Pressure measurement device having an optimized sensitivity
First Claim
1. A MEMS and/or NEMS pressure measurement device, comprising:
- at least one deformable membrane suspended on a substrate, a face of the membrane being configured to be subjected to a pressure to be measured;
a detector configured to detect deformation of the deformable membrane, said detector being provided at least partly on the substrate;
a transmission device configured to transmit the deformation of the deformable membrane to the detector, said transmission device being non-deformable; and
a hinging element, which rotatably hinges the transmission device to the substrate about an axis substantially parallel to the plane of the membrane and being provided facing another face of the membrane opposite to the face configured to be subjected to the pressure to be measured, such that at least beyond a given pressure said transmission device and the membrane are movably integral with each other, and such that the transmission device transmits to the detector, in an amplified manner, the deformation or the stress from the deformation of the membrane.
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Accused Products
Abstract
A MEMS and/or NEMS pressure measurement device includes a deformable membrane suspended on a substrate, one of the faces of the membrane configured to be subjected to a pressure to be measured, a detector configured to detect deformation of the membrane and being provided at least partly on the substrate; and a non-deformable transmission device configured to transmit the deformation of the membrane to the detector, said transmission device rotatably hinged to the substrate about an axis substantially parallel to the plane of the membrane and being provided facing another face of the membrane opposite to said one of the faces, such that at least beyond a given pressure said transmission device and the membrane are movably integral with each other, and such that the transmission device transmits to the detector, in an amplified manner, the deformation or the stress from the deformation of the membrane.
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Citations
31 Claims
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1. A MEMS and/or NEMS pressure measurement device, comprising:
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at least one deformable membrane suspended on a substrate, a face of the membrane being configured to be subjected to a pressure to be measured; a detector configured to detect deformation of the deformable membrane, said detector being provided at least partly on the substrate; a transmission device configured to transmit the deformation of the deformable membrane to the detector, said transmission device being non-deformable; and a hinging element, which rotatably hinges the transmission device to the substrate about an axis substantially parallel to the plane of the membrane and being provided facing another face of the membrane opposite to the face configured to be subjected to the pressure to be measured, such that at least beyond a given pressure said transmission device and the membrane are movably integral with each other, and such that the transmission device transmits to the detector, in an amplified manner, the deformation or the stress from the deformation of the membrane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
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Specification