/2012
• Issued: 10/06/2015
• Est. Priority Date: 05/29/2012
• Status: Active Grant

• Current Assignee: Apple Inc.
• Original Assignee: Apple Inc.
• Inventors: Browning, Lucy Elizabeth, Howarth, Richard P., Jensen, Peggy, Polley, John
• Primary Examiner(s): YOUNG, CHRISTOPHER G
• Application Number:
  US13/610,814
• Publication Number:
  US 20130319873A1
• Time in Patent Office: 1,120 Days
• Field of Search: 430/5
• US Class Current: 1/1
• CPC Class Codes: B23C 2220/04 Milling with the axis of the cutter inclined to the surface being machined
• CPC Class Codes: B23C 2220/16 Chamferring
• CPC Class Codes: B23C 2220/20 Deburring
• CPC Class Codes: B23C 2220/28 Finishing roughing and finishing B23C2220/605
• CPC Class Codes: B23C 2220/48 Methods of milling not otherwise provided for
• CPC Class Codes: B23C 2226/31 Diamond
• CPC Class Codes: B23C 2226/315 polycrystalline [PCD]
• CPC Class Codes: B23C 5/00 Milling-cutters for cutting gear-teeth B23F21/12
• CPC Class Codes: B23C 5/1081 with permanently fixed cutting inserts B23C5/1018 and B23C5/1063 take precedence
• CPC Class Codes: B23P 11/00 Connecting or disconnecting metal parts or objects by metal-working techniques not otherwise provided for connecting sheet metal or metal tubes, rods or profiles B21D39/00; riveting B21J; soldering, unsoldering, welding B23K; hand tools for connecting wire or strip B25B25/00; connecting metal parts by adhesives F16B11/00
• CPC Class Codes: B23P 17/00 Metal-working operations, not covered by a single other subclass or another group in this subclass
• CPC Class Codes: B23P 17/02 Single metal-working processes; Machines or apparatus therefor
• CPC Class Codes: C25D 11/02 Anodisation
• CPC Class Codes: C25D 11/022 Anodisation on selected surface areas
• CPC Class Codes: C25D 11/12 Anodising more than once, e.g. in different baths
• CPC Class Codes: C25D 11/246 for sealing layers
• CPC Class Codes: C25D 11/34 of metals or alloys not provided for in groups C25D11/04 - C25D11/32
• CPC Class Codes: G03F 1/38 Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
• CPC Class Codes: H01Q 1/243 with built-in antennas
• CPC Class Codes: H01Q 1/42 Housings not intimately mechanically associated with radiating elements, e.g. radome
• CPC Class Codes: H04M 1/0249 : Details of the mechanical connection between the housing parts or relating to the method of assembly
• CPC Class Codes: H04M 1/0254 : comprising one or a plurality of mechanically detachable modules
• CPC Class Codes: H04M 1/11 : Supports for sets, e.g. incorporating armrests
• CPC Class Codes: H05K 13/00 : Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
• CPC Class Codes: H05K 5/02 : Details
• CPC Class Codes: H05K 5/0217 : Mechanical details of casings covers, lids, hoods or members for covering apertures H05K5/03
• CPC Class Codes: H05K 5/0243 : for decorative purposes
• CPC Class Codes: H05K 5/0247 : Electrical details of casings, e.g. terminals, passages for cables or wiring
• CPC Class Codes: H05K 5/03 : Covers
• CPC Class Codes: H05K 5/04 : Metal casings
• CPC Class Codes: Y10T 156/10 : Methods of surface bonding and/or assembly therefor
• CPC Class Codes: Y10T 156/1064 : Partial cutting [e.g., grooving or incising]
• CPC Class Codes: Y10T 29/47 : Burnishing
• CPC Class Codes: Y10T 29/49002 : Electrical device making
• CPC Class Codes: Y10T 29/49826 : Assembling or joining
• CPC Class Codes: Y10T 407/1906 : including holder [i.e., head] having seat for inserted tool
• CPC Class Codes: Y10T 409/300896 : with sensing of numerical information and regulation without mechanical connection between sensing means and regulated means [i.e., numerical control]
• CPC Class Codes: Y10T 409/303752 : Process
• CPC Class Codes: Y10T 409/30952 : with cutter holder

Abstract

Methods and structures for forming anodization layers that protect and cosmetically enhance metal surfaces are described. In some embodiments, methods involve forming an anodization layer on an underlying metal that permits an underlying metal surface to be viewable. In some embodiments, methods involve forming a first anodization layer and an adjacent second anodization layer on an angled surface, the interface between the two anodization layers being regular and uniform. Described are photomasking techniques and tools for providing sharply defined corners on anodized and texturized patterns on metal surfaces. Also described are techniques and tools for providing anodizing resistant components in the manufacture of electronic devices.

Claims

1. A photomask suitable for forming a photoresist pattern on an aluminum substrate, the photoresist pattern associated with a surface feature created while anodizing the aluminum substrate, the photomask comprising:

an exterior corner including a first pre-distortion feature, the first pre-distortion feature configured to reduce an amount of corner erosion caused by a subsequent blasting operation at a corresponding exterior corner of the photoresist pattern, wherein the first pre-distortion feature is used to create a first feature at the exterior corner of the photoresist pattern that compensates for erosion of the exterior corner of the photoresist pattern from a blasting media; and

an interior corner including a second pre-distortion feature, the second pre-distortion feature configured to reduce an amount of corner erosion caused by a subsequent blasting operation at a corresponding interior corner of the photoresist pattern, wherein the second pre-distortion feature is used to create a second feature at the interior corner of the photoresist pattern that compensates for erosion of the interior corner of the photoresist pattern from the blasting media.

2. The photomask as recited in claim 1, wherein first and second pre-distortion features further compensate for corner rounding caused by a subsequent anodizing process.

3. The photomask as recited in claim 2, wherein the first pre-distortion feature extends from the exterior corner of the photomask and the second pre-distortion feature recesses within the interior corner of the photomask.

4. The photomask as recited in claim 3, wherein subsequent to a photolithography process, the first feature and the second feature of the photoresist pattern are rounded in comparison to the corresponding first and second pre-distortion features of the photomask.

5. The photomask as recited in claim 4, wherein during the subsequent blasting operation a portion of the first feature and second feature are removed, thereby further rounding the first feature and second feature.

6. The photomask as recited in claim 5, wherein subsequent to removal of the photoresist pattern from the aluminum substrate and use of an anodization process, a first corner and second corner on an anodization layer are rounded in comparison to the corresponding first feature and second feature.

7. The photomask as recited in claim 2, wherein the blasting operation is performed prior to the anodizing process.

8. The photomask as recited in claim 1, wherein the blasting operation comprises using a zirconia blasting media applied under pressure.

9. The photomask as recited in claim 2, wherein the photoresist pattern has a thickness suitable for withstanding the blasting and anodizing operations and prevent damage to the aluminum substrate.

10. The photomask as recited in claim 1, wherein the photoresist pattern is a negative photoresist.

11. The photomask as recited in claim 1, wherein the photoresist pattern is a positive photoresist.

12. A method of forming a pattern on an aluminum substrate, the method comprising:

forming a patterned photoresist on the aluminum substrate using a photomask comprising an exterior corner with a first pre-distortion feature and an interior corner with a second pre-distortion feature, wherein the first pre-distortion feature is used to create a first feature at a photoresist exterior corner and the second pre-distortion feature is used to create a second feature at a photoresist interior corner;

blasting the aluminum substrate with a blasting media to form a blasted surface on portions of the aluminum substrate unprotected by the patterned photoresist, wherein the first feature compensates for erosion of the photoresist exterior corner and the second feature compensates for erosion of the photoresist interior corner;

removing the patterned photoresist from the aluminum substrate revealing the pattern with distinct corners on the aluminum substrate; and

forming an anodization layer on the aluminum substrate.

13. The method as recited in claim 12, wherein the first pre-distortion feature extends from the exterior corner and the second pre-distortion feature recesses within the interior corner.

14. The method as recited in claim 13, wherein subsequent to a photolithography process, the first feature and second feature of the patterned photoresist are rounded in comparison to the corresponding first and second pre-distortion features of the photomask.

15. The method as recited in claim 14, wherein during the blasting a portion of the first feature and second feature of the patterned photoresist are removed.

16. The method as recited in claim 15, wherein subsequent to removal of the patterned photoresist from the aluminum substrate and forming the anodization layer, a first corner and a second corner on the anodization layer are rounded in comparison to the corresponding first feature and second feature of the patterned photoresist.

17. The method as recited in claim 12, wherein forming the patterned photoresist comprises use of a negative photoresist.

18. The method as recited in claim 12, wherein forming the patterned photoresist comprises use of a positive photoresist.

19. A method of forming a pattern on an aluminum substrate, the method comprising:

forming a patterned photoresist on the aluminum substrate using a photomask comprising an exterior corner having a first pre-distortion feature and an interior corner having a second pre-distortion feature, wherein the first pre-distortion feature is used to form a first feature at a photoresist exterior corner and the second pre-distortion feature is used to form a second feature at a photoresist interior corner; and

forming a textured surface on portions of the aluminum substrate unprotected by the photoresist pattern by blasting the aluminum substrate with a blasting media, wherein the first feature compensates for erosion of the photoresist exterior corner and the second feature compensates for erosion of the photoresist interior corner such that the pattern on the aluminum substrate has sharply defined corners.

20. The method as recited in claim 19, further comprising forming an anodization layer on the aluminum substrate.

21. The method as recited in claim 19, wherein the blasting media process comprises using a zirconia blasting media applied under pressure.