Light-transmitting metal electrode and process for production thereof

• US 9,153,363 B2
• Filed: 02/06/2014
• Issued: 10/06/2015
• Est. Priority Date: 02/25/2008
• Status: Expired due to Fees

• Current Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Original Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: Tsutsumi, Eishi, Nakanishi, Tsutomu, Fujimoto, Akira, Asakawa, Koji
• Primary Examiner(s): Crawford, Latanya N
• Application Number:
  US14/173,868
• Publication Number:
  US 20140151326A1
• Time in Patent Office: 607 Days
• Field of Search: 438/28, 438/29, 257/E21.492, 427/162, 216/17
• US Class Current: 1/1
• CPC Class Codes: H01B 13/0036 Details
• CPC Class Codes: H01J 1/02 Main electrodes
• CPC Class Codes: H01J 17/04 Electrodes; Screens
• CPC Class Codes: H01J 2217/49207 Electrodes
• CPC Class Codes: H01J 63/02 Details, e.g. electrode, gas filling, shape of vessel
• CPC Class Codes: H01J 9/02 Manufacture of electrodes or electrode systems

Abstract

The present invention provides a light-transmitting metal electrode including a substrate and a metal electrode layer having plural openings. The metal electrode layer also has such a continuous metal part that any pair of point-positions in the part is continuously connected without breaks. The openings in the metal electrode layer are periodically arranged to form plural microdomains. The plural microdomains are so placed that the in-plane arranging directions thereof are oriented independently of each other. The thickness of the metal electrode layer is in the range of 10 to 200 nm.

Claims

1. A process for production of a light-transmitting metal electrode, comprising:

preparing a substrate; and

carrying out an etching process using a monoparticle layer of fine particles arranged in the form of a dot pattern of microdomains as a mask, to produce a metal electrode layer, on the substrate, having a thickness of 10 to 200 nm and including

a continuous metal part, any two points in the continuous metal part being continuously connected without breaks, and

a plurality of openings penetrating through the metal electrode layer and being arranged so that a distribution of the openings is represented by a radial distribution function curve having a half-width of 5 to 300 nm.

2. A process for production of a light-transmitting metal electrode, comprising:

preparing a substrate;

forming an organic polymer layer on the substrate;

forming a monoparticle layer of fine particles in the form of a dot pattern of microdomains on the organic polymer layer;

processing the fine particles by etching until the fine particles have a desired size;

etching the organic polymer layer, so that columnar structures made of organic polymer and the etching-processed fine particles are formed on the substrate;

forming a metal electrode layer, among the formed columnar structures, to have a thickness of 10 to 200 nm and include

a continuous metal part, any two points in the continuous metal part being continuously connected without breaks, and

a plurality of openings penetrating through the metal electrode layer and being arranged so that a distribution of the openings is represented by a radial distribution function curve having a half-width of 5 to 300 nm; and

removing the organic polymer layer.

3. A process for production of a light transmitting metal electrode comprising:

preparing a substrate;

forming an organic polymer layer on the substrate;

forming a monoparticle layer of fine particles in the form of a dot pattern of microdomains on the organic polymer layer;

processing the fine particles by etching until the fine particles have a desired size;

etching the organic polymer layer, so that columnar structures made of organic polymer and the etching-processed fine particles are formed on the substrate;

forming a metal electrode layer, among the formed columnar structures, to have a thickness of 10 to 200 nm and include a plurality of microdomains neighboring each other, wherein;

each of the microdomains includes

a continuous metal part, any two points in the continuous metal part being continuously connected without breaks, and

a plurality of openings penetrating through the metal electrode layer and being arranged periodically along an arranging direction,

the arranging directions of two neighboring microdomains are different from each other, and

a distribution of the openings in the metal electrode layer is represented by a radial distribution function curve having a half-width of 5 to 300 nm; and

removing the organic polymer layer.

4. A process for production of a light-transmitting metal electrode, comprising:

preparing a substrate,

performing an etching process by using a monoparticle layer of fine particles arranged in the form of a dot pattern of microdomains as a mask, to form a structure having the dot pattern on the substrate,

using the dot-patterned structure formed on the substrate as a mold, to produce a stamper having said structure on a second substrate,

putting said stamper onto a third substrate so as to transfer the pattern, so that a structure having the transferred pattern is formed; and

then using the structure formed by transferring as a mask to produce a metal electrode layer having openings.

5. A process for production of a light-transmitting metal electrode including a plurality of microdomains neighboring each other, comprising:

preparing a substrate,

performing an etching process by using a monoparticle layer of fine particles arranged in the form of a dot pattern of microdomains as a mask, to form a structure having the dot pattern,

using the dot-patterned structure formed on the substrate as a mold, to produce a stamper having said structure on a second substrate,

putting said stamper onto a third substrate so as to transfer the pattern, so that a structure having the transferred pattern is formed; and

then using the structure formed by transferring as a mask to produce a metal electrode layer having openings.